Influence of Strong Light on the Performance of Piezoresistive Pressure Sensor

Abstract It is found that the strong light in the explosion field has great interference to the piezoresistive pressure sensor, then the shock wave data obtained by the sensor is distorted badly. To study the influence mechanism of the strong light on the piezoresistive pressure sensor, a strong light experimental platform is built. The positions of the sensor and the light source are adjusted, and the outputs of the piezoresistive pressure sensor are observed. Through microscopic simulation, the influence of different light intensities on the piezoresistive pressure sensor is analyzed. In order to reduce the influence of strong light on the performance of piezoresistive pressure sensor, we propose to add a reflective layer on the pressure surface of the sensor. The light reflection effects of different film thicknesses are analyzed through film simulation software. At the same time, the reflection effect is verified through experiments. To explain the effect of the reflective layer on the suppression of strong light, a simulation model is established, and the suppression effect of the reflective layer is verified.