Enhanced Contact Performance of High-Brightness Micro- LEDs via ITO/Al Anode Stack and Annealing Process

Enhanced Contact Performance of High-Brightness Micro- LEDs via ITO/Al Anode Stack and Annealing Process | Research Square window.SnipcartSettings = { analytics: { enabled: false } }; (function() { var accessVector = localStorage.getItem('access_vector') || ''; window.dataLayer = window.dataLayer || []; if (accessVector) { window.dataLayer.push({ user: { profile: { profileInfo: { snid: accessVector } } } }); } })(); (function(w,d,s,l,i){w[l]=w[l]||[];w[l].push({'gtm.start':new Date().getTime(),event:'gtm.js'});var f=d.getElementsByTagName(s)[0],j=d.createElement(s),dl=l!='dataLayer'?'&l='+l:'';j.async=true;j.src='https://www.googletagmanager.com/gtm.js?id='+i+dl;f.parentNode.insertBefore(j,f);})(window,document,'script','dataLayer','GTM-K279D39R'); Browse Preprints In Review Journals COVID-19 Preprints AJE Video Bytes Research Tools Research Promotion AJE Professional Editing AJE Rubriq About Preprint Platform In Review Editorial Policies Our Team Advisory Board Help Center Sign In Submit a Preprint Cite Share Download PDF Article Enhanced Contact Performance of High-Brightness Micro- LEDs via ITO/Al Anode Stack and Annealing Process Zeyang Meng, Chaoyu Lu, Guanghua Wang, Sibo Gao, Feng Deng, Jie Zhang, and 2 more This is a preprint; it has not been peer reviewed by a journal. https://doi.org/ 10.21203/rs.3.rs-4021522/v1 This work is licensed under a CC BY 4.0 License Status: Under Review Version 1 posted 12 You are reading this latest preprint version Abstract Micro-light-emitting diodes (Micro-LEDs) are a new type of display device based on the third-generation semiconductor gallium nitride (GaN) material which stands out for its high luminous efficiency, elevated brightness, short response times, and high reliability. The contact between anode layers and P-GaN is one of the keys to improving the performance of the devices. This study investigates the impact of electrode structure design and optimized annealing conditions on the anode contact performance of devices. The Micro-LED device with the size of 9.1μm whose electrode structure is ITO/Ti/Al/Ni/Cr/Pt/Au (100/50/350/100/500/500/5000Å) exhibits a significant improvement in contact performance after annealing under the Ar gas atmosphere at 500° C for 5 minutes. The optimized device exhibited a current of 10.9mA and a brightness of 298628cd/m2 under 5V. Physical sciences/Materials science Physical sciences/Materials science/Materials for devices Micro-LEDs Anode Contact Electrode Structure Design Full Text Additional Declarations No competing interests reported. Supplementary Files SupplementaryInformation.pdf Cite Share Download PDF Status: Under Review Version 1 posted Editorial decision: Revision requested 06 May, 2024 Reviews received at journal 19 Apr, 2024 Reviews received at journal 14 Apr, 2024 Reviews received at journal 11 Apr, 2024 Reviewers agreed at journal 07 Apr, 2024 Reviewers agreed at journal 04 Apr, 2024 Reviewers agreed at journal 01 Apr, 2024 Reviewers invited by journal 01 Apr, 2024 Editor assigned by journal 20 Mar, 2024 Editor invited by journal 20 Mar, 2024 Submission checks completed at journal 20 Mar, 2024 First submitted to journal 06 Mar, 2024 You are reading this latest preprint version Research Square lets you share your work early, gain feedback from the community, and start making changes to your manuscript prior to peer review in a journal. As a division of Research Square Company, we’re committed to making research communication faster, fairer, and more useful. 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Also discoverable on Platform About Our Team In Review Editorial Policies Advisory Board Help Center Resources Author Services Accessibility API Access RSS feed Manage Cookie Preferences © Research Square 2026 | ISSN 2693-5015 (online) Privacy Policy Terms of Service Do Not Sell My Personal Information {"props":{"pageProps":{"initialData":{"identity":"rs-4021522","acceptedTermsAndConditions":true,"allowDirectSubmit":false,"archivedVersions":[],"articleType":"Article","associatedPublications":[],"authors":[{"id":282219848,"identity":"4c754e07-e964-49fb-8266-493ae90101db","order_by":0,"name":"Zeyang Meng","email":"","orcid":"","institution":"Yunnan University","correspondingAuthor":false,"prefix":"","firstName":"Zeyang","middleName":"","lastName":"Meng","suffix":""},{"id":282219849,"identity":"87e06c10-6ba5-40d0-9f48-2402e0a394cd","order_by":1,"name":"Chaoyu Lu","email":"","orcid":"","institution":"Yunnan Olightek Opto-electronic Technology 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