Effect of Deposition Temperature on Properties of Undoped Ultrasonically Sprayed ZnO Thin Films

Effect of Deposition Temperature on Properties of Undoped Ultrasonically Sprayed ZnO Thin Films | Research Square window.SnipcartSettings = { analytics: { enabled: false } }; (function() { var accessVector = localStorage.getItem('access_vector') || ''; window.dataLayer = window.dataLayer || []; if (accessVector) { window.dataLayer.push({ user: { profile: { profileInfo: { snid: accessVector } } } }); } })(); (function(w,d,s,l,i){w[l]=w[l]||[];w[l].push({'gtm.start':new Date().getTime(),event:'gtm.js'});var f=d.getElementsByTagName(s)[0],j=d.createElement(s),dl=l!='dataLayer'?'&l='+l:'';j.async=true;j.src='https://www.googletagmanager.com/gtm.js?id='+i+dl;f.parentNode.insertBefore(j,f);})(window,document,'script','dataLayer','GTM-K279D39R'); Browse Preprints In Review Journals COVID-19 Preprints AJE Video Bytes Research Tools Research Promotion AJE Professional Editing AJE Rubriq About Preprint Platform In Review Editorial Policies Our Team Advisory Board Help Center Sign In Submit a Preprint Cite Share Download PDF Research Article Effect of Deposition Temperature on Properties of Undoped Ultrasonically Sprayed ZnO Thin Films Javier Pérez-Pérez, Augusto Iribarren, José Antonio Rodríguez This is a preprint; it has not been peer reviewed by a journal. https://doi.org/ 10.21203/rs.3.rs-8920421/v1 This work is licensed under a CC BY 4.0 License Status: Posted Version 1 posted You are reading this latest preprint version Abstract Twoanalogous sets of nanostructured ZnO thin films were deposited by Ultrasonic Spray Pyrolysis (USP) by varying the substrate temperature in the range 300 – 430 ºC, the rest of the deposition parameters being fixed. One set was deposited on glass and the other on crystalline silicon substrates. All samples were post-treated at 450 ºC for 2 hours in air. The effect of the deposition temperature on the morphological, optical and microstructural properties was analysed through five different techniques. The custom-made USP set-up was equipped with some specific features, which diminish the negative effect of convective currents and improve film homogeneity. Films with specular reflectance, good homogeneity, good adherence to substrate, high transmittance in the visible spectral range and with the typical hexagonal wurtzite microstructure were obtained. The physical properties of the films strongly depend on substrate temperature in the studied range. In particular, very smooth films at high deposition rate were deposited at 350 ºC. However, depositing at temperatures higher than around 400 ºC allowed to obtain, under high and increasing deposition rates, better crystalline quality and crystallite orientation towards the direction normal to planes (002)(c-axis oriented films), which is useful for specific applications. Ultrasonic spray pyrolysis zinc oxide optical properties deposition temperature Full Text Additional Declarations No competing interests reported. Cite Share Download PDF Status: Posted Version 1 posted You are reading this latest preprint version Research Square lets you share your work early, gain feedback from the community, and start making changes to your manuscript prior to peer review in a journal. As a division of Research Square Company, we’re committed to making research communication faster, fairer, and more useful. We do this by developing innovative software and high quality services for the global research community. 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Also discoverable on Platform About Our Team In Review Editorial Policies Advisory Board Help Center Resources Author Services Accessibility API Access RSS feed Manage Cookie Preferences © Research Square 2026 | ISSN 2693-5015 (online) Privacy Policy Terms of Service Do Not Sell My Personal Information {"props":{"pageProps":{"initialData":{"identity":"rs-8920421","acceptedTermsAndConditions":true,"allowDirectSubmit":true,"archivedVersions":[],"articleType":"Research Article","associatedPublications":[],"authors":[{"id":615239626,"identity":"cdb6b8b6-1e6c-4eca-abf3-d1538fad6a00","order_by":0,"name":"Javier Pérez-Pérez","email":"","orcid":"","institution":"University of Havana","correspondingAuthor":false,"prefix":"","firstName":"Javier","middleName":"","lastName":"Pérez-Pérez","suffix":""},{"id":615239629,"identity":"7ee202db-8f94-4d81-9f83-ec562215f759","order_by":1,"name":"Augusto Iribarren","email":"","orcid":"","institution":"University of Havana","correspondingAuthor":false,"prefix":"","firstName":"Augusto","middleName":"","lastName":"Iribarren","suffix":""},{"id":615239630,"identity":"bfec6d2e-7ae7-46aa-b3af-0dc26d2fcd74","order_by":2,"name":"José Antonio Rodríguez","email":"data:image/png;base64,iVBORw0KGgoAAAANSUhEUgAAAZAAAAAyAQMAAABI0h/eAAAABlBMVEX///8AAABVwtN+AAAACXBIWXMAAA7EAAAOxAGVKw4bAAAAp0lEQVRIiWNgGAWjYBACxgYGxgcJYCYP8VqYDUjTAgRsEgwkaWFuP/us4mHOPTkGidwDDD/biHFYT7rZjcRtxcYMEnkJjL1EaWlIYwNqSUhskMgxYGYkSkv/M7YCoJZ6ErTMSGNjAGpJYCBByzNmCaAWwzaeNwYHe84RocWwP43x489tCfL87DmGD36UEaOlAcpgA+IDRGhgYJAnStUoGAWjYBSMbAAARLkvkYfx89wAAAAASUVORK5CYII=","orcid":"","institution":"University of Havana","correspondingAuthor":true,"prefix":"","firstName":"José","middleName":"Antonio","lastName":"Rodríguez","suffix":""}],"badges":[],"createdAt":"2026-02-19 19:38:08","currentVersionCode":1,"declarations":"","doi":"10.21203/rs.3.rs-8920421/v1","doiUrl":"https://doi.org/10.21203/rs.3.rs-8920421/v1","draftVersion":[],"editorialEvents":[],"editorialNote":"","failedWorkflow":false,"files":[{"id":106005693,"identity":"1d887b1c-ef8c-4372-ab6c-7b3f4c61ef8a","added_by":"auto","created_at":"2026-04-02 10:42:53","extension":"pdf","order_by":1,"title":"","display":"","copyAsset":false,"role":"manuscript-pdf","size":772103,"visible":true,"origin":"","legend":"","description":"","filename":"EffectofDepositionTemperatureforReview.pdf","url":"https://assets-eu.researchsquare.com/files/rs-8920421/v1_covered_209df5a6-1632-40a5-a4d7-c972247ed0ea.pdf"}],"financialInterests":"No competing interests reported.","formattedTitle":"Effect of Deposition Temperature on Properties of Undoped Ultrasonically Sprayed ZnO Thin Films","fulltext":[],"fulltextSource":"","fullText":"","funders":[],"hasAdminPriorityOnWorkflow":false,"hasManuscriptDocX":false,"hasOptedInToPreprint":true,"hasPassedJournalQc":"","hasAnyPriority":false,"hideJournal":true,"highlight":"","institution":"","isAcceptedByJournal":false,"isAuthorSuppliedPdf":true,"isDeskRejected":"","isHiddenFromSearch":false,"isInQc":false,"isInWorkflow":false,"isPdf":true,"isPdfUpToDate":true,"isWithdrawnOrRetracted":false,"journal":{"display":true,"email":"[email protected]","identity":"researchsquare","isNatureJournal":false,"hasQc":true,"allowDirectSubmit":true,"externalIdentity":"","sideBox":"","snPcode":"","submissionUrl":"/submission","title":"Research Square","twitterHandle":"researchsquare","acdcEnabled":true,"dfaEnabled":false,"editorialSystem":"","reportingPortfolio":"","inReviewEnabled":false,"inReviewRevisionsEnabled":true},"keywords":"Ultrasonic spray pyrolysis, zinc oxide, optical properties, deposition temperature","lastPublishedDoi":"10.21203/rs.3.rs-8920421/v1","lastPublishedDoiUrl":"https://doi.org/10.21203/rs.3.rs-8920421/v1","license":{"name":"CC BY 4.0","url":"https://creativecommons.org/licenses/by/4.0/"},"manuscriptAbstract":"\u003cp\u003eTwoanalogous sets of nanostructured ZnO thin films were deposited by Ultrasonic Spray Pyrolysis (USP) by varying the substrate temperature in the range 300 – 430 ºC, the rest of the deposition parameters being fixed. 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