A scaling law approach to rate fabrication tolerances of double-sided electrostatic actuators

A scaling law approach to rate fabrication tolerances of double-sided electrostatic actuators | Research Square window.SnipcartSettings = { analytics: { enabled: false } }; (function() { var accessVector = localStorage.getItem('access_vector') || ''; window.dataLayer = window.dataLayer || []; if (accessVector) { window.dataLayer.push({ user: { profile: { profileInfo: { snid: accessVector } } } }); } })(); (function(w,d,s,l,i){w[l]=w[l]||[];w[l].push({'gtm.start':new Date().getTime(),event:'gtm.js'});var f=d.getElementsByTagName(s)[0],j=d.createElement(s),dl=l!='dataLayer'?'&l='+l:'';j.async=true;j.src='https://www.googletagmanager.com/gtm.js?id='+i+dl;f.parentNode.insertBefore(j,f);})(window,document,'script','dataLayer','GTM-K279D39R'); Browse Preprints In Review Journals COVID-19 Preprints AJE Video Bytes Research Tools Research Promotion AJE Professional Editing AJE Rubriq About Preprint Platform In Review Editorial Policies Our Team Advisory Board Help Center Sign In Submit a Preprint Cite Share Download PDF Research Article A scaling law approach to rate fabrication tolerances of double-sided electrostatic actuators Franziska Wall, Hermann A. G. Schenk, Anton Melnikov, Bert Kaiser This is a preprint; it has not been peer reviewed by a journal. https://doi.org/ 10.21203/rs.3.rs-4241359/v1 This work is licensed under a CC BY 4.0 License Status: Published Journal Publication published 18 Aug, 2024 Read the published version in Nonlinear Dynamics → Version 1 posted 11 You are reading this latest preprint version Abstract Symmetric double-sided electrostatic actuators in push-pull configuration are particularly suitable for linear actuation with low harmonic distortion. However, their motion still is largely determined by pull-in instabilities that are sensitive to geometry variations. A considerable simulation effort is therefore required when assessing manufacturing tolerances during the design process or determining the optimal operating point. Recently, an accurate method was demonstrated, allowing for the numerically inexpensive and experimentally non-destructive extraction of the full quasi-static performance of a clamped-free beam-like electrostatic micro-mechanical actuator with complex 3D design. The key step was to determine the voltage scaling related to the pull-in voltage based on data collected far away from pull-in conditions. This relates a dimensionless ansatz to the physical input voltages as well as the output like e.g. the actuator's tip deflection. For the chosen approach, however, the relationship between the model and the geometry parameters is unknown. In this paper we extend our method to enable quantifying the impact of geometry parameter variations. In particular, we adapt the model equation for the case of symmetry-breaking tolerances on the basis of few FEM-simulations. The quasi-static pull-in instability, as well as the nonlinear deflection, are consistently reproduced over the full range of relevant combinations of signal and bias voltages. Our analysis was developed in the context of a specific electro-acoustic transducer. However, we find indications that the underlying method is in fact applicable to a much broader range of micro-mechanical actuators. electrostatic actuator double-sided pull-in fabrication tolerances harmonic distortions Full Text Additional Declarations No competing interests reported. Supplementary Files OnlineSource1Supplement.pdf OnlineSource2SinglesidedTildeDeltagFig4.xlsx OnlineSource3PullinBorderFig5.xlsx OnlineSource4TildeDeltag0.5Fig5.xlsx OnlineSource5TildeDeltag0.5Fig5.xlsx OnlineSource6TildeDeltag1Fig5.xlsx OnlineSource7TildeDeltag1Fig5.xlsx OnlineSource8TildeDeltag0Fig5.xlsx OnlineSource9PullinBorderFig6.xlsx OnlineSource10Hatdeltag0.3Fig6.xlsx OnlineSource11Hatdeltag0.05Fig6.xlsx OnlineSource12Hatdeltag0.15Fig6.xlsx OnlineSource13Hatdeltag0Fig6.xlsx OnlineSource14TildeDeltag0.2Fig7.xlsx OnlineSource15TildeDeltag0.2Fig7.xlsx OnlineSource16Hatdeltag0.05Fig8.xlsx Cite Share Download PDF Status: Published Journal Publication published 18 Aug, 2024 Read the published version in Nonlinear Dynamics → Version 1 posted Editorial decision: Revision requested 31 May, 2024 Reviews received at journal 31 May, 2024 Reviews received at journal 30 May, 2024 Reviews received at journal 13 May, 2024 Reviewers agreed at journal 18 Apr, 2024 Reviewers agreed at journal 18 Apr, 2024 Reviewers agreed at journal 16 Apr, 2024 Reviewers invited by journal 16 Apr, 2024 Editor assigned by journal 12 Apr, 2024 Submission checks completed at journal 12 Apr, 2024 First submitted to journal 09 Apr, 2024 You are reading this latest preprint version Research Square lets you share your work early, gain feedback from the community, and start making changes to your manuscript prior to peer review in a journal. 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