Hybrid Heterogeneous Integrated Wireless Sensor Devices with Multilayer Composite Films

To realise the real-time monitoring of safety and health of military and industrial devices, such as aerospace vehicles, aero-engine blades, and boilers in thermal power plants, within the operating temperature range of ≥1400°C, this study proposed a miniaturised, integrated, high-thermal-stability wireless sensor device. This study analysed the influence of temperature on the interdigital electrode of surface-acoustic-wave temperature sensors with different structures of a bare electrode, single-layer protective film, and multilayer composite film. The exposed electrode exhibited high thermal stability at a high temperature of 1000°C, but the sensor failed at 1250℃. To achieve health monitoring of military and industrial devices in a high-temperature environment of >1400℃, a multilayer protective film structure of aluminium oxide/aluminium nitride/alumina was proposed. The device can operate at up to 1400℃ with a sensitivity of 7.41 KHz/℃. The electrode protection function improved working temperature. To realize real-time monitoring, a wireless sensor device, that is, a hybrid heterogeneous integration of high-temperature co-fired ceramic (HTCC) antenna and lanthanum silicate-based surface acoustic wave with a multilayer composite film, was proposed. The wireless device could operate in from room temperature to 1400°C and could be maintained at a constant temperature of 1400°C for 2 h with a repeatability error of 12.67%. The integrated structural design of the device and antenna was realized, and the miniaturisation of high-temperature wireless devices was achieved through. This study provides important guidance for the real-time monitoring of military and industrial device safety in high-temperature and other harsh environments.