Next-Generation Superlubric Microvalves for Flexible Robotics: Enhancing Fluid Control with Zero Leakage, Ultralong Life, and Intrinsic Sensing Capability

Next-Generation Superlubric Microvalves for Flexible Robotics: Enhancing Fluid Control with Zero Leakage, Ultralong Life, and Intrinsic Sensing Capability | Research Square window.SnipcartSettings = { analytics: { enabled: false } }; (function() { var accessVector = localStorage.getItem('access_vector') || ''; window.dataLayer = window.dataLayer || []; if (accessVector) { window.dataLayer.push({ user: { profile: { profileInfo: { snid: accessVector } } } }); } })(); (function(w,d,s,l,i){w[l]=w[l]||[];w[l].push({'gtm.start':new Date().getTime(),event:'gtm.js'});var f=d.getElementsByTagName(s)[0],j=d.createElement(s),dl=l!='dataLayer'?'&l='+l:'';j.async=true;j.src='https://www.googletagmanager.com/gtm.js?id='+i+dl;f.parentNode.insertBefore(j,f);})(window,document,'script','dataLayer','GTM-K279D39R'); Browse Preprints In Review Journals COVID-19 Preprints AJE Video Bytes Research Tools Research Promotion AJE Professional Editing AJE Rubriq About Preprint Platform In Review Editorial Policies Our Team Advisory Board Help Center Sign In Submit a Preprint Cite Share Download PDF Article Next-Generation Superlubric Microvalves for Flexible Robotics: Enhancing Fluid Control with Zero Leakage, Ultralong Life, and Intrinsic Sensing Capability Jinhui Nie, Jie An, Yang Jiang, Xiaojian Xiang, Tao Jiang, Kai Wang, and 2 more This is a preprint; it has not been peer reviewed by a journal. https://doi.org/ 10.21203/rs.3.rs-4828033/v1 This work is licensed under a CC BY 4.0 License Status: Posted Version 1 posted You are reading this latest preprint version Abstract Valves are critical components in Advanced Fluid Control Systems (AFCS), playing a vital role in applications like soft robotics and medical devices. Traditional mechanical valves usually struggle with issues such as leakage and wear, reducing the efficiency and precision of air-driven systems. This study introduces a superlubricity micro valve (SLMV) that excels in performance and has self-sensing capabilities. The SLMV demonstrated zero helium leakage at pressures over 0.9 MPa and remained defect-free after one million collision and 5000 reciprocating sliding friction testing. Additionally, the valve features self-powered sensing for detecting its open state, enhancing feedback control. The AFCS equipped with SLMVs will significantly enhance the flexibility and functionality of pneumatic flexible robots, and facilitate the development of implantable drug delivery devices that are more durable, compact, safer, and more reliable. Physical sciences/Materials science/Materials for devices/Fluidics Physical sciences/Engineering/Electrical and electronic engineering Physical sciences/Materials science/Nanoscale materials/Two-dimensional materials Full Text Additional Declarations There is NO Competing Interest. Supplementary Files Supportinginformation.docx Cite Share Download PDF Status: Posted Version 1 posted You are reading this latest preprint version Research Square lets you share your work early, gain feedback from the community, and start making changes to your manuscript prior to peer review in a journal. As a division of Research Square Company, we’re committed to making research communication faster, fairer, and more useful. We do this by developing innovative software and high quality services for the global research community. Our growing team is made up of researchers and industry professionals working together to solve the most critical problems facing scientific publishing. Also discoverable on Platform About Our Team In Review Editorial Policies Advisory Board Help Center Resources Author Services Accessibility API Access RSS feed Manage Cookie Preferences © Research Square 2026 | ISSN 2693-5015 (online) Privacy Policy Terms of Service Do Not Sell My Personal Information {"props":{"pageProps":{"initialData":{"identity":"rs-4828033","acceptedTermsAndConditions":true,"allowDirectSubmit":true,"archivedVersions":[],"articleType":"Article","associatedPublications":[],"authors":[{"id":339604517,"identity":"be014728-5516-4344-b3bc-f0c8d65eb961","order_by":0,"name":"Jinhui Nie","email":"data:image/png;base64,iVBORw0KGgoAAAANSUhEUgAAAZAAAAAyAQMAAABI0h/eAAAABlBMVEX///8AAABVwtN+AAAACXBIWXMAAA7EAAAOxAGVKw4bAAAA9ElEQVRIiWNgGAWjYDACZgYGY4aK/wxsDCBEvJYzEqRoAelibJMA0URqMWdnPlBcOE/Cnk+6/dpjnhoGe/kG5mMfv+DRYtnMlmA8c5tEYpvMmXJjnmMMiY0NbMmzZfBoMTjMY2DMu00igU0iJ02ah+1/AjMDjzGzBF4t/B+MeedI2EO0/GOwZyOshYfBmLdBAhgC6cekedsYGHuAWhg/4NXCZgD0AtAvEjlsknP7GBJnMLMlM+PRwWBw/vAzY54aCXv5GenPJN58A4ZYe/Nhxh/49ACjwwBC80BpoBXMPPi1MD+A0OwP4EKEbBkFo2AUjIKRBQCmvDtLxTPqHwAAAABJRU5ErkJggg==","orcid":"https://orcid.org/0000-0002-4356-3378","institution":"Institute of Superlubricity Technology, Research Institute of Tsinghua University in Shenzhen","correspondingAuthor":true,"prefix":"","firstName":"Jinhui","middleName":"","lastName":"Nie","suffix":""},{"id":339604518,"identity":"16471a6f-0fda-4173-b055-44a60eeb0717","order_by":1,"name":"Jie An","email":"","orcid":"","institution":"Department of Engineering Mechanics, School of Aerospace Engineering, Tsinghua University","correspondingAuthor":false,"prefix":"","firstName":"Jie","middleName":"","lastName":"An","suffix":""},{"id":339604519,"identity":"b67d5d19-abd3-46ff-aca1-d05e71728e0c","order_by":2,"name":"Yang Jiang","email":"","orcid":"","institution":"Beijing Institute of Nanoenergy and Nanosystems, Chinese Academy of Sciences","correspondingAuthor":false,"prefix":"","firstName":"Yang","middleName":"","lastName":"Jiang","suffix":""},{"id":339604520,"identity":"d9fd5764-b00d-40f8-832e-64cf0dfa23f2","order_by":3,"name":"Xiaojian Xiang","email":"","orcid":"","institution":"Institute of Superlubricity Technology, Research Institute of Tsinghua University in Shenzhen","correspondingAuthor":false,"prefix":"","firstName":"Xiaojian","middleName":"","lastName":"Xiang","suffix":""},{"id":339604521,"identity":"c2803be6-8612-4490-8f4a-16bc75e9ff9c","order_by":4,"name":"Tao Jiang","email":"","orcid":"https://orcid.org/0000-0001-7941-7703","institution":"Beijing Institute of Nanoenergy and Nanosystems","correspondingAuthor":false,"prefix":"","firstName":"Tao","middleName":"","lastName":"Jiang","suffix":""},{"id":339604522,"identity":"cd344ed5-b4dc-495b-a252-810bc285c973","order_by":5,"name":"Kai Wang","email":"","orcid":"https://orcid.org/0000-0003-2365-3402","institution":"School of Internet of Things, Nanjing University of Posts and Telecommunications","correspondingAuthor":false,"prefix":"","firstName":"Kai","middleName":"","lastName":"Wang","suffix":""},{"id":339604523,"identity":"d0f0633f-7905-41f9-9f8d-b713f0e8f964","order_by":6,"name":"Zewei Ren","email":"","orcid":"","institution":"Xidian University","correspondingAuthor":false,"prefix":"","firstName":"Zewei","middleName":"","lastName":"Ren","suffix":""},{"id":339604524,"identity":"ca92a99b-c6c4-433d-9c60-b9c324fc8a89","order_by":7,"name":"Zipei Tan","email":"","orcid":"","institution":"Tsinghua University","correspondingAuthor":false,"prefix":"","firstName":"Zipei","middleName":"","lastName":"Tan","suffix":""}],"badges":[],"createdAt":"2024-07-30 10:40:11","currentVersionCode":1,"declarations":"","doi":"10.21203/rs.3.rs-4828033/v1","doiUrl":"https://doi.org/10.21203/rs.3.rs-4828033/v1","draftVersion":[],"editorialEvents":[],"editorialNote":"","failedWorkflow":false,"files":[{"id":65339073,"identity":"6373c555-036d-42c9-9b95-773ee66e0082","added_by":"auto","created_at":"2024-09-26 08:39:25","extension":"pdf","order_by":1,"title":"","display":"","copyAsset":false,"role":"manuscript-pdf","size":1156892,"visible":true,"origin":"","legend":"","description":"","filename":"Manuscript.pdf","url":"https://assets-eu.researchsquare.com/files/rs-4828033/v1_covered_a69b445d-af7a-434a-a8d7-aaf9b56eccb9.pdf"},{"id":62413829,"identity":"184405f6-1919-4a04-83d7-91ff12174c16","added_by":"auto","created_at":"2024-08-14 01:35:25","extension":"docx","order_by":8,"title":"","display":"","copyAsset":false,"role":"supplement","size":5024054,"visible":true,"origin":"","legend":"","description":"","filename":"Supportinginformation.docx","url":"https://assets-eu.researchsquare.com/files/rs-4828033/v1/37e531df909db7c142910a63.docx"}],"financialInterests":"There is \u003cb\u003eNO\u003c/b\u003e Competing Interest.","formattedTitle":"Next-Generation Superlubric Microvalves for Flexible Robotics: Enhancing Fluid Control with Zero Leakage, Ultralong Life, and Intrinsic Sensing Capability","fulltext":[],"fulltextSource":"","fullText":"","funders":[],"hasAdminPriorityOnWorkflow":false,"hasManuscriptDocX":false,"hasOptedInToPreprint":true,"hasPassedJournalQc":"","hasAnyPriority":true,"hideJournal":true,"highlight":"","institution":"","isAcceptedByJournal":false,"isAuthorSuppliedPdf":true,"isDeskRejected":"","isHiddenFromSearch":false,"isInQc":false,"isInWorkflow":false,"isPdf":true,"isPdfUpToDate":true,"isWithdrawnOrRetracted":false,"journal":{"display":true,"email":"[email protected]","identity":"researchsquare","isNatureJournal":false,"hasQc":true,"allowDirectSubmit":true,"externalIdentity":"","sideBox":"","snPcode":"","submissionUrl":"/submission","title":"Research Square","twitterHandle":"researchsquare","acdcEnabled":true,"dfaEnabled":false,"editorialSystem":"","reportingPortfolio":"","inReviewEnabled":false,"inReviewRevisionsEnabled":true},"keywords":"","lastPublishedDoi":"10.21203/rs.3.rs-4828033/v1","lastPublishedDoiUrl":"https://doi.org/10.21203/rs.3.rs-4828033/v1","license":{"name":"CC BY 4.0","url":"https://creativecommons.org/licenses/by/4.0/"},"manuscriptAbstract":"\u003cp\u003eValves are critical components in Advanced Fluid Control Systems (AFCS), playing a vital role in applications like soft robotics and medical devices. Traditional mechanical valves usually struggle with issues such as leakage and wear, reducing the efficiency and precision of air-driven systems. This study introduces a superlubricity micro valve (SLMV) that excels in performance and has self-sensing capabilities. The SLMV demonstrated zero helium leakage at pressures over 0.9 MPa and remained defect-free after one million collision and 5000 reciprocating sliding friction testing. Additionally, the valve features self-powered sensing for detecting its open state, enhancing feedback control. The AFCS equipped with SLMVs will significantly enhance the flexibility and functionality of pneumatic flexible robots, and facilitate the development of implantable drug delivery devices that are more durable, compact, safer, and more reliable.\u003c/p\u003e","manuscriptTitle":"Next-Generation Superlubric Microvalves for Flexible Robotics: Enhancing Fluid Control with Zero Leakage, Ultralong Life, and Intrinsic Sensing Capability","msid":"","msnumber":"","nonDraftVersions":[{"code":1,"date":"2024-08-14 01:27:20","doi":"10.21203/rs.3.rs-4828033/v1","editorialEvents":[{"type":"communityComments","content":0}],"status":"published","journal":{"display":true,"email":"[email protected]","identity":"researchsquare","isNatureJournal":false,"hasQc":true,"allowDirectSubmit":true,"externalIdentity":"","sideBox":"","snPcode":"","submissionUrl":"/submission","title":"Research Square","twitterHandle":"researchsquare","acdcEnabled":true,"dfaEnabled":false,"editorialSystem":"","reportingPortfolio":"","inReviewEnabled":false,"inReviewRevisionsEnabled":true}}],"origin":"","ownerIdentity":"32dc4edf-a4d6-4b62-9d09-aab17b2fdd04","owner":[],"postedDate":"August 14th, 2024","published":true,"recentEditorialEvents":[],"rejectedJournal":[],"revision":"","amendment":"","status":"posted","subjectAreas":[{"id":35976809,"name":"Physical sciences/Materials science/Materials for devices/Fluidics"},{"id":35976810,"name":"Physical sciences/Engineering/Electrical and electronic engineering"},{"id":35976811,"name":"Physical sciences/Materials science/Nanoscale materials/Two-dimensional materials"}],"tags":[],"updatedAt":"2024-09-26T08:31:16+00:00","versionOfRecord":[],"versionCreatedAt":"2024-08-14 01:27:20","video":"","vorDoi":"","vorDoiUrl":"","workflowStages":[]},"version":"v1","identity":"rs-4828033","journalConfig":"researchsquare"},"__N_SSP":true},"page":"/article/[identity]/[[...version]]","query":{"redirect":"/article/rs-4828033","identity":"rs-4828033","version":["v1"]},"buildId":"qtupq5eGEP_6zYnWcrvyt","isFallback":false,"isExperimentalCompile":false,"dynamicIds":[84888],"gssp":true,"scriptLoader":[]}