Novel miniaturized silicon-based capacitive six-axis force/torque sensor with large range, high sensitivity, and low crosstalk

Novel miniaturized silicon-based capacitive six-axis force/torque sensor with large range, high sensitivity, and low crosstalk | Research Square window.SnipcartSettings = { analytics: { enabled: false } }; (function() { var accessVector = localStorage.getItem('access_vector') || ''; window.dataLayer = window.dataLayer || []; if (accessVector) { window.dataLayer.push({ user: { profile: { profileInfo: { snid: accessVector } } } }); } })(); (function(w,d,s,l,i){w[l]=w[l]||[];w[l].push({'gtm.start':new Date().getTime(),event:'gtm.js'});var f=d.getElementsByTagName(s)[0],j=d.createElement(s),dl=l!='dataLayer'?'&l='+l:'';j.async=true;j.src='https://www.googletagmanager.com/gtm.js?id='+i+dl;f.parentNode.insertBefore(j,f);})(window,document,'script','dataLayer','GTM-K279D39R'); Browse Preprints In Review Journals COVID-19 Preprints AJE Video Bytes Research Tools Research Promotion AJE Professional Editing AJE Rubriq About Preprint Platform In Review Editorial Policies Our Team Advisory Board Help Center Sign In Submit a Preprint Cite Share Download PDF Article Novel miniaturized silicon-based capacitive six-axis force/torque sensor with large range, high sensitivity, and low crosstalk Xiangguang Han, Renjie Tan, Daixuan Wu, Yong Xia, Linya Huang, and 7 more This is a preprint; it has not been peer reviewed by a journal. https://doi.org/ 10.21203/rs.3.rs-4738964/v1 This work is licensed under a CC BY 4.0 License Status: Under Review Version 1 posted 11 You are reading this latest preprint version Abstract Miniaturized six-axis force/torque sensors have potential applications in robotic tactile sensing, minimally invasive surgery, and other narrow operating spaces, where currently available commercial sensors cannot meet the requirements because of their large size. In this study, a silicon-based capacitive six-axis force/torque sensing chip with a small size of 9.3 × 9.3 × 0.98 mm was designed, fabricated, and tested. A sandwich decoupling structure with a symmetrical layered arrangement of S-shaped beams, comb capacitors, and parallel capacitors was employed. A decoupling theory considering eccentricity and nonlinear effects was derived to realize low axial crosstalk. The proposed S-shaped beams achieved a large measurement range through stress optimization. The results of a coupled multiphysics field finite-element simulation agreed well with those of theoretical analyses. The test results show that the proposed sensing chip can detect six-axis force/torque separately, with almost all crosstalk errors less than 6%FS. Its force and torque measurement ranges can reach as much as 2.5 N and 12.5 N·mm, respectively. The sensing chip also has high sensitivities of 0.52 pF/N and 0.27 pF/(N·mm) for force and torque detection, respectively. Physical sciences/Engineering/Electrical and electronic engineering Physical sciences/Nanoscience and technology/Nanoscale devices/Sensors Full Text Additional Declarations (Not answered) Cite Share Download PDF Status: Under Review Version 1 posted Editorial decision: revise 08 Sep, 2024 Review # 1 received at journal 31 Aug, 2024 Reviewer # 3 agreed at journal 21 Aug, 2024 Review # 2 received at journal 08 Aug, 2024 Reviewer # 2 agreed at journal 07 Aug, 2024 Reviewer # 1 agreed at journal 07 Aug, 2024 Reviewers invited by journal 24 Jul, 2024 Submission checks completed at journal 18 Jul, 2024 First submitted to journal 15 Jul, 2024 Unknown event 15 Jul, 2024 Editor assigned by journal 14 Jul, 2024 You are reading this latest preprint version Research Square lets you share your work early, gain feedback from the community, and start making changes to your manuscript prior to peer review in a journal. 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Also discoverable on Platform About Our Team In Review Editorial Policies Advisory Board Help Center Resources Author Services Accessibility API Access RSS feed Manage Cookie Preferences © Research Square 2026 | ISSN 2693-5015 (online) Privacy Policy Terms of Service Do Not Sell My Personal Information {"props":{"pageProps":{"initialData":{"identity":"rs-4738964","acceptedTermsAndConditions":true,"allowDirectSubmit":false,"archivedVersions":[],"articleType":"Article","associatedPublications":[],"authors":[{"id":331284119,"identity":"ce95015d-f55c-4b3a-ae99-8498d37a8c4f","order_by":0,"name":"Xiangguang 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