Analysis of Mixed Composition Cold Plasmas by Optical Emission Diagnostics and Simulations

Analysis of Mixed Composition Cold Plasmas by Optical Emission Diagnostics and Simulations | Research Square window.SnipcartSettings = { analytics: { enabled: false } }; (function() { var accessVector = localStorage.getItem('access_vector') || ''; window.dataLayer = window.dataLayer || []; if (accessVector) { window.dataLayer.push({ user: { profile: { profileInfo: { snid: accessVector } } } }); } })(); (function(w,d,s,l,i){w[l]=w[l]||[];w[l].push({'gtm.start':new Date().getTime(),event:'gtm.js'});var f=d.getElementsByTagName(s)[0],j=d.createElement(s),dl=l!='dataLayer'?'&l='+l:'';j.async=true;j.src='https://www.googletagmanager.com/gtm.js?id='+i+dl;f.parentNode.insertBefore(j,f);})(window,document,'script','dataLayer','GTM-K279D39R'); Browse Preprints In Review Journals COVID-19 Preprints AJE Video Bytes Research Tools Research Promotion AJE Professional Editing AJE Rubriq About Preprint Platform In Review Editorial Policies Our Team Advisory Board Help Center Sign In Submit a Preprint Cite Share Download PDF Research Article Analysis of Mixed Composition Cold Plasmas by Optical Emission Diagnostics and Simulations Shani Har Lavan, Sharona Atlas, Amir Kaplan, Avi Lehrer, Illya Rozenberg, and 2 more This is a preprint; it has not been peer reviewed by a journal. https://doi.org/ 10.21203/rs.3.rs-5381776/v1 This work is licensed under a CC BY 4.0 License Status: Posted Version 1 posted You are reading this latest preprint version Abstract The behavior of mixed composition cold non-equilibrium plasmas was investigated in a low-pressure capacitively coupled reactor using optical emission spectroscopy (OES). By fitting experimental data to simulations of the Second Positive System (C3 Πu-B3Πg) of N2, rotational and vibrational temperatures were determined for various Ar/N2 mixtures as a function of plasma input power (40-100 W) and pressure (300-700 mTorr). Simulations of the plasma were performed for comparison. For pure N2, the observed trends revealed that both the rotational and vibrational temperatures increased with input power, (Trot of v=0 increased from 369-396 K and Tvib from 5938-6542 K, at 40-100 W, 100 SCCM and 293 mTorr) but both temperatures showed minimal response to the applied changes in pressure. The rotational and vibrational temperatures for the mixed composition Ar/N2 plasmas were significantly higher compared to the pure N2 plasmas (e.g. Trot of 1308 K and Tvib of 7279 K for 1.8% of N2 in Ar; at 50 W, 4 SCCM of N2, 220 SCCM of Ar for a total pressure of 587 mTorr). Moreover, the addition of Ar caused a larger separation between the rotational and vibrational temperatures compared to the pure N2 case. These phenomena illustrate the effects of Ar on the non-equilibrium energy distribution and more generally the influence that the gas mixture composition may have on the plasma reactivity. CCP plasma non-thermal plasma OES rotational and vibrational temperatures low-pressure plasma second positive system Ar/N2 mixtures. Full Text Additional Declarations No competing interests reported. Supplementary Files Supportinginformationfinal.docx Cite Share Download PDF Status: Posted Version 1 posted You are reading this latest preprint version Research Square lets you share your work early, gain feedback from the community, and start making changes to your manuscript prior to peer review in a journal. As a division of Research Square Company, we’re committed to making research communication faster, fairer, and more useful. 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Also discoverable on Platform About Our Team In Review Editorial Policies Advisory Board Help Center Resources Author Services Accessibility API Access RSS feed Manage Cookie Preferences © Research Square 2026 | ISSN 2693-5015 (online) Privacy Policy Terms of Service Do Not Sell My Personal Information {"props":{"pageProps":{"initialData":{"identity":"rs-5381776","acceptedTermsAndConditions":true,"allowDirectSubmit":true,"archivedVersions":[],"articleType":"Research Article","associatedPublications":[],"authors":[{"id":376834908,"identity":"4301d9bc-8171-4b0d-969c-509a0d5e39da","order_by":0,"name":"Shani Har Lavan","email":"","orcid":"","institution":"Ben-Gurion University of the Negev","correspondingAuthor":false,"prefix":"","firstName":"Shani","middleName":"Har","lastName":"Lavan","suffix":""},{"id":376834909,"identity":"6f368f10-2bb4-4845-9100-f25eeb6ad5ff","order_by":1,"name":"Sharona Atlas","email":"","orcid":"","institution":"Ben-Gurion University of the Negev","correspondingAuthor":false,"prefix":"","firstName":"Sharona","middleName":"","lastName":"Atlas","suffix":""},{"id":376834910,"identity":"4f259ce0-b53b-4b81-b92b-d14c6c69406c","order_by":2,"name":"Amir Kaplan","email":"","orcid":"","institution":"Nuclear Research Center Negev","correspondingAuthor":false,"prefix":"","firstName":"Amir","middleName":"","lastName":"Kaplan","suffix":""},{"id":376834911,"identity":"4fb3e35e-7da6-4634-9d80-613ce4a871e9","order_by":3,"name":"Avi Lehrer","email":"","orcid":"","institution":"Ben-Gurion University of the Negev","correspondingAuthor":false,"prefix":"","firstName":"Avi","middleName":"","lastName":"Lehrer","suffix":""},{"id":376834912,"identity":"7b45a994-0a1b-48eb-ad55-0ff867f7bd29","order_by":4,"name":"Illya Rozenberg","email":"","orcid":"","institution":"Ben-Gurion University of the Negev","correspondingAuthor":false,"prefix":"","firstName":"Illya","middleName":"","lastName":"Rozenberg","suffix":""},{"id":376834913,"identity":"55f9c936-a083-4bbf-ad90-fa7493391849","order_by":5,"name":"Hao Zhao","email":"","orcid":"","institution":"Peking University","correspondingAuthor":false,"prefix":"","firstName":"Hao","middleName":"","lastName":"Zhao","suffix":""},{"id":376834914,"identity":"67a10fa3-b298-42b8-85d8-fd7af93fd858","order_by":6,"name":"Joshua H. Baraban","email":"data:image/png;base64,iVBORw0KGgoAAAANSUhEUgAAAZAAAAAyAQMAAABI0h/eAAAABlBMVEX///8AAABVwtN+AAAACXBIWXMAAA7EAAAOxAGVKw4bAAAA1UlEQVRIiWNgGAWjYBACxhkgooGBgV8CKsLGTqwWyRkwLcyErJGAajG4ARMhpIV5dvOzDz932OUZ326/JsFQY8fAR0gL45xjxjN7zyQXm905UybBcCyZsMMYZyQYM/C2MSduu5GTJsHAdoAYLemfGf+21SdungHS8o8oLTnGzLxthxM3SKQfk2BsI0bLnDPFzLJnjifOuHOG2SKxL5mHoBbD2e2bGd/uqE7sn93+8MaHb3Zy8u0NBLQg5HkMGBKAJAE7GBjkEUz2BwRVj4JRMApGwcgEAGPWPvz3EJFTAAAAAElFTkSuQmCC","orcid":"","institution":"Ben-Gurion University of the Negev","correspondingAuthor":true,"prefix":"","firstName":"Joshua","middleName":"H.","lastName":"Baraban","suffix":""}],"badges":[],"createdAt":"2024-11-03 11:38:10","currentVersionCode":1,"declarations":"","doi":"10.21203/rs.3.rs-5381776/v1","doiUrl":"https://doi.org/10.21203/rs.3.rs-5381776/v1","draftVersion":[],"editorialEvents":[],"editorialNote":"","failedWorkflow":false,"files":[{"id":71658620,"identity":"cdd78e5a-9aeb-4d9f-a567-8bb7bcebff41","added_by":"auto","created_at":"2024-12-17 13:18:15","extension":"pdf","order_by":1,"title":"","display":"","copyAsset":false,"role":"manuscript-pdf","size":617778,"visible":true,"origin":"","legend":"","description":"","filename":"N2papermainfinal.pdf","url":"https://assets-eu.researchsquare.com/files/rs-5381776/v1_covered_42031c8e-f07a-4430-a375-e4f0a52199ad.pdf"},{"id":69212898,"identity":"e33aff3f-0ae8-4487-980b-f7ecc4102381","added_by":"auto","created_at":"2024-11-18 05:39:55","extension":"docx","order_by":1,"title":"","display":"","copyAsset":false,"role":"supplement","size":1459852,"visible":true,"origin":"","legend":"","description":"","filename":"Supportinginformationfinal.docx","url":"https://assets-eu.researchsquare.com/files/rs-5381776/v1/f9254deee1be8a06aef70ca3.docx"}],"financialInterests":"No competing interests reported.","formattedTitle":"Analysis of Mixed Composition Cold Plasmas by Optical Emission Diagnostics and Simulations","fulltext":[],"fulltextSource":"","fullText":"","funders":[],"hasAdminPriorityOnWorkflow":false,"hasManuscriptDocX":false,"hasOptedInToPreprint":true,"hasPassedJournalQc":"","hasAnyPriority":false,"hideJournal":true,"highlight":"","institution":"","isAcceptedByJournal":false,"isAuthorSuppliedPdf":true,"isDeskRejected":"","isHiddenFromSearch":false,"isInQc":false,"isInWorkflow":false,"isPdf":true,"isPdfUpToDate":true,"isWithdrawnOrRetracted":false,"journal":{"display":true,"email":"[email protected]","identity":"researchsquare","isNatureJournal":false,"hasQc":true,"allowDirectSubmit":true,"externalIdentity":"","sideBox":"","snPcode":"","submissionUrl":"/submission","title":"Research Square","twitterHandle":"researchsquare","acdcEnabled":true,"dfaEnabled":false,"editorialSystem":"","reportingPortfolio":"","inReviewEnabled":false,"inReviewRevisionsEnabled":true},"keywords":"CCP plasma, non-thermal plasma, OES, rotational and vibrational temperatures, low-pressure plasma, second positive system, Ar/N2 mixtures.","lastPublishedDoi":"10.21203/rs.3.rs-5381776/v1","lastPublishedDoiUrl":"https://doi.org/10.21203/rs.3.rs-5381776/v1","license":{"name":"CC BY 4.0","url":"https://creativecommons.org/licenses/by/4.0/"},"manuscriptAbstract":"\u003cp\u003eThe behavior of mixed composition cold non-equilibrium plasmas was investigated in a low-pressure capacitively coupled reactor using optical emission spectroscopy (OES). By fitting experimental data to simulations of the Second Positive System (C3 Πu-B3Πg) of N2, rotational and vibrational temperatures were determined for various Ar/N2 mixtures as a function of plasma input power (40-100 W) and pressure (300-700 mTorr). \u0026nbsp;Simulations of the plasma were performed for comparison. \u0026nbsp;For pure N2, the observed trends revealed that both the rotational and vibrational temperatures increased with input power, (Trot of v=0 increased from 369-396 K and Tvib from 5938-6542 K, at 40-100 W, 100 SCCM and 293 mTorr) but both temperatures showed minimal response to the applied changes in pressure. The rotational and vibrational temperatures for the mixed composition Ar/N2 plasmas were significantly higher compared to the pure N2 plasmas (e.g. Trot of 1308 K and Tvib of 7279 K for 1.8% of N2 in Ar; at 50 W, 4 SCCM of N2, 220 SCCM of Ar for a total pressure of 587 mTorr). Moreover, the addition of Ar caused a larger separation between the rotational and vibrational temperatures compared to the pure N2 case. These phenomena illustrate the effects of Ar on the non-equilibrium energy distribution and more generally the influence that the gas mixture composition may have on the plasma reactivity.\u0026nbsp;\u003c/p\u003e","manuscriptTitle":"Analysis of Mixed Composition Cold Plasmas by Optical Emission Diagnostics and Simulations","msid":"","msnumber":"","nonDraftVersions":[{"code":1,"date":"2024-11-18 05:39:33","doi":"10.21203/rs.3.rs-5381776/v1","editorialEvents":[{"type":"communityComments","content":0}],"status":"published","journal":{"display":true,"email":"[email protected]","identity":"researchsquare","isNatureJournal":false,"hasQc":true,"allowDirectSubmit":true,"externalIdentity":"","sideBox":"","snPcode":"","submissionUrl":"/submission","title":"Research Square","twitterHandle":"researchsquare","acdcEnabled":true,"dfaEnabled":false,"editorialSystem":"","reportingPortfolio":"","inReviewEnabled":false,"inReviewRevisionsEnabled":true}}],"origin":"","ownerIdentity":"d13f22b1-77f9-4646-a879-af258431ada8","owner":[],"postedDate":"November 18th, 2024","published":true,"recentEditorialEvents":[],"rejectedJournal":[],"revision":"","amendment":"","status":"posted","subjectAreas":[],"tags":[],"updatedAt":"2024-12-17T13:09:41+00:00","versionOfRecord":[],"versionCreatedAt":"2024-11-18 05:39:33","video":"","vorDoi":"","vorDoiUrl":"","workflowStages":[]},"version":"v1","identity":"rs-5381776","journalConfig":"researchsquare"},"__N_SSP":true},"page":"/article/[identity]/[[...version]]","query":{"redirect":"/article/rs-5381776","identity":"rs-5381776","version":["v1"]},"buildId":"qtupq5eGEP_6zYnWcrvyt","isFallback":false,"isExperimentalCompile":false,"dynamicIds":[84888],"gssp":true,"scriptLoader":[]}