[Health of women after conservative and radical operations on the uterus and adnexa].

In: ISSN:0097-966X · 1978 · pp. 47–51 · W2416882374
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Abstract

For a thin film (<1 µm) encapsulation stack consisting of only 3 plasma deposited silicon nitride layers separated by a thin (<100 nm) organic layer, a water permeation rate of below 10–5 g/m2 per day at 50 °C and 50% rH has been measured using the Ca test. PLED lifetimes of over 500 hours at 60 °C and 90% rH have been reached locally. While the Ca test indicates that pinhole free encapsulation is possible, edge and particle related defects still forecast a challenge for device encapsulation.

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last seen: 2026-06-10T17:14:06.276822+00:00
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