Ta/TaN Multilayer Thin Film Coatings with HiPIMS Technique for Tribological Applications

The aim of this work is to synthesis and characterize the Ta/TaN multilayer thin film coatings on 52100 tool steel under three different levels of N2 gas flow rate. The High Power Impulse Magnetron Sputtering (HiPIMS) technique was used for the deposition of Ta/TaN thin film multilayers on the substrate. Microstructure, coating thickness, composition, hardness and tribological properties of Ta/TaN multilayer coatings were characterized using scanning electron microscopy (SEM), Energy-dispersive X-ray spectroscopy (EDS), X-ray diffraction (XRD), microhardness tester and pin-on-disc tester, respectively. Adhesion property was evaluated via scratch testing of the thin film thin film layer. The lowest coefficient of friction was observed with the thin film layer of higher N2 gas flow rate due to the highest adhesion value of the coating on the surface. The obtained results on hardness, adhesion and coefficient of friction properties demonstrated that this Ta/TaN multilayer thin film coating can be used for tribological applications.