Heterogeneous van der Waals integration of single-crystalline photonic nanomembranes

Heterogeneous van der Waals integration of single-crystalline photonic nanomembranes | Research Square window.SnipcartSettings = { analytics: { enabled: false } }; (function() { var accessVector = localStorage.getItem('access_vector') || ''; window.dataLayer = window.dataLayer || []; if (accessVector) { window.dataLayer.push({ user: { profile: { profileInfo: { snid: accessVector } } } }); } })(); (function(w,d,s,l,i){w[l]=w[l]||[];w[l].push({'gtm.start':new Date().getTime(),event:'gtm.js'});var f=d.getElementsByTagName(s)[0],j=d.createElement(s),dl=l!='dataLayer'?'&l='+l:'';j.async=true;j.src='https://www.googletagmanager.com/gtm.js?id='+i+dl;f.parentNode.insertBefore(j,f);})(window,document,'script','dataLayer','GTM-K279D39R'); Browse Preprints In Review Journals COVID-19 Preprints AJE Video Bytes Research Tools Research Promotion AJE Professional Editing AJE Rubriq About Preprint Platform In Review Editorial Policies Our Team Advisory Board Help Center Sign In Submit a Preprint Cite Share Download PDF Physical Sciences - Article Heterogeneous van der Waals integration of single-crystalline photonic nanomembranes Sang-Hoon Bae, Yuan Meng, Wenbo Mao, Zhihao Xu, Di Jia, Mengxin Lin, and 37 more This is a preprint; it has not been peer reviewed by a journal. https://doi.org/ 10.21203/rs.3.rs-8301417/v1 This work is licensed under a CC BY 4.0 License Status: Under Review Version 1 posted You are reading this latest preprint version Abstract Albeit the speed and energy advantages offered by silicon (Si) and silicon nitride (SiN) photonics, a single material platform, with varying intrinsic limitations, can hardly meet the ever-diversifying requirements posed for photonic integrated circuits (PICs). The heterogeneous integration of functional materials to established photonic platforms has thus gained tremendous momentum, underpinning various high-performance optoelectronic applications. However, stringent lattice-matching constraints severely hinder the heteroepitaxial material quality grown on dissimilar optical substrates. Here we obviate this hurdle by exploiting freestanding single-crystalline nanomembranes enabled by advanced epitaxy and layer lift-off techniques. We present a versatile framework leveraging photonic van der Waals (vdW) integration to infuse desired functionalities to Si and SiN photonics. By transferring single-crystalline thin-film barium titanate (BTO) to Si chips, we experimentally demonstrate ultraefficient electro-optical (EO) modulation, featuring giant Pockels coefficient r_42 over 1290 pm/V and a 3 dB EO bandwidth over 23 GHz, enabled by well-defined BTO crystallographic quality and orientations. Ultracompact non-reciprocal magneto-optical (MO) isolators are further realized, via vdW-integrating cobalt ferrite (CFO) nanomembranes to Si microrings, manifesting an ultrahigh Faraday rotation coefficient θ_F exceeding 33,800 °/cm. To embody the salient capabilities of coalescing functional materials with disparate crystal structures to arbitrary photonic templates, we laterally stitch gallium arsenide and gallium nitride single-crystals atop SiN photonics to realize expansive photodetection from ultraviolet to near infrared wavelengths. Multifunctional ring-resonators for simultaneous EO and MO modulations are also demonstrated by constructing vertical CFO/BTO heterostructures, ushering a vast playground to prototype record-setting heterogeneous integrated applications and study diverse physical coupling phenomena. Physical sciences/Materials science/Materials for optics Physical sciences/Optics and photonics/Optical materials and structures Full Text Additional Declarations There is NO Competing Interest. Supplementary Files SupplementaryInformation1202.docx Supplementary Information Cite Share Download PDF Status: Under Review Version 1 posted You are reading this latest preprint version Research Square lets you share your work early, gain feedback from the community, and start making changes to your manuscript prior to peer review in a journal. As a division of Research Square Company, we’re committed to making research communication faster, fairer, and more useful. We do this by developing innovative software and high quality services for the global research community. Our growing team is made up of researchers and industry professionals working together to solve the most critical problems facing scientific publishing. Also discoverable on Platform About Our Team In Review Editorial Policies Advisory Board Help Center Resources Author Services Accessibility API Access RSS feed Manage Cookie Preferences © Research Square 2026 | ISSN 2693-5015 (online) Privacy Policy Terms of Service Do Not Sell My Personal Information {"props":{"pageProps":{"initialData":{"identity":"rs-8301417","acceptedTermsAndConditions":true,"allowDirectSubmit":false,"archivedVersions":[],"articleType":"Physical Sciences - Article","associatedPublications":[],"authors":[{"id":561325985,"identity":"4fb56f35-8cb0-4ff5-be29-abd7e0b5344d","order_by":0,"name":"Sang-Hoon 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