Chemistry in cryogenic etching: A tutorial

Chemistry in cryogenic etching: A tutorial | Research Square window.SnipcartSettings = { analytics: { enabled: false } }; (function() { var accessVector = localStorage.getItem('access_vector') || ''; window.dataLayer = window.dataLayer || []; if (accessVector) { window.dataLayer.push({ user: { profile: { profileInfo: { snid: accessVector } } } }); } })(); (function(w,d,s,l,i){w[l]=w[l]||[];w[l].push({'gtm.start':new Date().getTime(),event:'gtm.js'});var f=d.getElementsByTagName(s)[0],j=d.createElement(s),dl=l!='dataLayer'?'&l='+l:'';j.async=true;j.src='https://www.googletagmanager.com/gtm.js?id='+i+dl;f.parentNode.insertBefore(j,f);})(window,document,'script','dataLayer','GTM-K279D39R'); Browse Preprints In Review Journals COVID-19 Preprints AJE Video Bytes Research Tools Research Promotion AJE Professional Editing AJE Rubriq About Preprint Platform In Review Editorial Policies Our Team Advisory Board Help Center Sign In Submit a Preprint Cite Share Download PDF Research Article Chemistry in cryogenic etching: A tutorial Remi Dussart, Gaelle Antoun, Thomas Tillocher, Loic Becerra, Philippe Lefaucheux This is a preprint; it has not been peer reviewed by a journal. https://doi.org/ 10.21203/rs.3.rs-7623847/v1 This work is licensed under a CC BY 4.0 License Status: Under Review Version 1 posted 9 You are reading this latest preprint version Abstract Cooling the substrate to stimulate chemical reactions can seem rather counterintuitive. However, this is one of the advantages often observed in plasma cryogenic etching. This article discusses the interactions between plasma and the surface at low temperature. It begins by reviewing the fundamental theories of adsorption as applied to etching. The theoretical concepts are then illustrated in the second part of the article by two different cryogenic processes developed and studied as part of research programs: the reinforcement of the SiO x F y passivation layer in the STiGer cryogenic deep silicon etching process and cryogenic Atomic Layer Etching (cryo-ALE) of SiO 2 from physisorbed C 4 F 8 molecules. Full Text Additional Declarations No competing interests reported. Cite Share Download PDF Status: Under Review Version 1 posted Editorial decision: Revision requested 02 Nov, 2025 Reviews received at journal 02 Nov, 2025 Reviews received at journal 19 Oct, 2025 Reviewers agreed at journal 11 Oct, 2025 Reviewers agreed at journal 10 Oct, 2025 Reviewers invited by journal 07 Oct, 2025 Editor assigned by journal 19 Sep, 2025 Submission checks completed at journal 19 Sep, 2025 First submitted to journal 15 Sep, 2025 You are reading this latest preprint version Research Square lets you share your work early, gain feedback from the community, and start making changes to your manuscript prior to peer review in a journal. As a division of Research Square Company, we’re committed to making research communication faster, fairer, and more useful. We do this by developing innovative software and high quality services for the global research community. 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Also discoverable on Platform About Our Team In Review Editorial Policies Advisory Board Help Center Resources Author Services Accessibility API Access RSS feed Manage Cookie Preferences © Research Square 2026 | ISSN 2693-5015 (online) Privacy Policy Terms of Service Do Not Sell My Personal Information {"props":{"pageProps":{"initialData":{"identity":"rs-7623847","acceptedTermsAndConditions":true,"allowDirectSubmit":false,"archivedVersions":[],"articleType":"Research Article","associatedPublications":[],"authors":[{"id":531815075,"identity":"99709528-4675-49f9-8082-12aaac09e2ca","order_by":0,"name":"Remi Dussart","email":"data:image/png;base64,iVBORw0KGgoAAAANSUhEUgAAAZAAAAAyAQMAAABI0h/eAAAABlBMVEX///8AAABVwtN+AAAACXBIWXMAAA7EAAAOxAGVKw4bAAABFUlEQVRIie3QsUrEMBjA8S8E4hK5tcJBX6HiICJ6r5JQuJvORTiEE4wU2kHBtU59hYAvEAicS9v5BocDoS4KGZ3ENNxtqbc65D+Ej8CPfAQgFPqnKSDbyQBQN2zciTb7CLovd4S5EyfD72xJRncXf5HT4oErWOhJXDQf7xf52zhReGXYzeVVLDAxHjKuG6mg1VzWs+Nsnnc0USQtWZ1eW4tLD4miuVQo1yyBKbJE06Pq8wR4jrmEkfYtFsVfjkzipw5lZz0R1JKfO14JjL0kOnQEibV9xQ50BD0Rmgs1QKhdjLUzLtcden5se0JSYKtXLvUAOWhejFmc28WmYL7t1xHAGsztkldF5iUu5r8eBqFQKBTa0y/FyGGreUr0bAAAAABJRU5ErkJggg==","orcid":"","institution":"Groupe de Recherches sur l'Énergétique des Milieux Ionisés","correspondingAuthor":true,"prefix":"","firstName":"Remi","middleName":"","lastName":"Dussart","suffix":""},{"id":531815076,"identity":"6fafc036-2199-4422-aa0f-4c8af1f9ed48","order_by":1,"name":"Gaelle Antoun","email":"","orcid":"","institution":"Groupe de Recherches sur l'Énergétique des Milieux Ionisés","correspondingAuthor":false,"prefix":"","firstName":"Gaelle","middleName":"","lastName":"Antoun","suffix":""},{"id":531815078,"identity":"8d929369-226c-4ab1-91ac-fa1852dfd4ba","order_by":2,"name":"Thomas Tillocher","email":"","orcid":"","institution":"Groupe de Recherches sur l'Énergétique des Milieux Ionisés","correspondingAuthor":false,"prefix":"","firstName":"Thomas","middleName":"","lastName":"Tillocher","suffix":""},{"id":531815080,"identity":"80fdd733-ff13-4623-a57f-7b1774176823","order_by":3,"name":"Loic Becerra","email":"","orcid":"","institution":"Groupe de Recherches sur l'Énergétique des Milieux Ionisés","correspondingAuthor":false,"prefix":"","firstName":"Loic","middleName":"","lastName":"Becerra","suffix":""},{"id":531815082,"identity":"c231c55c-bf03-4679-b4a1-c34155aabaca","order_by":4,"name":"Philippe Lefaucheux","email":"","orcid":"","institution":"Groupe de Recherches sur l'Énergétique des Milieux Ionisés","correspondingAuthor":false,"prefix":"","firstName":"Philippe","middleName":"","lastName":"Lefaucheux","suffix":""}],"badges":[],"createdAt":"2025-09-15 20:23:04","currentVersionCode":1,"declarations":"","doi":"10.21203/rs.3.rs-7623847/v1","doiUrl":"https://doi.org/10.21203/rs.3.rs-7623847/v1","draftVersion":[],"editorialEvents":[],"editorialNote":"","failedWorkflow":false,"files":[{"id":93906915,"identity":"2083b024-6f6a-45c6-845f-c58675aa225e","added_by":"auto","created_at":"2025-10-20 07:19:24","extension":"docx","order_by":0,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":1378419,"visible":true,"origin":"","legend":"","description":"","filename":"DUSSARTAtutorialonthechemistryofcryogenicetching20250917.docx","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/552ecf39d360ad0dff16726d.docx"},{"id":93906912,"identity":"c408cb34-9235-497f-9b07-9baacc9343b6","added_by":"auto","created_at":"2025-10-20 07:19:23","extension":"json","order_by":1,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":5519,"visible":true,"origin":"","legend":"","description":"","filename":"5fad219ec0ce464195e94e760dbce5e4.json","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/8ea2856140c8199ad5469cf3.json"},{"id":93906916,"identity":"805eb772-1eae-4739-943a-c569536e1e59","added_by":"auto","created_at":"2025-10-20 07:19:24","extension":"xml","order_by":2,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":100842,"visible":true,"origin":"","legend":"","description":"","filename":"5fad219ec0ce464195e94e760dbce5e41enriched.xml","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/63385647d9b4885ccea84c61.xml"},{"id":93909458,"identity":"1425db3a-4619-452d-8572-ec3d53c98c35","added_by":"auto","created_at":"2025-10-20 07:43:24","extension":"eps","order_by":3,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":130119,"visible":true,"origin":"","legend":"","description":"","filename":"drawingimage1.eps","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/e59fc5ad65f1e42b64c9d8b4.eps"},{"id":93908109,"identity":"550d3eae-d77b-4bec-9eb1-7540c1b60e49","added_by":"auto","created_at":"2025-10-20 07:27:24","extension":"eps","order_by":4,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":131188,"visible":true,"origin":"","legend":"","description":"","filename":"drawingimage2.eps","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/7bd8133729cfc59fce1d0070.eps"},{"id":93908108,"identity":"1b9b7e11-1ade-4a7a-9ac6-6dead6385a44","added_by":"auto","created_at":"2025-10-20 07:27:24","extension":"eps","order_by":5,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":47536,"visible":true,"origin":"","legend":"","description":"","filename":"drawingimage3.eps","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/f619babe521d477f2066cba6.eps"},{"id":93908519,"identity":"1ae2da34-a281-4eaa-8bd3-2b49c4318eae","added_by":"auto","created_at":"2025-10-20 07:35:24","extension":"eps","order_by":6,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":49770,"visible":true,"origin":"","legend":"","description":"","filename":"drawingimage4.eps","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/fab115c6451cfdc09999552b.eps"},{"id":93906920,"identity":"420b69fe-f958-4c47-a764-a2ada569aacb","added_by":"auto","created_at":"2025-10-20 07:19:24","extension":"jpeg","order_by":7,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":533088,"visible":true,"origin":"","legend":"","description":"","filename":"floatimage1.jpeg","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/39c42e275011000d7ba93a7b.jpeg"},{"id":93906913,"identity":"e163840d-2e90-4e77-9725-8f7fe4988d69","added_by":"auto","created_at":"2025-10-20 07:19:24","extension":"png","order_by":8,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":19181,"visible":true,"origin":"","legend":"","description":"","filename":"floatimage10.png","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/985f066a6f5394a264543abd.png"},{"id":93908521,"identity":"8badf751-9cc6-4353-b463-6e63e3b98ac4","added_by":"auto","created_at":"2025-10-20 07:35:24","extension":"png","order_by":9,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":28631,"visible":true,"origin":"","legend":"","description":"","filename":"floatimage11.png","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/8da3120c8a917acdcb4544e3.png"},{"id":93908112,"identity":"00128f2b-846a-40e8-aec9-135c896b7508","added_by":"auto","created_at":"2025-10-20 07:27:24","extension":"jpeg","order_by":10,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":173393,"visible":true,"origin":"","legend":"","description":"","filename":"floatimage12.jpeg","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/93746a332d028bc26089576c.jpeg"},{"id":93906923,"identity":"eff8d719-9ea0-4984-a803-44e8eb21aafa","added_by":"auto","created_at":"2025-10-20 07:19:24","extension":"png","order_by":11,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":102161,"visible":true,"origin":"","legend":"","description":"","filename":"floatimage13.png","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/73cd0327aac8aed7c86e6df1.png"},{"id":93906922,"identity":"ff557ea7-de4e-4c0b-a950-52c6b8c537ab","added_by":"auto","created_at":"2025-10-20 07:19:24","extension":"jpeg","order_by":12,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":42301,"visible":true,"origin":"","legend":"","description":"","filename":"floatimage14.jpeg","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/01da7abbaffefc703c32065d.jpeg"},{"id":93906926,"identity":"8261aa02-00fa-44b8-98e0-f941461e2179","added_by":"auto","created_at":"2025-10-20 07:19:24","extension":"png","order_by":13,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":167527,"visible":true,"origin":"","legend":"","description":"","filename":"floatimage15.png","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/6793940b15cc9347dee3cf20.png"},{"id":93908113,"identity":"b1675ac2-12e2-45f6-a61a-f9b19452c2b6","added_by":"auto","created_at":"2025-10-20 07:27:24","extension":"jpeg","order_by":14,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":30041,"visible":true,"origin":"","legend":"","description":"","filename":"floatimage16.jpeg","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/3d7112b7080633286fb868db.jpeg"},{"id":93906953,"identity":"2d986569-7374-4c96-9727-cd05a15173d6","added_by":"auto","created_at":"2025-10-20 07:19:25","extension":"jpeg","order_by":15,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":413239,"visible":true,"origin":"","legend":"","description":"","filename":"floatimage17.jpeg","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/a7a4eccf45c563bda829ae85.jpeg"},{"id":93908116,"identity":"aa092f13-4fb6-4c73-8004-2794b722d57b","added_by":"auto","created_at":"2025-10-20 07:27:24","extension":"jpeg","order_by":16,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":351212,"visible":true,"origin":"","legend":"","description":"","filename":"floatimage18.jpeg","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/e5a400b69d0b1246808ab2c8.jpeg"},{"id":93906944,"identity":"78be15f6-9126-4eda-8199-243db375a601","added_by":"auto","created_at":"2025-10-20 07:19:25","extension":"emf","order_by":17,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":853464,"visible":true,"origin":"","legend":"","description":"","filename":"floatimage19.emf","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/5e34c7e0b7e70e7c4606ee61.emf"},{"id":93908125,"identity":"735c51e5-3868-451d-943d-40c777bb7442","added_by":"auto","created_at":"2025-10-20 07:27:25","extension":"jpeg","order_by":18,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":25113,"visible":true,"origin":"","legend":"","description":"","filename":"floatimage2.jpeg","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/1268365f86e8306857f47534.jpeg"},{"id":93906929,"identity":"f52f9096-3f1c-412d-94cb-f2ec04765bc4","added_by":"auto","created_at":"2025-10-20 07:19:24","extension":"emf","order_by":19,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":28292,"visible":true,"origin":"","legend":"","description":"","filename":"floatimage3.emf","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/7d2fd7a10d91ddc1fc4113b2.emf"},{"id":93908119,"identity":"87f29e65-b7c6-4344-af05-db667269650c","added_by":"auto","created_at":"2025-10-20 07:27:24","extension":"png","order_by":20,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":15096,"visible":true,"origin":"","legend":"","description":"","filename":"floatimage4.png","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/9c798577cbb930de2ee6ad1a.png"},{"id":93908114,"identity":"25f1d6de-97ae-41b8-90ab-717ae07a3feb","added_by":"auto","created_at":"2025-10-20 07:27:24","extension":"jpeg","order_by":21,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":24671,"visible":true,"origin":"","legend":"","description":"","filename":"floatimage5.jpeg","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/5a51fbd53ef4eefac62a3b11.jpeg"},{"id":93908522,"identity":"dd9af8ba-6c77-4105-8f85-f3d03612a030","added_by":"auto","created_at":"2025-10-20 07:35:24","extension":"jpeg","order_by":22,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":71919,"visible":true,"origin":"","legend":"","description":"","filename":"floatimage6.jpeg","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/bb05318de10449086fd25624.jpeg"},{"id":93908117,"identity":"900b1f4b-a547-40f4-bf08-248bba6b447e","added_by":"auto","created_at":"2025-10-20 07:27:24","extension":"jpeg","order_by":23,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":1074,"visible":true,"origin":"","legend":"","description":"","filename":"floatimage7.jpeg","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/aea3cb1191c4df28f7ba52dd.jpeg"},{"id":93906933,"identity":"820e289f-f5d6-4dab-931c-2359b29fcae8","added_by":"auto","created_at":"2025-10-20 07:19:24","extension":"jpeg","order_by":24,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":30647,"visible":true,"origin":"","legend":"","description":"","filename":"floatimage8.jpeg","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/2f3709f038fe231d67f8e377.jpeg"},{"id":93906924,"identity":"17108d44-c27e-4bb0-8d8c-f97bfb20ec25","added_by":"auto","created_at":"2025-10-20 07:19:24","extension":"jpeg","order_by":25,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":14399,"visible":true,"origin":"","legend":"","description":"","filename":"floatimage9.jpeg","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/c2c1bf747218104449d407d7.jpeg"},{"id":93906936,"identity":"02093e54-8c94-4e52-ba6b-625fa9e556a8","added_by":"auto","created_at":"2025-10-20 07:19:24","extension":"png","order_by":26,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":133808,"visible":true,"origin":"","legend":"","description":"","filename":"Onlinefloatimage1.png","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/3aad6f84b9ad595651d55379.png"},{"id":93906952,"identity":"a9a7beea-6208-46b1-ba30-03bf4e52f2d9","added_by":"auto","created_at":"2025-10-20 07:19:25","extension":"png","order_by":27,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":8233,"visible":true,"origin":"","legend":"","description":"","filename":"Onlinefloatimage10.png","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/bed3a149f0e752168251b66e.png"},{"id":93906949,"identity":"5eb66ea0-6f9c-46c2-8a7c-da5afdc57b7e","added_by":"auto","created_at":"2025-10-20 07:19:25","extension":"png","order_by":28,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":12421,"visible":true,"origin":"","legend":"","description":"","filename":"Onlinefloatimage11.png","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/5fb8440d5f4a8c5d4a8bd244.png"},{"id":93906932,"identity":"a5956c0e-f777-4d50-bd43-4a9f42f61366","added_by":"auto","created_at":"2025-10-20 07:19:24","extension":"png","order_by":29,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":41966,"visible":true,"origin":"","legend":"","description":"","filename":"Onlinefloatimage12.png","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/8e42978411abf4cfe98e58cf.png"},{"id":93908120,"identity":"e7ec6663-fa79-4adc-8183-d81907dd3f0b","added_by":"auto","created_at":"2025-10-20 07:27:24","extension":"png","order_by":30,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":21659,"visible":true,"origin":"","legend":"","description":"","filename":"Onlinefloatimage13.png","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/882d04d38364967b091d7a5b.png"},{"id":93906934,"identity":"22baf758-b721-488b-8aa5-20e21b9f8194","added_by":"auto","created_at":"2025-10-20 07:19:24","extension":"png","order_by":31,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":24258,"visible":true,"origin":"","legend":"","description":"","filename":"Onlinefloatimage14.png","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/2f6f7cb3f550bf9c98a2fae6.png"},{"id":93908124,"identity":"32913a81-0baa-4c57-8da5-f9c6e34be8ef","added_by":"auto","created_at":"2025-10-20 07:27:25","extension":"png","order_by":32,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":17071,"visible":true,"origin":"","legend":"","description":"","filename":"Onlinefloatimage15.png","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/8921e187afe7a40cdda4dd82.png"},{"id":93906930,"identity":"1f99f516-d238-403f-90f3-04bcedbdfcf2","added_by":"auto","created_at":"2025-10-20 07:19:24","extension":"png","order_by":33,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":14234,"visible":true,"origin":"","legend":"","description":"","filename":"Onlinefloatimage16.png","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/8c6937c1dcb28a26f243c5e7.png"},{"id":93906957,"identity":"175249e7-f8ff-48cd-b171-da6b4e197eca","added_by":"auto","created_at":"2025-10-20 07:19:25","extension":"png","order_by":34,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":72908,"visible":true,"origin":"","legend":"","description":"","filename":"Onlinefloatimage17.png","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/e8002a2bebe1b2870dd2df01.png"},{"id":93906939,"identity":"33b05066-049a-4ede-aaaa-afbf45b32d9b","added_by":"auto","created_at":"2025-10-20 07:19:24","extension":"png","order_by":35,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":54025,"visible":true,"origin":"","legend":"","description":"","filename":"Onlinefloatimage18.png","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/7ce979d2c5a0ae64a25a3c69.png"},{"id":93906941,"identity":"61078905-d07f-443e-ab28-4e9458e53066","added_by":"auto","created_at":"2025-10-20 07:19:24","extension":"png","order_by":36,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":396404,"visible":true,"origin":"","legend":"","description":"","filename":"Onlinefloatimage19.png","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/3a1c472313f97b7c02e6a892.png"},{"id":93908524,"identity":"9090d93f-9c4e-4d1c-b652-b35f7357d671","added_by":"auto","created_at":"2025-10-20 07:35:25","extension":"png","order_by":37,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":6116,"visible":true,"origin":"","legend":"","description":"","filename":"Onlinefloatimage2.png","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/899c35f3f8a7cb26dd44e550.png"},{"id":93906955,"identity":"f35fad10-b6ff-48df-a7f5-be773bbc1d21","added_by":"auto","created_at":"2025-10-20 07:19:25","extension":"png","order_by":38,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":35655,"visible":true,"origin":"","legend":"","description":"","filename":"Onlinefloatimage3.png","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/79a34da7a8feae7d6e2efd29.png"},{"id":93906954,"identity":"34d76bee-569f-4353-9e00-8e9cbba59b53","added_by":"auto","created_at":"2025-10-20 07:19:25","extension":"png","order_by":39,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":6376,"visible":true,"origin":"","legend":"","description":"","filename":"Onlinefloatimage4.png","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/18b83fe19427e3c3b5d6753c.png"},{"id":93908525,"identity":"4e3fe981-fed7-4328-99f4-c142a78a13ad","added_by":"auto","created_at":"2025-10-20 07:35:25","extension":"png","order_by":40,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":5791,"visible":true,"origin":"","legend":"","description":"","filename":"Onlinefloatimage5.png","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/8f0a52a76130a3eeba53c903.png"},{"id":93906946,"identity":"9ced003e-850e-4818-b4cb-9dcff90c7fea","added_by":"auto","created_at":"2025-10-20 07:19:25","extension":"png","order_by":41,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":16355,"visible":true,"origin":"","legend":"","description":"","filename":"Onlinefloatimage6.png","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/07b1c8069f51e7283602ca40.png"},{"id":93906945,"identity":"b5ad43a8-3d29-4d12-b3b3-4ac9c40000aa","added_by":"auto","created_at":"2025-10-20 07:19:25","extension":"png","order_by":42,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":935,"visible":true,"origin":"","legend":"","description":"","filename":"Onlinefloatimage7.png","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/1163bf2c44b513cfb1c4ccf3.png"},{"id":93908123,"identity":"ddf04f4d-f01a-4975-835c-a255799c9c3c","added_by":"auto","created_at":"2025-10-20 07:27:25","extension":"png","order_by":43,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":6941,"visible":true,"origin":"","legend":"","description":"","filename":"Onlinefloatimage8.png","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/b873a19f77b48b44b1064a8b.png"},{"id":93908121,"identity":"51f9a16d-90fb-41a7-9dec-e80646116c70","added_by":"auto","created_at":"2025-10-20 07:27:24","extension":"png","order_by":44,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":3951,"visible":true,"origin":"","legend":"","description":"","filename":"Onlinefloatimage9.png","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/21d7a87b3f50ad21730c1dcf.png"},{"id":93908128,"identity":"16d0569e-ab39-430e-8d7e-9f6ada7e32c1","added_by":"auto","created_at":"2025-10-20 07:27:25","extension":"xml","order_by":45,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":100796,"visible":true,"origin":"","legend":"","description":"","filename":"5fad219ec0ce464195e94e760dbce5e41structuring.xml","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/442011fcdfb5888d06c742f1.xml"},{"id":93908127,"identity":"6879e78b-dbdc-4274-845f-49b764160d7a","added_by":"auto","created_at":"2025-10-20 07:27:25","extension":"html","order_by":46,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":111871,"visible":true,"origin":"","legend":"","description":"","filename":"earlyproof.html","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1/0e672f9bfb6d279721513cab.html"},{"id":93909737,"identity":"42282730-355d-4ff1-8751-9d7f73aff424","added_by":"auto","created_at":"2025-10-20 07:51:24","extension":"pdf","order_by":1,"title":"","display":"","copyAsset":false,"role":"manuscript-pdf","size":1109973,"visible":true,"origin":"","legend":"","description":"","filename":"DUSSARTAtutorialonthechemistryofcryogenicetching20250917.pdf","url":"https://assets-eu.researchsquare.com/files/rs-7623847/v1_covered_76b8ac13-03d8-4b6e-8c45-e9dbc894a494.pdf"}],"financialInterests":"No competing interests reported.","formattedTitle":"Chemistry in cryogenic etching: A tutorial","fulltext":[],"fulltextSource":"","fullText":"","funders":[],"hasAdminPriorityOnWorkflow":false,"hasManuscriptDocX":false,"hasOptedInToPreprint":true,"hasPassedJournalQc":"","hasAnyPriority":false,"hideJournal":false,"highlight":"","institution":"","isAcceptedByJournal":true,"isAuthorSuppliedPdf":true,"isDeskRejected":"","isHiddenFromSearch":false,"isInQc":false,"isInWorkflow":false,"isPdf":true,"isPdfUpToDate":true,"isWithdrawnOrRetracted":false,"journal":{"display":true,"email":"[email protected]","identity":"plasma-chemistry-and-plasma-processing","isNatureJournal":false,"hasQc":true,"allowDirectSubmit":false,"externalIdentity":"","sideBox":" Learn more about [Plasma Chemistry and Plasma Processing](https://www.springer.com/journal/11090 ","snPcode":"11090","submissionUrl":"https://mc.manuscriptcentral.com/pcpp","title":"Plasma Chemistry and Plasma Processing","twitterHandle":"","acdcEnabled":true,"dfaEnabled":true,"editorialSystem":"stoa","reportingPortfolio":"Springer Hybrid","inReviewEnabled":true,"inReviewRevisionsEnabled":false},"keywords":"","lastPublishedDoi":"10.21203/rs.3.rs-7623847/v1","lastPublishedDoiUrl":"https://doi.org/10.21203/rs.3.rs-7623847/v1","license":{"name":"CC BY 4.0","url":"https://creativecommons.org/licenses/by/4.0/"},"manuscriptAbstract":"\u003cp\u003eCooling the substrate to stimulate chemical reactions can seem rather counterintuitive. However, this is one of the advantages often observed in plasma cryogenic etching. This article discusses the interactions between plasma and the surface at low temperature. It begins by reviewing the fundamental theories of adsorption as applied to etching. The theoretical concepts are then illustrated in the second part of the article by two different cryogenic processes developed and studied as part of research programs: the reinforcement of the SiO\u003csub\u003ex\u003c/sub\u003eF\u003csub\u003ey\u003c/sub\u003e passivation layer in the STiGer cryogenic deep silicon etching process and cryogenic Atomic Layer Etching (cryo-ALE) of SiO\u003csub\u003e2\u003c/sub\u003e from physisorbed C\u003csub\u003e4\u003c/sub\u003eF\u003csub\u003e8\u003c/sub\u003e molecules.\u003c/p\u003e","manuscriptTitle":"Chemistry in cryogenic etching: A tutorial","msid":"","msnumber":"","nonDraftVersions":[{"code":1,"date":"2025-10-20 07:19:19","doi":"10.21203/rs.3.rs-7623847/v1","editorialEvents":[{"type":"communityComments","content":0},{"type":"decision","content":"Revision requested","date":"2025-11-02T21:46:19+00:00","index":"","fulltext":""},{"type":"editorInvitedReview","content":"","date":"2025-11-02T19:33:12+00:00","index":"hide","fulltext":""},{"type":"editorInvitedReview","content":"","date":"2025-10-19T08:54:26+00:00","index":"hide","fulltext":""},{"type":"reviewerAgreed","content":"234727226916369230448469110597358588881","date":"2025-10-11T22:33:50+00:00","index":"hide","fulltext":""},{"type":"reviewerAgreed","content":"218845565672304347780905179646754086803","date":"2025-10-10T23:48:09+00:00","index":"hide","fulltext":""},{"type":"reviewersInvited","content":"","date":"2025-10-07T18:45:53+00:00","index":"","fulltext":""},{"type":"editorAssigned","content":"","date":"2025-09-19T09:46:01+00:00","index":"","fulltext":""},{"type":"checksComplete","content":"","date":"2025-09-19T09:44:33+00:00","index":"","fulltext":""},{"type":"submitted","content":"Plasma Chemistry and Plasma Processing","date":"2025-09-15T20:07:23+00:00","index":"","fulltext":""}],"status":"published","journal":{"display":true,"email":"[email protected]","identity":"plasma-chemistry-and-plasma-processing","isNatureJournal":false,"hasQc":true,"allowDirectSubmit":false,"externalIdentity":"","sideBox":" Learn more about [Plasma Chemistry and Plasma Processing](https://www.springer.com/journal/11090 ","snPcode":"11090","submissionUrl":"https://mc.manuscriptcentral.com/pcpp","title":"Plasma Chemistry and Plasma Processing","twitterHandle":"","acdcEnabled":true,"dfaEnabled":true,"editorialSystem":"stoa","reportingPortfolio":"Springer Hybrid","inReviewEnabled":true,"inReviewRevisionsEnabled":false}}],"origin":"","ownerIdentity":"a1d9ebee-16c5-47e1-8d76-f05f65b4a6f8","owner":[],"postedDate":"October 20th, 2025","published":true,"recentEditorialEvents":[],"rejectedJournal":[],"revision":"","amendment":"","status":"under-review","subjectAreas":[],"tags":[],"updatedAt":"2025-12-01T15:53:26+00:00","versionOfRecord":[],"versionCreatedAt":"2025-10-20 07:19:19","video":"","vorDoi":"","vorDoiUrl":"","workflowStages":[]},"version":"v1","identity":"rs-7623847","journalConfig":"researchsquare"},"__N_SSP":true},"page":"/article/[identity]/[[...version]]","query":{"redirect":"/article/rs-7623847","identity":"rs-7623847","version":["v1"]},"buildId":"8U1c8b4HqxoKbykW_rLl7","isFallback":false,"isExperimentalCompile":false,"dynamicIds":[84888],"gssp":true,"scriptLoader":[]}