Recent Advances in Magnetron Sputtering: From Fundamentals to Industrial Applications
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Abstract
Magnetron sputtering (MS) has undergone significant advancements since its inception. This review explores the evolution of MS, encompassing its fundamental principles, various techniques (including reactive sputtering, pulsed magnetron sputtering, and high-power impulse magnetron sputtering), and its wide-ranging industrial applications. While detailing the advantages of high deposition rates, versatility in material selection, and precise control over film properties, the review also addresses inherent challenges such as low target utilization and plasma instability. A significant portion focuses on the crucial role of MS in the automotive industry, highlighting its use in creating durable, high-quality coatings for both aesthetic and functional purposes. The transition from traditional electroplating methods to more environmentally friendly MS techniques is also discussed, emphasizing the growing demand for sustainable manufacturing processes. This review concludes by summarizing the key advancements, remaining challenges, and potential future trends in magnetron sputtering technologies, particularly within the high-tech industrial sector.
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- europepmc
- last seen: 2026-05-20T01:45:00.602351+00:00