Development of XYZ Flexure Micro-positioning stages based on ETC type two-axis flexure hinges

Development of XYZ Flexure Micro-positioning stages based on ETC type two-axis flexure hinges | Research Square window.SnipcartSettings = { analytics: { enabled: false } }; (function() { var accessVector = localStorage.getItem('access_vector') || ''; window.dataLayer = window.dataLayer || []; if (accessVector) { window.dataLayer.push({ user: { profile: { profileInfo: { snid: accessVector } } } }); } })(); (function(w,d,s,l,i){w[l]=w[l]||[];w[l].push({'gtm.start':new Date().getTime(),event:'gtm.js'});var f=d.getElementsByTagName(s)[0],j=d.createElement(s),dl=l!='dataLayer'?'&l='+l:'';j.async=true;j.src='https://www.googletagmanager.com/gtm.js?id='+i+dl;f.parentNode.insertBefore(j,f);})(window,document,'script','dataLayer','GTM-K279D39R'); Browse Preprints In Review Journals COVID-19 Preprints AJE Video Bytes Research Tools Research Promotion AJE Professional Editing AJE Rubriq About Preprint Platform In Review Editorial Policies Our Team Advisory Board Help Center Sign In Submit a Preprint Cite Share Download PDF Research Article Development of XYZ Flexure Micro-positioning stages based on ETC type two-axis flexure hinges Junqiang Chen, Zehui Zhong, Huaxian Wei, Xiaodong Niu This is a preprint; it has not been peer reviewed by a journal. https://doi.org/ 10.21203/rs.3.rs-6230559/v1 This work is licensed under a CC BY 4.0 License Status: Published Journal Publication published 04 Aug, 2025 Read the published version in Journal of Micro and Bio Robotics → Version 1 posted 9 You are reading this latest preprint version Abstract The development of flexure-based XYZ micro-positioning stages incorporating a novel type of flexure hinges with elliptical transverse cross-sections (ETC) is presented. In comparison to classical two-axis flexure hinges featuring rectangular transverse cross-sections (RTC), parametric studies of both the flexure hinges and the flexure stage were conducted, focusing on stress concentration, motion range, and output decoupling. The results demonstrate that the ETC-based XYZ flexure stage outperforms the RTC-based design in all three aspects. A prototype of the XYZ flexure stage utilizing ETC-type two-axis flexure hinges was developed and experimentally tested, achieving motion errors and parasitic motions of less than 5%. The ETC-type two-axis flexure hinges offer a novel approach for advancing spatial flexure stage design. micro-positioning flexure stage XYZ ETC flexure hinges Full Text Additional Declarations No competing interests reported. Supplementary Files ETCstage20250315.pdf Cite Share Download PDF Status: Published Journal Publication published 04 Aug, 2025 Read the published version in Journal of Micro and Bio Robotics → Version 1 posted Editorial decision: Revision requested 22 May, 2025 Reviews received at journal 15 May, 2025 Reviews received at journal 03 Apr, 2025 Reviewers agreed at journal 28 Mar, 2025 Reviewers agreed at journal 28 Mar, 2025 Reviewers invited by journal 26 Mar, 2025 Editor assigned by journal 20 Mar, 2025 Submission checks completed at journal 19 Mar, 2025 First submitted to journal 15 Mar, 2025 You are reading this latest preprint version Research Square lets you share your work early, gain feedback from the community, and start making changes to your manuscript prior to peer review in a journal. As a division of Research Square Company, we’re committed to making research communication faster, fairer, and more useful. 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Also discoverable on Platform About Our Team In Review Editorial Policies Advisory Board Help Center Resources Author Services Accessibility API Access RSS feed Manage Cookie Preferences © Research Square 2026 | ISSN 2693-5015 (online) Privacy Policy Terms of Service Do Not Sell My Personal Information {"props":{"pageProps":{"initialData":{"identity":"rs-6230559","acceptedTermsAndConditions":true,"allowDirectSubmit":false,"archivedVersions":[],"articleType":"Research Article","associatedPublications":[],"authors":[{"id":438764206,"identity":"605760b0-3919-43bc-ba85-66ccbfe4beeb","order_by":0,"name":"Junqiang Chen","email":"","orcid":"","institution":"Shantou University","correspondingAuthor":false,"prefix":"","firstName":"Junqiang","middleName":"","lastName":"Chen","suffix":""},{"id":438764207,"identity":"8a13c31b-677e-4ac2-a4d7-854f9b0f37a5","order_by":1,"name":"Zehui Zhong","email":"","orcid":"","institution":"Shantou University","correspondingAuthor":false,"prefix":"","firstName":"Zehui","middleName":"","lastName":"Zhong","suffix":""},{"id":438764208,"identity":"f7baa12d-3978-4931-b2fc-ea43e3fe076c","order_by":2,"name":"Huaxian Wei","email":"data:image/png;base64,iVBORw0KGgoAAAANSUhEUgAAAZAAAAAyAQMAAABI0h/eAAAABlBMVEX///8AAABVwtN+AAAACXBIWXMAAA7EAAAOxAGVKw4bAAAAsklEQVRIiWNgGAWjYBACAxCRUAHhSJCg5QxENQlaGNtI0WIukWP44OG8ujqDA8wHb/Mw2OUR1GLZc8bYIHHbYQmDA2zJ1jwMycWEHXa8d5tE4rYDQC08ZtI8DAcSGwhqOcy7/UfinDqgFv5vRGoB2sKQ2MAMsoWNSC1nzn+WSDh2WHLmYTZjyzkGyURouZGW+PFHTR0/3/HmhzfeVNgR1oIAzGATiFc/CkbBKBgFowAPAADb1Dn2R3UlowAAAABJRU5ErkJggg==","orcid":"","institution":"Shantou University","correspondingAuthor":true,"prefix":"","firstName":"Huaxian","middleName":"","lastName":"Wei","suffix":""},{"id":438764209,"identity":"c7e1953b-8c17-43ab-b7ca-f44dd113313c","order_by":3,"name":"Xiaodong Niu","email":"","orcid":"","institution":"Shantou University","correspondingAuthor":false,"prefix":"","firstName":"Xiaodong","middleName":"","lastName":"Niu","suffix":""}],"badges":[],"createdAt":"2025-03-15 05:23:12","currentVersionCode":1,"declarations":"","doi":"10.21203/rs.3.rs-6230559/v1","doiUrl":"https://doi.org/10.21203/rs.3.rs-6230559/v1","draftVersion":[],"editorialEvents":[{"content":"https://doi.org/10.1007/s12213-025-00191-6","type":"published","date":"2025-08-04T15:58:02+00:00"}],"editorialNote":"","failedWorkflow":false,"files":[{"id":88814201,"identity":"72515794-72b2-46e4-9986-1d6a22d177d3","added_by":"auto","created_at":"2025-08-11 16:08:23","extension":"pdf","order_by":1,"title":"","display":"","copyAsset":false,"role":"manuscript-pdf","size":911972,"visible":true,"origin":"","legend":"","description":"","filename":"ETCstage20250315.pdf","url":"https://assets-eu.researchsquare.com/files/rs-6230559/v1_covered_b579ce17-a70f-4979-b989-f734a39048ed.pdf"},{"id":80391270,"identity":"332a74c4-00e0-495c-aae4-c13699dd5aac","added_by":"auto","created_at":"2025-04-11 11:20:55","extension":"pdf","order_by":0,"title":"","display":"","copyAsset":false,"role":"supplement","size":1307558,"visible":true,"origin":"","legend":"","description":"","filename":"ETCstage20250315.pdf","url":"https://assets-eu.researchsquare.com/files/rs-6230559/v1/b08703f50c7f606190812e18.pdf"}],"financialInterests":"No competing interests reported.","formattedTitle":"Development of XYZ Flexure Micro-positioning stages based on ETC type two-axis flexure hinges","fulltext":[],"fulltextSource":"","fullText":"","funders":[],"hasAdminPriorityOnWorkflow":false,"hasManuscriptDocX":false,"hasOptedInToPreprint":true,"hasPassedJournalQc":"","hasAnyPriority":false,"hideJournal":false,"highlight":"","institution":"","isAcceptedByJournal":true,"isAuthorSuppliedPdf":true,"isDeskRejected":"","isHiddenFromSearch":false,"isInQc":false,"isInWorkflow":false,"isPdf":true,"isPdfUpToDate":true,"isWithdrawnOrRetracted":false,"journal":{"display":true,"email":"[email protected]","identity":"journal-of-micro-and-bio-robotics","isNatureJournal":false,"hasQc":true,"allowDirectSubmit":false,"externalIdentity":"","sideBox":"Learn more about [Journal of Micro and Bio Robotics](https://www.springer.com/journal/12213)","snPcode":"12213","submissionUrl":"https://submission.springernature.com/new-submission/12213/3","title":"Journal of Micro and Bio Robotics","twitterHandle":"","acdcEnabled":true,"dfaEnabled":true,"editorialSystem":"stoa","reportingPortfolio":"Springer Hybrid","inReviewEnabled":true,"inReviewRevisionsEnabled":false},"keywords":"micro-positioning, flexure stage, XYZ, ETC flexure hinges","lastPublishedDoi":"10.21203/rs.3.rs-6230559/v1","lastPublishedDoiUrl":"https://doi.org/10.21203/rs.3.rs-6230559/v1","license":{"name":"CC BY 4.0","url":"https://creativecommons.org/licenses/by/4.0/"},"manuscriptAbstract":"\u003cp\u003eThe development of flexure-based XYZ micro-positioning stages incorporating a novel type of flexure hinges with elliptical transverse cross-sections (ETC) is presented. 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