Development of Microfabrication Flow for Surfaced Micromachined Accelerometer

In this study, we present the microfabrication process for a surface micromachined accelerometer, aimed at addressing the demand for advanced rehabilitation tools in healthcare. Our overall solution offers an efficient range of motion (ROM) monitoring system to assess upper limb motion, leveraging off-the-shelf components and IoT technology. We focus on the fabrication of a compact wearable prototype, incorporat- ing inertial sensors and a suitable microcontroller for precise angle measurements. This research holds promise for enhancing patient outcomes in physical therapy by providing accurate monitoring and customized rehabilitation exercises through the proposed sensor-measurements in this report.