Real-time 3D imaging with 11×11 rigid PMUT array on conventional silicon wafer

Real-time 3D imaging with 11×11 rigid PMUT array on conventional silicon wafer | Research Square window.SnipcartSettings = { analytics: { enabled: false } }; (function() { var accessVector = localStorage.getItem('access_vector') || ''; window.dataLayer = window.dataLayer || []; if (accessVector) { window.dataLayer.push({ user: { profile: { profileInfo: { snid: accessVector } } } }); } })(); (function(w,d,s,l,i){w[l]=w[l]||[];w[l].push({'gtm.start':new Date().getTime(),event:'gtm.js'});var f=d.getElementsByTagName(s)[0],j=d.createElement(s),dl=l!='dataLayer'?'&l='+l:'';j.async=true;j.src='https://www.googletagmanager.com/gtm.js?id='+i+dl;f.parentNode.insertBefore(j,f);})(window,document,'script','dataLayer','GTM-K279D39R'); Browse Preprints In Review Journals COVID-19 Preprints AJE Video Bytes Research Tools Research Promotion AJE Professional Editing AJE Rubriq About Preprint Platform In Review Editorial Policies Our Team Advisory Board Help Center Sign In Submit a Preprint Cite Share Download PDF Article Real-time 3D imaging with 11×11 rigid PMUT array on conventional silicon wafer Chen Wang, Sanjog Vilas Joshi, Warre Bruyninckx, Rui Esteves, and 7 more This is a preprint; it has not been peer reviewed by a journal. https://doi.org/ 10.21203/rs.3.rs-8649963/v1 This work is licensed under a CC BY 4.0 License Status: Posted Version 1 posted You are reading this latest preprint version Abstract Piezoelectric micromachined ultrasonic transducers (PMUTs) can push medical imaging forward by enabling smaller pitch sizes and reduced sidelobes for sharper resolution. However, earlier research on ultrasound imaging with PMUTs primarily used linear phased arrays, which are limited to 2D imaging, or row-column (RC) arrays, which present challenges for 3D imaging due to circuit complexity. Existing PMUT arrays for 3D imaging suffer from a complex fabrication process, raising yield and reliability concerns. Here, we demonstrate real-time 3D ultrasound imaging using an 11×11 PMUT array fabricated on a low-cost conventional silicon wafer with a polyimide membrane, a first in the literature. Operating at 2 MHz in tissue-mimicking media, an array element achieves 50 Pa/V output pressure at 2.5 cm and 5 µV/V round-trip sensitivity with 5 V DC bias. Up to 4 cm deep imaging results are recorded with a voltage as low as 10 VAC+10 VDC. Unlike prior SOI-based PMUTs, this approach drastically reduces fabrication expenses while maintaining performance for low-frequency imaging. The novel interconnect scheme enables simplified fabrication and packaging processes, opening a pathway for on-probe electronics. This technology offers a cost-effective solution for low-frequency real-time 3D ultrasound. Physical sciences/Engineering/Electrical and electronic engineering Physical sciences/Engineering Full Text Additional Declarations There is no conflict of interest Cite Share Download PDF Status: Posted Version 1 posted You are reading this latest preprint version Research Square lets you share your work early, gain feedback from the community, and start making changes to your manuscript prior to peer review in a journal. As a division of Research Square Company, we’re committed to making research communication faster, fairer, and more useful. We do this by developing innovative software and high quality services for the global research community. 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Also discoverable on Platform About Our Team In Review Editorial Policies Advisory Board Help Center Resources Author Services Accessibility API Access RSS feed Manage Cookie Preferences © Research Square 2026 | ISSN 2693-5015 (online) Privacy Policy Terms of Service Do Not Sell My Personal Information {"props":{"pageProps":{"initialData":{"identity":"rs-8649963","acceptedTermsAndConditions":true,"allowDirectSubmit":true,"archivedVersions":[],"articleType":"Article","associatedPublications":[],"authors":[{"id":586178976,"identity":"1737eb8b-3825-4366-a6e6-0c32e8e1cefe","order_by":0,"name":"Chen 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