Effects of vibration amplitude on subsurface damage of SiC in rotary ultrasonic grinding

Effects of vibration amplitude on subsurface damage of SiC in rotary ultrasonic grinding | Research Square window.SnipcartSettings = { analytics: { enabled: false } }; (function() { var accessVector = localStorage.getItem('access_vector') || ''; window.dataLayer = window.dataLayer || []; if (accessVector) { window.dataLayer.push({ user: { profile: { profileInfo: { snid: accessVector } } } }); } })(); (function(w,d,s,l,i){w[l]=w[l]||[];w[l].push({'gtm.start':new Date().getTime(),event:'gtm.js'});var f=d.getElementsByTagName(s)[0],j=d.createElement(s),dl=l!='dataLayer'?'&l='+l:'';j.async=true;j.src='https://www.googletagmanager.com/gtm.js?id='+i+dl;f.parentNode.insertBefore(j,f);})(window,document,'script','dataLayer','GTM-K279D39R'); Browse Preprints In Review Journals COVID-19 Preprints AJE Video Bytes Research Tools Research Promotion AJE Professional Editing AJE Rubriq About Preprint Platform In Review Editorial Policies Our Team Advisory Board Help Center Sign In Submit a Preprint Cite Share Download PDF Research Article Effects of vibration amplitude on subsurface damage of SiC in rotary ultrasonic grinding Na Qin, Xiaojun Huang, Liang Zheng, Zhifeng Li This is a preprint; it has not been peer reviewed by a journal. https://doi.org/ 10.21203/rs.3.rs-8256369/v1 This work is licensed under a CC BY 4.0 License Status: Published Journal Publication published 16 Apr, 2026 Read the published version in The International Journal of Advanced Manufacturing Technology → Version 1 posted 5 You are reading this latest preprint version Abstract Rotary ultrasonic grinding (RUG) exhibits significant advantages in the machining of hard and brittle materials, such as silicon carbide (SiC), an important engineering material. However, the ultrasonic excitation mechanisms remain unclear, unfavorable to promote machining efficiency and surface quality. A notable pending problem is the inconsistency of ultrasonic vibration amplitude on subsurface damage in a workpiece. To address this, a simulation model was developed in this study to analyze the formation of subsurface damage, and corresponding experimental RUG of SiC were conducted for the verification. Four evaluation indexes - average chipping depth, maximum chipping depth, average crack depth, and maximum crack depth - were employed to characterize the subsurface damage. Simulation results revealed that the maximum crack depth decreases initially and then increases as ultrasonic vibration amplitude increases. These trends were corroborated by experimental findings. Furthermore, both the kinematics and dynamic behavior of abrasive grains on grinding tool were comprehensively analyzed based on the indentation fracture mechanics model. Theoretical analysis of variation trends provided further insights into the effects of ultrasonic vibration, elucidating the factors responsible for the inconsistencies between ultrasonic vibration amplitude and subsurface damage. Silicon carbide Rotary ultrasonic grinding Subsurface damage Vibration amplitude Full Text Cite Share Download PDF Status: Published Journal Publication published 16 Apr, 2026 Read the published version in The International Journal of Advanced Manufacturing Technology → Version 1 posted Editorial decision: Major Revisions Needed 02 Feb, 2026 Reviewers agreed at journal 26 Dec, 2025 Reviewers invited by journal 26 Dec, 2025 Editor assigned by journal 04 Dec, 2025 First submitted to journal 01 Dec, 2025 You are reading this latest preprint version Research Square lets you share your work early, gain feedback from the community, and start making changes to your manuscript prior to peer review in a journal. As a division of Research Square Company, we’re committed to making research communication faster, fairer, and more useful. We do this by developing innovative software and high quality services for the global research community. Our growing team is made up of researchers and industry professionals working together to solve the most critical problems facing scientific publishing. Also discoverable on Platform About Our Team In Review Editorial Policies Advisory Board Help Center Resources Author Services Accessibility API Access RSS feed Manage Cookie Preferences © Research Square 2026 | ISSN 2693-5015 (online) Privacy Policy Terms of Service Do Not Sell My Personal Information {"props":{"pageProps":{"initialData":{"identity":"rs-8256369","acceptedTermsAndConditions":true,"allowDirectSubmit":false,"archivedVersions":[],"articleType":"Research Article","associatedPublications":[],"authors":[{"id":565860106,"identity":"1c0f927b-1833-40a4-9edc-c1eb5f99550c","order_by":0,"name":"Na Qin","email":"","orcid":"https://orcid.org/0000-0003-0473-6640","institution":"","correspondingAuthor":false,"prefix":"","firstName":"Na","middleName":"","lastName":"Qin","suffix":""},{"id":565860107,"identity":"78df0eb7-549d-4ae8-94de-6424b6063d97","order_by":1,"name":"Xiaojun 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However, the ultrasonic excitation mechanisms remain unclear, unfavorable to promote machining efficiency and surface quality. A notable pending problem is the inconsistency of ultrasonic vibration amplitude on subsurface damage in a workpiece. To address this, a simulation model was developed in this study to analyze the formation of subsurface damage, and corresponding experimental RUG of SiC were conducted for the verification. Four evaluation indexes - average chipping depth, maximum chipping depth, average crack depth, and maximum crack depth - were employed to characterize the subsurface damage. Simulation results revealed that the maximum crack depth decreases initially and then increases as ultrasonic vibration amplitude increases. These trends were corroborated by experimental findings. Furthermore, both the kinematics and dynamic behavior of abrasive grains on grinding tool were comprehensively analyzed based on the indentation fracture mechanics model. Theoretical analysis of variation trends provided further insights into the effects of ultrasonic vibration, elucidating the factors responsible for the inconsistencies between ultrasonic vibration amplitude and subsurface damage.","manuscriptTitle":"Effects of vibration amplitude on subsurface damage of SiC in rotary ultrasonic grinding","msid":"","msnumber":"","nonDraftVersions":[{"code":1,"date":"2025-12-31 06:39:58","doi":"10.21203/rs.3.rs-8256369/v1","editorialEvents":[{"type":"communityComments","content":0},{"type":"decision","content":"Major Revisions Needed","date":"2026-02-02T07:18:17+00:00","index":"","fulltext":""},{"type":"reviewerAgreed","content":"","date":"2025-12-26T14:02:58+00:00","index":0,"fulltext":""},{"type":"reviewersInvited","content":"","date":"2025-12-26T12:56:26+00:00","index":"","fulltext":""},{"type":"editorAssigned","content":"","date":"2025-12-04T23:57:38+00:00","index":"","fulltext":""},{"type":"submitted","content":"The International Journal of Advanced Manufacturing Technology","date":"2025-12-02T01:03:57+00:00","index":"","fulltext":""}],"status":"published","journal":{"display":true,"email":"[email protected]","identity":"the-international-journal-of-advanced-manufacturing-technology","isNatureJournal":false,"hasQc":true,"allowDirectSubmit":false,"externalIdentity":"jamt","sideBox":"Learn more about [The International Journal of Advanced Manufacturing Technology](https://www.springer.com/journal/170)","snPcode":"170","submissionUrl":"https://submission.nature.com/new-submission/170/3","title":"The International Journal of Advanced Manufacturing Technology","twitterHandle":"","acdcEnabled":true,"dfaEnabled":true,"editorialSystem":"em","reportingPortfolio":"Springer Hybrid","inReviewEnabled":true,"inReviewRevisionsEnabled":false}}],"origin":"","ownerIdentity":"f5f0842f-65aa-4c9a-9603-183ae65cdd03","owner":[],"postedDate":"December 31st, 2025","published":true,"recentEditorialEvents":[],"rejectedJournal":[],"revision":"","amendment":"","status":"published-in-journal","subjectAreas":[],"tags":[],"updatedAt":"2026-04-20T16:03:03+00:00","versionOfRecord":{"articleIdentity":"rs-8256369","link":"https://doi.org/10.1007/s00170-026-18081-x","journal":{"identity":"the-international-journal-of-advanced-manufacturing-technology","isVorOnly":false,"title":"The International Journal of Advanced Manufacturing Technology"},"publishedOn":"2026-04-16 15:58:13","publishedOnDateReadable":"April 16th, 2026"},"versionCreatedAt":"2025-12-31 06:39:58","video":"","vorDoi":"10.1007/s00170-026-18081-x","vorDoiUrl":"https://doi.org/10.1007/s00170-026-18081-x","workflowStages":[]},"version":"v1","identity":"rs-8256369","journalConfig":"researchsquare"},"__N_SSP":true},"page":"/article/[identity]/[[...version]]","query":{"redirect":"/article/rs-8256369","identity":"rs-8256369","version":["v1"]},"buildId":"8U1c8b4HqxoKbykW_rLl7","isFallback":false,"isExperimentalCompile":false,"dynamicIds":[84888],"gssp":true,"scriptLoader":[]}