Smart Resonant Micro-sensor and Micro-actuator: High-Performance, Wide Range Bi-Axial Magnetic Sensitive/ Insensitive Micro-Device for Multifunctional Sensing Applications

Smart Resonant Micro-sensor and Micro-actuator: High-Performance, Wide Range Bi-Axial Magnetic Sensitive/ Insensitive Micro-Device for Multifunctional Sensing Applications | Research Square window.SnipcartSettings = { analytics: { enabled: false } }; (function() { var accessVector = localStorage.getItem('access_vector') || ''; window.dataLayer = window.dataLayer || []; if (accessVector) { window.dataLayer.push({ user: { profile: { profileInfo: { snid: accessVector } } } }); } })(); (function(w,d,s,l,i){w[l]=w[l]||[];w[l].push({'gtm.start':new Date().getTime(),event:'gtm.js'});var f=d.getElementsByTagName(s)[0],j=d.createElement(s),dl=l!='dataLayer'?'&l='+l:'';j.async=true;j.src='https://www.googletagmanager.com/gtm.js?id='+i+dl;f.parentNode.insertBefore(j,f);})(window,document,'script','dataLayer','GTM-K279D39R'); Browse Preprints In Review Journals COVID-19 Preprints AJE Video Bytes Research Tools Research Promotion AJE Professional Editing AJE Rubriq About Preprint Platform In Review Editorial Policies Our Team Advisory Board Help Center Sign In Submit a Preprint Cite Share Download PDF Article Smart Resonant Micro-sensor and Micro-actuator: High-Performance, Wide Range Bi-Axial Magnetic Sensitive/ Insensitive Micro-Device for Multifunctional Sensing Applications Nouha Alcheikh, Hanin Amara, Nadeem Beigh This is a preprint; it has not been peer reviewed by a journal. https://doi.org/ 10.21203/rs.3.rs-6319987/v1 This work is licensed under a CC BY 4.0 License Status: Published Journal Publication published 17 Sep, 2025 Read the published version in Microsystems & Nanoengineering → Version 1 posted 9 You are reading this latest preprint version Abstract With the rapid development of intelligent and autonomous systems such as wearable health monitoring and advanced manufacturing robots, there is a growing demand for the development of advanced, miniaturized smart sensors and actuator systems. In this context, a single microdevice with hybrid functionality as both a sensor and actuator demonstrate excellent performance across diverse applications, holds significant promise. Herein, we present a proof-of-concept for a high-performance bi-directional Lorentz force magnetometer and actuator, implemented within a single microelectromechanical system (MEMS) device. Moreover, the device demonstrates insensitivity to magnetic fields, making it highly suitable for applications that require anti-crossing behavior in magnetic environments. The design is based on a clamped-guided curved microresonator connected to straight and V-shaped beams micro-actuators. The operation of the proposed device relies on the flexibility to control the applied electrothermal excitation in different ways, offering smart thermal actuation and dynamic sensing mechanisms. Furthermore, the proposed technique allows tuning of the first symmetric mode, achieving either a high or low frequency shift based on input power levels. Hence, this study provides valuable insights for improving tunability in sensitivity and power for various actuation mechanisms. At atmospheric pressure and an input power of 19.5 mW, the device functions as a high-performance biaxial magnetic sensor with a sensitivity (S) of 36.58% T-1, an excellent linearity in the medium-to-high magnetic field range of ±400 mT, and minimum detectable field, Bmin of 0.83 µT.Hz-1. In contrast, it can be tuned as a magnetic-field insensitive actuator (S=3.28% T-1) with a transversal displacement of 4 µm, utilizing a negligible power of 43mW. The diverse operation highlights its hybrid functionality as an actuator or high -performance sensor. These features, combined with the simplicity of fabrication and low-cost, make the proposed microdevice highly promising for developing a 3-axis magnetic sensor and actuator network system, as well as for various industrial applications Physical sciences/Nanoscience and technology/Nanoscale devices/Sensors Physical sciences/Nanoscience and technology/Nanoscale devices/NEMS Full Text Additional Declarations There is no conflict of interest Supplementary Files SUPPLEMENTARYINFORMATIONMNEFinalsubmitted.pdf Smart Resonant Micro-sensor and Micro-actuator: High-Performance, Wide Range Bi-Axial Magnetic Sensitive/ Insensitive Micro-Device for Multifunctional Sensing Applications Cite Share Download PDF Status: Published Journal Publication published 17 Sep, 2025 Read the published version in Microsystems & Nanoengineering → Version 1 posted Editorial decision: revise 30 Jun, 2025 Review # 2 received at journal 26 Jun, 2025 Review # 1 received at journal 26 May, 2025 Reviewer # 2 agreed at journal 07 May, 2025 Reviewer # 1 agreed at journal 04 May, 2025 Reviewers invited by journal 29 Apr, 2025 Submission checks completed at journal 27 Mar, 2025 Editor assigned by journal 27 Mar, 2025 First submitted to journal 27 Mar, 2025 You are reading this latest preprint version Research Square lets you share your work early, gain feedback from the community, and start making changes to your manuscript prior to peer review in a journal. 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Also discoverable on Platform About Our Team In Review Editorial Policies Advisory Board Help Center Resources Author Services Accessibility API Access RSS feed Manage Cookie Preferences © Research Square 2026 | ISSN 2693-5015 (online) Privacy Policy Terms of Service Do Not Sell My Personal Information {"props":{"pageProps":{"initialData":{"identity":"rs-6319987","acceptedTermsAndConditions":true,"allowDirectSubmit":false,"archivedVersions":[],"articleType":"Article","associatedPublications":[],"authors":[{"id":449937416,"identity":"fa580cc2-386a-4838-b3e4-eda2352b2cdb","order_by":0,"name":"Nouha 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