Fire Smoke Propagation in Integrated Circuit Manufacturing Facilities under Coupling Effects of Mechanical Smoke Exhaust and Clean Air Supply Systems

Fire Smoke Propagation in Integrated Circuit Manufacturing Facilities under Coupling Effects of Mechanical Smoke Exhaust and Clean Air Supply Systems | Research Square window.SnipcartSettings = { analytics: { enabled: false } }; (function() { var accessVector = localStorage.getItem('access_vector') || ''; window.dataLayer = window.dataLayer || []; if (accessVector) { window.dataLayer.push({ user: { profile: { profileInfo: { snid: accessVector } } } }); } })(); (function(w,d,s,l,i){w[l]=w[l]||[];w[l].push({'gtm.start':new Date().getTime(),event:'gtm.js'});var f=d.getElementsByTagName(s)[0],j=d.createElement(s),dl=l!='dataLayer'?'&l='+l:'';j.async=true;j.src='https://www.googletagmanager.com/gtm.js?id='+i+dl;f.parentNode.insertBefore(j,f);})(window,document,'script','dataLayer','GTM-K279D39R'); Browse Preprints In Review Journals COVID-19 Preprints AJE Video Bytes Research Tools Research Promotion AJE Professional Editing AJE Rubriq About Preprint Platform In Review Editorial Policies Our Team Advisory Board Help Center Sign In Submit a Preprint Cite Share Download PDF Research Article Fire Smoke Propagation in Integrated Circuit Manufacturing Facilities under Coupling Effects of Mechanical Smoke Exhaust and Clean Air Supply Systems Zhijian Zhang, Yaohua Hou, Sicheng Li, Ying Chen, Dejian Wu, Shuanghao Li This is a preprint; it has not been peer reviewed by a journal. https://doi.org/ 10.21203/rs.3.rs-8189927/v1 This work is licensed under a CC BY 4.0 License Status: Under Review Version 1 posted 7 You are reading this latest preprint version Abstract Integrated circuit (IC) manufacturing facilities, with their large spaces, high clearances, and unique vertical airflow structures, exhibit distinct fire smoke propagation mechanisms. This study employs Fire Dynamics Simulator (FDS) for numerical simulations based on experimental data from a cone calorimeter (CONE) and thermal property parameters from the Handbook of Plastics, Elastomers, and Composites. It investigates the coupled interaction between mechanical smoke exhaust and clean air supply systems under different operational sequences. Four scenarios were simulated to analyze smoke spread, temperature, CO concentration, and visibility in the vertically connected Cleanroom and Sub-Fab layers. Results indicate that delayed or continuous air supply introduces strong inertial forces, disrupting natural smoke stratification, destabilizing smoke in remote zones, and facilitating its descent into lower spaces, where localized accumulations of toxic gases form in corners. Although the global Richardson number (Ri>140) suggests buoyancy dominance, persistent airflow enhances local inertia, reducing the Smoke Stratification Index (SSI) to 0.003 in far-fire areas and generating corner CO peaks of 5×10 -4 mol/mol. A risk transfer mechanism is identified: while continuous air supply delays hazard development in the Cleanroom, it exacerbates toxic gas accumulation in the Sub-Fab and accelerates visibility loss, significantly shortening available safe egress time. These findings provide critical support for performance-based design and ventilation interlock optimization in semiconductor facilities. IC manufacturing facilities Fire smoke propagation CONE FDS Continuous clean air supply Full Text Additional Declarations No competing interests reported. Cite Share Download PDF Status: Under Review Version 1 posted Reviewers agreed at journal 27 Apr, 2026 Reviews received at journal 26 Feb, 2026 Reviewers agreed at journal 03 Feb, 2026 Reviewers invited by journal 03 Feb, 2026 Editor assigned by journal 24 Dec, 2025 Submission checks completed at journal 06 Dec, 2025 First submitted to journal 24 Nov, 2025 You are reading this latest preprint version Research Square lets you share your work early, gain feedback from the community, and start making changes to your manuscript prior to peer review in a journal. As a division of Research Square Company, we’re committed to making research communication faster, fairer, and more useful. We do this by developing innovative software and high quality services for the global research community. Our growing team is made up of researchers and industry professionals working together to solve the most critical problems facing scientific publishing. Also discoverable on Platform About Our Team In Review Editorial Policies Advisory Board Help Center Resources Author Services Accessibility API Access RSS feed Manage Cookie Preferences © Research Square 2026 | ISSN 2693-5015 (online) Privacy Policy Terms of Service Do Not Sell My Personal Information {"props":{"pageProps":{"initialData":{"identity":"rs-8189927","acceptedTermsAndConditions":true,"allowDirectSubmit":false,"archivedVersions":[],"articleType":"Research Article","associatedPublications":[],"authors":[{"id":585352372,"identity":"db4d3a95-8347-453b-a4c2-cd86b84e41f9","order_by":0,"name":"Zhijian Zhang","email":"","orcid":"","institution":"","correspondingAuthor":false,"prefix":"","firstName":"Zhijian","middleName":"","lastName":"Zhang","suffix":""},{"id":585352376,"identity":"611f7c9c-55b6-43f8-9fd9-dac885a2687c","order_by":1,"name":"Yaohua 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This study employs Fire Dynamics Simulator (FDS) for numerical simulations based on experimental data from a cone calorimeter (CONE) and thermal property parameters from the Handbook of Plastics, Elastomers, and Composites. It investigates the coupled interaction between mechanical smoke exhaust and clean air supply systems under different operational sequences. Four scenarios were simulated to analyze smoke spread, temperature, CO concentration, and visibility in the vertically connected Cleanroom and Sub-Fab layers. Results indicate that delayed or continuous air supply introduces strong inertial forces, disrupting natural smoke stratification, destabilizing smoke in remote zones, and facilitating its descent into lower spaces, where localized accumulations of toxic gases form in corners. Although the global Richardson number (Ri\u0026gt;140) suggests buoyancy dominance, persistent airflow enhances local inertia, reducing the Smoke Stratification Index (SSI) to 0.003 in far-fire areas and generating corner CO peaks of 5×10\u003csup\u003e-4\u003c/sup\u003e mol/mol. A risk transfer mechanism is identified: while continuous air supply delays hazard development in the Cleanroom, it exacerbates toxic gas accumulation in the Sub-Fab and accelerates visibility loss, significantly shortening available safe egress time. These findings provide critical support for performance-based design and ventilation interlock optimization in semiconductor facilities.\u003c/p\u003e","manuscriptTitle":"Fire Smoke Propagation in Integrated Circuit Manufacturing Facilities under Coupling Effects of Mechanical Smoke Exhaust and Clean Air Supply Systems","msid":"","msnumber":"","nonDraftVersions":[{"code":1,"date":"2026-02-05 10:40:51","doi":"10.21203/rs.3.rs-8189927/v1","editorialEvents":[{"type":"communityComments","content":0},{"type":"reviewerAgreed","content":"177712628015098951865049003730166977608","date":"2026-04-27T09:43:01+00:00","index":"hide","fulltext":""},{"type":"editorInvitedReview","content":"","date":"2026-02-26T09:38:32+00:00","index":"hide","fulltext":""},{"type":"reviewerAgreed","content":"168128700222749356267623016493908006789","date":"2026-02-04T01:34:27+00:00","index":"hide","fulltext":""},{"type":"reviewersInvited","content":"","date":"2026-02-03T09:52:19+00:00","index":"","fulltext":""},{"type":"editorAssigned","content":"","date":"2025-12-24T07:36:53+00:00","index":"","fulltext":""},{"type":"checksComplete","content":"","date":"2025-12-06T08:02:05+00:00","index":"","fulltext":""},{"type":"submitted","content":"Fire Technology","date":"2025-11-24T06:26:27+00:00","index":"","fulltext":""}],"status":"published","journal":{"display":true,"email":"[email protected]","identity":"fire-technology","isNatureJournal":false,"hasQc":true,"allowDirectSubmit":false,"externalIdentity":"fire","sideBox":"Learn more about [Fire Technology](http://link.springer.com/journal/10694)","snPcode":"10694","submissionUrl":"https://submission.springernature.com/new-submission/10694/3","title":"Fire Technology","twitterHandle":"","acdcEnabled":true,"dfaEnabled":true,"editorialSystem":"stoa","reportingPortfolio":"Springer Hybrid","inReviewEnabled":true,"inReviewRevisionsEnabled":false}}],"origin":"","ownerIdentity":"5ee03f55-8135-4f6f-bb63-44e4fc1e98cb","owner":[],"postedDate":"February 5th, 2026","published":true,"recentEditorialEvents":[],"rejectedJournal":[],"revision":"","amendment":"","status":"under-review","subjectAreas":[],"tags":[],"updatedAt":"2026-02-05T10:40:52+00:00","versionOfRecord":[],"versionCreatedAt":"2026-02-05 10:40:51","video":"","vorDoi":"","vorDoiUrl":"","workflowStages":[]},"version":"v1","identity":"rs-8189927","journalConfig":"researchsquare"},"__N_SSP":true},"page":"/article/[identity]/[[...version]]","query":{"redirect":"/article/rs-8189927","identity":"rs-8189927","version":["v1"]},"buildId":"XKTyCvWXoU3ODBz1xrDgd","isFallback":false,"isExperimentalCompile":false,"dynamicIds":[84888],"gssp":true,"scriptLoader":[]}