Nonlinear Dynamics of Electrostatic Comb-drive with Variable Gap Under Harmonic Excitation

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Abstract This paper provides an extensive study of the nonlinear dynamics of a variable gap electrostatic comb-drive. The amplitude- and phase-frequency response, as well as the amplitude- and phase-force response of the comb-drive were obtained and analyzed with and without taking into account the cubic nonlinearity of the suspension. A significant variation in the frequency and force response is demonstrated in the presence of nonlinearity of the elastic suspension. Using numerical methods of bifurcation theory, solutions are obtained that correspond to the resonance peak of the frequency response when the constant and variable components of the voltages change. The result obtained makes it possible to determine the range of excitation voltage values that provide the required vibration amplitude in the resonant mode. The influence of the second stationary electrode on the dynamics of the system is estimated. The significant influence of this factor on the resonant-mode characteristics is revealed.
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Nonlinear Dynamics of Electrostatic Comb-drive with Variable Gap Under Harmonic Excitation | Research Square window.SnipcartSettings = { analytics: { enabled: false } }; (function() { var accessVector = localStorage.getItem('access_vector') || ''; window.dataLayer = window.dataLayer || []; if (accessVector) { window.dataLayer.push({ user: { profile: { profileInfo: { snid: accessVector } } } }); } })(); (function(w,d,s,l,i){w[l]=w[l]||[];w[l].push({'gtm.start':new Date().getTime(),event:'gtm.js'});var f=d.getElementsByTagName(s)[0],j=d.createElement(s),dl=l!='dataLayer'?'&l='+l:'';j.async=true;j.src='https://www.googletagmanager.com/gtm.js?id='+i+dl;f.parentNode.insertBefore(j,f);})(window,document,'script','dataLayer','GTM-K279D39R'); Browse Preprints In Review Journals COVID-19 Preprints AJE Video Bytes Research Tools Research Promotion AJE Professional Editing AJE Rubriq About Preprint Platform In Review Editorial Policies Our Team Advisory Board Help Center Sign In Submit a Preprint Cite Share Download PDF Research Article Nonlinear Dynamics of Electrostatic Comb-drive with Variable Gap Under Harmonic Excitation Alexey V. Lukin, Dmitry Indeitsev, Ivan Popov, Nadezhda Mozhgova This is a preprint; it has not been peer reviewed by a journal. https://doi.org/ 10.21203/rs.3.rs-873502/v1 This work is licensed under a CC BY 4.0 License Status: Posted Version 1 posted You are reading this latest preprint version Abstract This paper provides an extensive study of the nonlinear dynamics of a variable gap electrostatic comb-drive. The amplitude- and phase-frequency response, as well as the amplitude- and phase-force response of the comb-drive were obtained and analyzed with and without taking into account the cubic nonlinearity of the suspension. A significant variation in the frequency and force response is demonstrated in the presence of nonlinearity of the elastic suspension. Using numerical methods of bifurcation theory, solutions are obtained that correspond to the resonance peak of the frequency response when the constant and variable components of the voltages change. The result obtained makes it possible to determine the range of excitation voltage values that provide the required vibration amplitude in the resonant mode. The influence of the second stationary electrode on the dynamics of the system is estimated. The significant influence of this factor on the resonant-mode characteristics is revealed. Electrical Engineering Mechanical Engineering Ocean Engineering Applied Mathematics Electrostatic comb-drive elastic suspension vibration amplitude. Full Text Cite Share Download PDF Status: Posted Version 1 posted You are reading this latest preprint version Research Square lets you share your work early, gain feedback from the community, and start making changes to your manuscript prior to peer review in a journal. As a division of Research Square Company, we’re committed to making research communication faster, fairer, and more useful. We do this by developing innovative software and high quality services for the global research community. Our growing team is made up of researchers and industry professionals working together to solve the most critical problems facing scientific publishing. Also discoverable on Platform About Our Team In Review Editorial Policies Advisory Board Help Center Resources Author Services Accessibility API Access RSS feed Manage Cookie Preferences © Research Square 2026 | ISSN 2693-5015 (online) Privacy Policy Terms of Service Do Not Sell My Personal Information {"props":{"pageProps":{"initialData":{"identity":"rs-873502","acceptedTermsAndConditions":true,"allowDirectSubmit":true,"archivedVersions":[],"articleType":"Research Article","associatedPublications":[],"authors":[{"id":51567761,"identity":"f3ff04e1-d00d-4332-b859-fb51c1f68501","order_by":0,"name":"Alexey V. 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