Optimizing Fatigue Resistance and Lifetime of MEMS Scanning Mirrors with a Novel Coupled Parameter Distribution Structural Framework

Optimizing Fatigue Resistance and Lifetime of MEMS Scanning Mirrors with a Novel Coupled Parameter Distribution Structural Framework | Research Square window.SnipcartSettings = { analytics: { enabled: false } }; (function() { var accessVector = localStorage.getItem('access_vector') || ''; window.dataLayer = window.dataLayer || []; if (accessVector) { window.dataLayer.push({ user: { profile: { profileInfo: { snid: accessVector } } } }); } })(); (function(w,d,s,l,i){w[l]=w[l]||[];w[l].push({'gtm.start':new Date().getTime(),event:'gtm.js'});var f=d.getElementsByTagName(s)[0],j=d.createElement(s),dl=l!='dataLayer'?'&l='+l:'';j.async=true;j.src='https://www.googletagmanager.com/gtm.js?id='+i+dl;f.parentNode.insertBefore(j,f);})(window,document,'script','dataLayer','GTM-K279D39R'); Browse Preprints In Review Journals COVID-19 Preprints AJE Video Bytes Research Tools Research Promotion AJE Professional Editing AJE Rubriq About Preprint Platform In Review Editorial Policies Our Team Advisory Board Help Center Sign In Submit a Preprint Cite Share Download PDF Article Optimizing Fatigue Resistance and Lifetime of MEMS Scanning Mirrors with a Novel Coupled Parameter Distribution Structural Framework Gaofei Zhang, songtao liu, Zhuohang Zhang, Zheng You This is a preprint; it has not been peer reviewed by a journal. https://doi.org/ 10.21203/rs.3.rs-7100399/v1 This work is licensed under a CC BY 4.0 License Status: Under Review Version 1 posted 9 You are reading this latest preprint version Abstract We present a coupled parameter distribution structural optimization framework that enhances the fatigue resistance and extends the lifetime of micro-electro-mechanical systems (MEMS) scanning mirrors. Simultaneous refinement of the number, distribution, and local width of control points reduces maximum stress by 44.5% and lowers angular creep rates by 36.2%. Under 50°C accelerated aging, lifetime increases from 248 hours to over 688 hours, projecting to ~ 7,650 hours at room temperature—meeting automotive light detection and ranging (LiDAR) demands. Key innovations include: (1) parameter distribution optimization to minimize the maximum stress in the torsion beam while preserving optical performance; (2) control point distribution strategies ensuring robust convergence; and (3) cubic spline interpolation for smooth, fabrication-ready geometries. This framework enables the determination of locally optimal structural configurations within the explored design space, providing a versatile route to extend MEMS scanning mirror lifetimes and manage fatigue in MEMS actuators. Physical sciences/Engineering/Electrical and electronic engineering Physical sciences/Optics and photonics/Applied optics/Optical sensors Full Text Additional Declarations There is no conflict of interest Cite Share Download PDF Status: Under Review Version 1 posted Editorial decision: revise 20 Nov, 2025 Review # 2 received at journal 17 Nov, 2025 Review # 1 received at journal 29 Aug, 2025 Reviewer # 2 agreed at journal 29 Aug, 2025 Reviewer # 1 agreed at journal 26 Aug, 2025 Reviewers invited by journal 25 Aug, 2025 Submission checks completed at journal 15 Jul, 2025 Editor assigned by journal 11 Jul, 2025 First submitted to journal 11 Jul, 2025 You are reading this latest preprint version Research Square lets you share your work early, gain feedback from the community, and start making changes to your manuscript prior to peer review in a journal. As a division of Research Square Company, we’re committed to making research communication faster, fairer, and more useful. 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Also discoverable on Platform About Our Team In Review Editorial Policies Advisory Board Help Center Resources Author Services Accessibility API Access RSS feed Manage Cookie Preferences © Research Square 2026 | ISSN 2693-5015 (online) Privacy Policy Terms of Service Do Not Sell My Personal Information {"props":{"pageProps":{"initialData":{"identity":"rs-7100399","acceptedTermsAndConditions":true,"allowDirectSubmit":false,"archivedVersions":[],"articleType":"Article","associatedPublications":[],"authors":[{"id":505525869,"identity":"62d425a2-b46c-4c73-a06e-f10aac4f1a5b","order_by":0,"name":"Gaofei Zhang","email":"data:image/png;base64,iVBORw0KGgoAAAANSUhEUgAAAZAAAAAyAQMAAABI0h/eAAAABlBMVEX///8AAABVwtN+AAAACXBIWXMAAA7EAAAOxAGVKw4bAAAA5klEQVRIiWNgGAWjYFACxocPGBgkwAgImInRwmxscIBULWYSB0A00Vrk+xezVX/4Y5EnH91j+IGhwjqxgf3sAbxaGGc8ZrtxsE2i2PDOGWMJhjPpiQ08eQn4nSVx/tiNgw0SiRtn5BhIMLYdTmyQ4DHAq4VN4jBbwYE/YC3GPxj/EaGFh7+ZjeEAm0TifIkcMwnGBiK0SEgwM0ucbZNI3CCRVmaRcCzduI0nB78W+f7DjB8q/tQlzp+RvPnGhxpr2X72M/i1MEgkQGhgfDIwgNhs+NUDAf8BqHUNBJWOglEwCkbBSAUAYdlEqmsKl84AAAAASUVORK5CYII=","orcid":"","institution":"Tsinghua university","correspondingAuthor":true,"prefix":"","firstName":"Gaofei","middleName":"","lastName":"Zhang","suffix":""},{"id":505525870,"identity":"2fdc6fe5-2c14-4545-8db7-7cb1a6fc3100","order_by":1,"name":"songtao liu","email":"","orcid":"","institution":"Tsinghua university","correspondingAuthor":false,"prefix":"","firstName":"songtao","middleName":"","lastName":"liu","suffix":""},{"id":505525871,"identity":"343a7269-9646-4ff7-9626-f8e9eaf261bb","order_by":2,"name":"Zhuohang Zhang","email":"","orcid":"","institution":"Tsinghua University","correspondingAuthor":false,"prefix":"","firstName":"Zhuohang","middleName":"","lastName":"Zhang","suffix":""},{"id":505525872,"identity":"8d1af58b-93ba-4424-b1ab-d37f2126a4c8","order_by":3,"name":"Zheng You","email":"","orcid":"https://orcid.org/0000-0002-3941-1371","institution":"Tsinghua University, China","correspondingAuthor":false,"prefix":"","firstName":"Zheng","middleName":"","lastName":"You","suffix":""}],"badges":[],"createdAt":"2025-07-11 10:05:46","currentVersionCode":1,"declarations":"","doi":"10.21203/rs.3.rs-7100399/v1","doiUrl":"https://doi.org/10.21203/rs.3.rs-7100399/v1","draftVersion":[],"editorialEvents":[],"editorialNote":"","failedWorkflow":false,"files":[{"id":91148130,"identity":"a11df4cd-cfa7-4aea-8a78-3f189bfed753","added_by":"auto","created_at":"2025-09-12 06:42:31","extension":"pdf","order_by":1,"title":"","display":"","copyAsset":false,"role":"manuscript-pdf","size":1224299,"visible":true,"origin":"","legend":"","description":"","filename":"Finalmanuscript20250707.pdf","url":"https://assets-eu.researchsquare.com/files/rs-7100399/v1_covered_e2b54fc9-6e6e-4c62-9747-f23930acfe98.pdf"}],"financialInterests":"There is no conflict of interest","formattedTitle":"Optimizing Fatigue Resistance and Lifetime of MEMS Scanning Mirrors with a Novel Coupled Parameter Distribution Structural Framework","fulltext":[],"fulltextSource":"","fullText":"","funders":[],"hasAdminPriorityOnWorkflow":false,"hasManuscriptDocX":false,"hasOptedInToPreprint":true,"hasPassedJournalQc":"","hasAnyPriority":false,"hideJournal":false,"highlight":"","institution":"","isAcceptedByJournal":true,"isAuthorSuppliedPdf":true,"isDeskRejected":"","isHiddenFromSearch":false,"isInQc":false,"isInWorkflow":false,"isPdf":true,"isPdfUpToDate":true,"isWithdrawnOrRetracted":false,"journal":{"display":true,"email":"[email protected]","identity":"microsystems-and-nanoengineering","isNatureJournal":false,"hasQc":false,"allowDirectSubmit":false,"externalIdentity":"micronano","sideBox":"Learn more about [Microsystems \u0026 Nanoengineering](http://www.nature.com/micronano/)","snPcode":"41378","submissionUrl":"https://mts-micronano.nature.com/","title":"Microsystems \u0026 Nanoengineering","twitterHandle":"","acdcEnabled":true,"dfaEnabled":true,"editorialSystem":"ejp","reportingPortfolio":"Nature AJ","inReviewEnabled":true,"inReviewRevisionsEnabled":true},"keywords":"","lastPublishedDoi":"10.21203/rs.3.rs-7100399/v1","lastPublishedDoiUrl":"https://doi.org/10.21203/rs.3.rs-7100399/v1","license":{"name":"CC BY 4.0","url":"https://creativecommons.org/licenses/by/4.0/"},"manuscriptAbstract":"\u003cp\u003eWe present a coupled parameter distribution structural optimization framework that enhances the fatigue resistance and extends the lifetime of micro-electro-mechanical systems (MEMS) scanning mirrors. Simultaneous refinement of the number, distribution, and local width of control points reduces maximum stress by 44.5% and lowers angular creep rates by 36.2%. Under 50\u0026deg;C accelerated aging, lifetime increases from 248 hours to over 688 hours, projecting to ~\u0026thinsp;7,650 hours at room temperature\u0026mdash;meeting automotive light detection and ranging (LiDAR) demands. Key innovations include: (1) parameter distribution optimization to minimize the maximum stress in the torsion beam while preserving optical performance; (2) control point distribution strategies ensuring robust convergence; and (3) cubic spline interpolation for smooth, fabrication-ready geometries. 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