Transfer printing micro-assembly of silicon photonic crystal cavity arrays: beating the fabrication tolerance limit

Transfer printing micro-assembly of silicon photonic crystal cavity arrays: beating the fabrication tolerance limit | Research Square window.SnipcartSettings = { analytics: { enabled: false } }; (function() { var accessVector = localStorage.getItem('access_vector') || ''; window.dataLayer = window.dataLayer || []; if (accessVector) { window.dataLayer.push({ user: { profile: { profileInfo: { snid: accessVector } } } }); } })(); (function(w,d,s,l,i){w[l]=w[l]||[];w[l].push({'gtm.start':new Date().getTime(),event:'gtm.js'});var f=d.getElementsByTagName(s)[0],j=d.createElement(s),dl=l!='dataLayer'?'&l='+l:'';j.async=true;j.src='https://www.googletagmanager.com/gtm.js?id='+i+dl;f.parentNode.insertBefore(j,f);})(window,document,'script','dataLayer','GTM-K279D39R'); Browse Preprints In Review Journals COVID-19 Preprints AJE Video Bytes Research Tools Research Promotion AJE Professional Editing AJE Rubriq About Preprint Platform In Review Editorial Policies Our Team Advisory Board Help Center Sign In Submit a Preprint Cite Share Download PDF Article Transfer printing micro-assembly of silicon photonic crystal cavity arrays: beating the fabrication tolerance limit sean bommer, Christopher Panuski, Benoit Guilhabert, Zhongyi Xia, and 4 more This is a preprint; it has not been peer reviewed by a journal. https://doi.org/ 10.21203/rs.3.rs-4718343/v1 This work is licensed under a CC BY 4.0 License Status: Published Journal Publication published 01 Jul, 2025 Read the published version in Nature Communications → Version 1 posted You are reading this latest preprint version Abstract Photonic crystal cavities (PhCCs) can confine optical fields in ultra-small volumes, enabling efficient light-matter interactions for quantum and non-linear optics, sensing and all-optical signal processing. The inherent nanometric tolerances of micro-fabrication platforms can induce cavity resonant wavelength shifts two-orders of magnitude larger than cavity linewidths, prohibiting fabrication of arrays of nominally identical devices. We address this device variability by fabricating PhCCs as releasable pixels that can be transferred from their native substrate to a receiver where ordered micro-assembly can overcome the inherent fabrication variance. We demonstrate the measurement, binning and transfer of 119 PhCCs in a single session, producing spatially ordered arrays of PhCCs, sorted by resonant wavelength. Furthermore, the rapid in-situ measurement of the devices enables measurements of the PhCCs dynamic response to the print process for the first time, showing plastic and elastic effects in the seconds to hours range. Physical sciences/Optics and photonics/Optical materials and structures/Photonic crystals Physical sciences/Optics and photonics/Optical physics/Nanophotonics and plasmonics Full Text Additional Declarations There is NO Competing Interest. Supplementary Files PhCCPrintingNaturePhotonicsSupplementary.pdf Cite Share Download PDF Status: Published Journal Publication published 01 Jul, 2025 Read the published version in Nature Communications → Version 1 posted You are reading this latest preprint version Research Square lets you share your work early, gain feedback from the community, and start making changes to your manuscript prior to peer review in a journal. As a division of Research Square Company, we’re committed to making research communication faster, fairer, and more useful. We do this by developing innovative software and high quality services for the global research community. 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