Mixed Co-Mn oxide coatings synthetized by DLI-MOCVD for SOC interconnect: parametric study for composition and homogeneity control

Mixed Co-Mn oxide coatings synthetized by DLI-MOCVD for SOC interconnect: parametric study for composition and homogeneity control | Research Square window.SnipcartSettings = { analytics: { enabled: false } }; (function() { var accessVector = localStorage.getItem('access_vector') || ''; window.dataLayer = window.dataLayer || []; if (accessVector) { window.dataLayer.push({ user: { profile: { profileInfo: { snid: accessVector } } } }); } })(); (function(w,d,s,l,i){w[l]=w[l]||[];w[l].push({'gtm.start':new Date().getTime(),event:'gtm.js'});var f=d.getElementsByTagName(s)[0],j=d.createElement(s),dl=l!='dataLayer'?'&l='+l:'';j.async=true;j.src='https://www.googletagmanager.com/gtm.js?id='+i+dl;f.parentNode.insertBefore(j,f);})(window,document,'script','dataLayer','GTM-K279D39R'); Browse Preprints In Review Journals COVID-19 Preprints AJE Video Bytes Research Tools Research Promotion AJE Professional Editing AJE Rubriq About Preprint Platform In Review Editorial Policies Our Team Advisory Board Help Center Sign In Submit a Preprint Cite Share Download PDF Article Mixed Co-Mn oxide coatings synthetized by DLI-MOCVD for SOC interconnect: parametric study for composition and homogeneity control Romain Chanson, Frédéric Miserque, Frédéric Schuster, Fabien Rouillard This is a preprint; it has not been peer reviewed by a journal. https://doi.org/ 10.21203/rs.3.rs-7197240/v1 This work is licensed under a CC BY 4.0 License Status: Published Journal Publication published 14 Nov, 2025 Read the published version in Scientific Reports → Version 1 posted 10 You are reading this latest preprint version Abstract The present study investigates the synthesis of mixed cobalt manganese oxide coating for Solid Oxide Cell (SOC) interconnect application using DLI-MOCVD (Direct Liquid Injection-Metal Oxide Chemical Vapor Deposition). The possibility to control the coating thickness and composition by injecting a mixed solution of Co(acac) 3 and Mn(acac) 3 precursors is demonstrated. Various oxide compositions from Mn x Co 1-x O to Mn x Co 3-x O 4 are synthesized. An acceptable homogeneity in terms of thickness and composition is possible over 25 cm along a tubular reactor which makes this process suitable for industrial application. Physical sciences/Chemistry Physical sciences/Energy science and technology Physical sciences/Engineering Physical sciences/Materials science Coating Oxidation MOCVD Cobalt Manganese spinel Solid Oxide Electrolyzer Cell Green hydrogen Full Text Additional Declarations No competing interests reported. Supplementary Files supplementarymaterial.docx Cite Share Download PDF Status: Published Journal Publication published 14 Nov, 2025 Read the published version in Scientific Reports → Version 1 posted Editorial decision: Revision requested 10 Sep, 2025 Reviews received at journal 01 Sep, 2025 Reviews received at journal 31 Aug, 2025 Reviewers agreed at journal 19 Aug, 2025 Reviewers agreed at journal 16 Aug, 2025 Reviewers invited by journal 14 Aug, 2025 Editor assigned by journal 14 Aug, 2025 Editor invited by journal 06 Aug, 2025 Submission checks completed at journal 01 Aug, 2025 First submitted to journal 01 Aug, 2025 You are reading this latest preprint version Research Square lets you share your work early, gain feedback from the community, and start making changes to your manuscript prior to peer review in a journal. As a division of Research Square Company, we’re committed to making research communication faster, fairer, and more useful. We do this by developing innovative software and high quality services for the global research community. Our growing team is made up of researchers and industry professionals working together to solve the most critical problems facing scientific publishing. Also discoverable on Platform About Our Team In Review Editorial Policies Advisory Board Help Center Resources Author Services Accessibility API Access RSS feed Manage Cookie Preferences © Research Square 2026 | ISSN 2693-5015 (online) Privacy Policy Terms of Service Do Not Sell My Personal Information {"props":{"pageProps":{"initialData":{"identity":"rs-7197240","acceptedTermsAndConditions":true,"allowDirectSubmit":false,"archivedVersions":[],"articleType":"Article","associatedPublications":[],"authors":[{"id":502853277,"identity":"e49780af-d3e3-4837-add9-819a339e8213","order_by":0,"name":"Romain Chanson","email":"data:image/png;base64,iVBORw0KGgoAAAANSUhEUgAAAZAAAAAyAQMAAABI0h/eAAAABlBMVEX///8AAABVwtN+AAAACXBIWXMAAA7EAAAOxAGVKw4bAAAA3klEQVRIiWNgGAWjYLCCBCA2gDBtwOQHUrSkgQjGGUTZBNVymLAW8/buxA8PdzDIm7OfPfzh447z8vzsBxibK/BokTlzdrNE4hkGw509eWmSM8/cNpzZk8DYeAaPFgmJ3A0SiW0MCQYHcsyYedtuAxkJ7A8b8GvZ/AOs5fwb48+8becS7M8/YGwkoGUbxJYbOQbSvG0HEgwkEgho4Tm7zSKxTcJww403ZpIz25INZ9x42IhfC3vv5ps/22zkDc7nGH/42GYnz9+ffBCvFphOZA4jERpGwSgYBaNgFOAFAH+9TrOfeV8WAAAAAElFTkSuQmCC","orcid":"","institution":"Université Paris-Saclay, CEA","correspondingAuthor":true,"prefix":"","firstName":"Romain","middleName":"","lastName":"Chanson","suffix":""},{"id":502853278,"identity":"f02e1195-546c-4aff-9047-afddbb57c301","order_by":1,"name":"Frédéric Miserque","email":"","orcid":"","institution":"Université Paris-Saclay, CEA","correspondingAuthor":false,"prefix":"","firstName":"Frédéric","middleName":"","lastName":"Miserque","suffix":""},{"id":502853279,"identity":"dbf03886-a0cc-4f5e-853f-6bc95183e30a","order_by":2,"name":"Frédéric Schuster","email":"","orcid":"","institution":"Université Paris-Saclay, CEA, Programme transversaux Mat \u0026 Proc","correspondingAuthor":false,"prefix":"","firstName":"Frédéric","middleName":"","lastName":"Schuster","suffix":""},{"id":502853280,"identity":"7f6bed16-b997-4f66-ba54-b0f1a65855f1","order_by":3,"name":"Fabien Rouillard","email":"","orcid":"","institution":"Université Paris-Saclay, CEA","correspondingAuthor":false,"prefix":"","firstName":"Fabien","middleName":"","lastName":"Rouillard","suffix":""}],"badges":[],"createdAt":"2025-07-23 14:08:22","currentVersionCode":1,"declarations":"","doi":"10.21203/rs.3.rs-7197240/v1","doiUrl":"https://doi.org/10.21203/rs.3.rs-7197240/v1","draftVersion":[],"editorialEvents":[{"content":"https://doi.org/10.1038/s41598-025-23783-5","type":"published","date":"2025-11-14T15:56:58+00:00"}],"editorialNote":"","failedWorkflow":false,"files":[{"id":96104919,"identity":"6feb4336-42f1-42be-b5a5-01eb749bd125","added_by":"auto","created_at":"2025-11-17 16:01:17","extension":"pdf","order_by":1,"title":"","display":"","copyAsset":false,"role":"manuscript-pdf","size":1048783,"visible":true,"origin":"","legend":"","description":"","filename":"Manuscript.pdf","url":"https://assets-eu.researchsquare.com/files/rs-7197240/v1_covered_5a7246ec-662d-443a-940f-dd4869bd2cd9.pdf"},{"id":89692675,"identity":"59ad6f38-98a4-4e62-8e29-0f465b0230de","added_by":"auto","created_at":"2025-08-22 17:08:41","extension":"docx","order_by":1,"title":"","display":"","copyAsset":false,"role":"supplement","size":1264629,"visible":true,"origin":"","legend":"","description":"","filename":"supplementarymaterial.docx","url":"https://assets-eu.researchsquare.com/files/rs-7197240/v1/0a14cab657390c36615b7d6b.docx"}],"financialInterests":"No competing interests reported.","formattedTitle":"Mixed Co-Mn oxide coatings synthetized by DLI-MOCVD for SOC interconnect: parametric study for composition and homogeneity control","fulltext":[],"fulltextSource":"","fullText":"","funders":[],"hasAdminPriorityOnWorkflow":false,"hasManuscriptDocX":false,"hasOptedInToPreprint":true,"hasPassedJournalQc":"","hasAnyPriority":false,"hideJournal":false,"highlight":"","institution":"","isAcceptedByJournal":true,"isAuthorSuppliedPdf":true,"isDeskRejected":"","isHiddenFromSearch":false,"isInQc":false,"isInWorkflow":false,"isPdf":true,"isPdfUpToDate":true,"isWithdrawnOrRetracted":false,"journal":{"display":true,"email":"[email protected]","identity":"scientific-reports","isNatureJournal":false,"hasQc":true,"allowDirectSubmit":false,"externalIdentity":"scirep","sideBox":"Learn more about [Scientific Reports](http://www.nature.com/srep/)","snPcode":"","submissionUrl":"","title":"Scientific Reports","twitterHandle":"","acdcEnabled":true,"dfaEnabled":true,"editorialSystem":"stoa","reportingPortfolio":"Scientific Reports","inReviewEnabled":true,"inReviewRevisionsEnabled":true},"keywords":"Coating, Oxidation, MOCVD, Cobalt, Manganese, spinel, Solid Oxide Electrolyzer Cell, Green hydrogen","lastPublishedDoi":"10.21203/rs.3.rs-7197240/v1","lastPublishedDoiUrl":"https://doi.org/10.21203/rs.3.rs-7197240/v1","license":{"name":"CC BY 4.0","url":"https://creativecommons.org/licenses/by/4.0/"},"manuscriptAbstract":"\u003cp\u003eThe present study investigates the synthesis of mixed cobalt manganese oxide coating for Solid Oxide Cell (SOC) interconnect application using DLI-MOCVD (Direct Liquid Injection-Metal Oxide Chemical Vapor Deposition). The possibility to control the coating thickness and composition by injecting a mixed solution of Co(acac)\u003csub\u003e3\u003c/sub\u003e and Mn(acac)\u003csub\u003e3\u003c/sub\u003e precursors is demonstrated. Various oxide compositions from Mn\u003csub\u003ex\u003c/sub\u003eCo\u003csub\u003e1-x\u003c/sub\u003eO to Mn\u003csub\u003ex\u003c/sub\u003eCo\u003csub\u003e3-x\u003c/sub\u003eO\u003csub\u003e4\u003c/sub\u003e are synthesized. An acceptable homogeneity in terms of thickness and composition is possible over 25 cm along a tubular reactor which makes this process suitable for industrial application.\u003c/p\u003e","manuscriptTitle":"Mixed Co-Mn oxide coatings synthetized by DLI-MOCVD for SOC interconnect: parametric study for composition and homogeneity control","msid":"","msnumber":"","nonDraftVersions":[{"code":1,"date":"2025-08-22 17:08:33","doi":"10.21203/rs.3.rs-7197240/v1","editorialEvents":[{"type":"communityComments","content":0},{"type":"decision","content":"Revision requested","date":"2025-09-10T08:28:58+00:00","index":"","fulltext":""},{"type":"editorInvitedReview","content":"","date":"2025-09-01T15:49:11+00:00","index":"hide","fulltext":""},{"type":"editorInvitedReview","content":"","date":"2025-08-31T22:16:00+00:00","index":"hide","fulltext":""},{"type":"reviewerAgreed","content":"162419362887417297179814983465424932922","date":"2025-08-19T19:40:57+00:00","index":"hide","fulltext":""},{"type":"reviewerAgreed","content":"193697122677900864270557228247441015227","date":"2025-08-16T14:02:57+00:00","index":"hide","fulltext":""},{"type":"reviewersInvited","content":"","date":"2025-08-14T13:53:20+00:00","index":"","fulltext":""},{"type":"editorAssigned","content":"","date":"2025-08-14T13:45:19+00:00","index":"","fulltext":""},{"type":"editorInvited","content":"","date":"2025-08-06T09:51:04+00:00","index":"","fulltext":""},{"type":"checksComplete","content":"","date":"2025-08-01T10:08:35+00:00","index":"","fulltext":""},{"type":"submitted","content":"Scientific Reports","date":"2025-08-01T10:05:28+00:00","index":"","fulltext":""}],"status":"published","journal":{"display":true,"email":"[email protected]","identity":"scientific-reports","isNatureJournal":false,"hasQc":true,"allowDirectSubmit":false,"externalIdentity":"scirep","sideBox":"Learn more about [Scientific Reports](http://www.nature.com/srep/)","snPcode":"","submissionUrl":"","title":"Scientific Reports","twitterHandle":"","acdcEnabled":true,"dfaEnabled":true,"editorialSystem":"stoa","reportingPortfolio":"Scientific Reports","inReviewEnabled":true,"inReviewRevisionsEnabled":true}}],"origin":"","ownerIdentity":"9f33f2a6-749b-42b4-853d-0d43b4a23eac","owner":[],"postedDate":"August 22nd, 2025","published":true,"recentEditorialEvents":[],"rejectedJournal":[],"revision":"","amendment":"","status":"published-in-journal","subjectAreas":[{"id":53414753,"name":"Physical sciences/Chemistry"},{"id":53414754,"name":"Physical sciences/Energy science and technology"},{"id":53414755,"name":"Physical sciences/Engineering"},{"id":53414756,"name":"Physical sciences/Materials science"}],"tags":[],"updatedAt":"2025-11-17T15:59:08+00:00","versionOfRecord":{"articleIdentity":"rs-7197240","link":"https://doi.org/10.1038/s41598-025-23783-5","journal":{"identity":"scientific-reports","isVorOnly":false,"title":"Scientific Reports"},"publishedOn":"2025-11-14 15:56:58","publishedOnDateReadable":"November 14th, 2025"},"versionCreatedAt":"2025-08-22 17:08:33","video":"","vorDoi":"10.1038/s41598-025-23783-5","vorDoiUrl":"https://doi.org/10.1038/s41598-025-23783-5","workflowStages":[]},"version":"v1","identity":"rs-7197240","journalConfig":"researchsquare"},"__N_SSP":true},"page":"/article/[identity]/[[...version]]","query":{"redirect":"/article/rs-7197240","identity":"rs-7197240","version":["v1"]},"buildId":"8U1c8b4HqxoKbykW_rLl7","isFallback":false,"isExperimentalCompile":false,"dynamicIds":[84888],"gssp":true,"scriptLoader":[]}