Material-specific three-dimensional printing of electrostatic chuck components via digital light processing: Integration of Al2O3 and BaTiO3 as dual materials for performance optimization

Material-specific three-dimensional printing of electrostatic chuck components via digital light processing: Integration of Al2O3 and BaTiO3 as dual materials for performance optimization | Research Square window.SnipcartSettings = { analytics: { enabled: false } }; (function() { var accessVector = localStorage.getItem('access_vector') || ''; window.dataLayer = window.dataLayer || []; if (accessVector) { window.dataLayer.push({ user: { profile: { profileInfo: { snid: accessVector } } } }); } })(); (function(w,d,s,l,i){w[l]=w[l]||[];w[l].push({'gtm.start':new Date().getTime(),event:'gtm.js'});var f=d.getElementsByTagName(s)[0],j=d.createElement(s),dl=l!='dataLayer'?'&l='+l:'';j.async=true;j.src='https://www.googletagmanager.com/gtm.js?id='+i+dl;f.parentNode.insertBefore(j,f);})(window,document,'script','dataLayer','GTM-K279D39R'); Browse Preprints In Review Journals COVID-19 Preprints AJE Video Bytes Research Tools Research Promotion AJE Professional Editing AJE Rubriq About Preprint Platform In Review Editorial Policies Our Team Advisory Board Help Center Sign In Submit a Preprint Cite Share Download PDF Research Article Material-specific three-dimensional printing of electrostatic chuck components via digital light processing: Integration of Al2O3 and BaTiO3 as dual materials for performance optimization Yujin Kim, Jae-Hyuk Park, Jongwoo Lim, Sukeun Yoon, Jihoon Kim This is a preprint; it has not been peer reviewed by a journal. https://doi.org/ 10.21203/rs.3.rs-7645102/v1 This work is licensed under a CC BY 4.0 License Status: Published Journal Publication published 15 Mar, 2026 Read the published version in Advanced Composites and Hybrid Materials → Version 1 posted 9 You are reading this latest preprint version Abstract Electrostatic chucks (ESCs) are critical components in semiconductor and display manufacturing, providing contact handling of delicate substrates. However, optimizing their performance requires precise control of material properties and structural design, particularly the dielectric layer and ESC body. In this study, we fabricated ESCs using a dual-material design, in which the dielectric layers were printed from BaTiO 3 -resin inks, while the bodies were printed using Al 2 O 3 -resin ink via digital light-processing (DLP) three-dimensional printing. The rheological properties of both Al 2 O 3 - and BaTiO 3 -resin inks were systematically characterized to determine their suitability for DLP printing, and the dielectric properties of the corresponding cured composites were evaluated to guide ESC performance optimization. ESC bodies and dielectric layers could be printed using Al 2 O 3 -resin ink reliably. The ESC body exhibited high breakdown strength, whereas the dielectric layers exhibited high dielectric constants. The fabricated ESCs exhibited excellent structural fidelity and enabled the reliable integration of internal electrodes via liquid-metal injection. Finite element analysis simulations indicated that the dielectric constant primarily governed the chucking force and was highly localized near the edges of the embedded electrodes. Experimental results confirmed that ESCs with BaTiO 3 -based dielectrics consistently outperformed those with Al 2 O 3 -based dielectrics. This finding is consistent with the simulation results. Overall, the combination of material selection, additive manufacturing, and electrostatic modeling provides a comprehensive and robust strategy for developing next-generation ESCs with tunable performance and complex geometries. These ESCs are suitable for advanced precision handling in the semiconductor and display industries. Electrostatic chuck Digital light processing Finite element analysis Barium titanate (BaTiO3) Alumina (Al2O3) Full Text Additional Declarations No competing interests reported. Supplementary Files SupplementaryInformationYujin.docx Cite Share Download PDF Status: Published Journal Publication published 15 Mar, 2026 Read the published version in Advanced Composites and Hybrid Materials → Version 1 posted Editorial decision: Revision requested 30 Nov, 2025 Reviews received at journal 24 Nov, 2025 Reviews received at journal 11 Nov, 2025 Reviewers agreed at journal 31 Oct, 2025 Reviewers agreed at journal 31 Oct, 2025 Reviewers invited by journal 30 Oct, 2025 Editor assigned by journal 14 Oct, 2025 Submission checks completed at journal 19 Sep, 2025 First submitted to journal 18 Sep, 2025 You are reading this latest preprint version Research Square lets you share your work early, gain feedback from the community, and start making changes to your manuscript prior to peer review in a journal. As a division of Research Square Company, we’re committed to making research communication faster, fairer, and more useful. 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Also discoverable on Platform About Our Team In Review Editorial Policies Advisory Board Help Center Resources Author Services Accessibility API Access RSS feed Manage Cookie Preferences © Research Square 2026 | ISSN 2693-5015 (online) Privacy Policy Terms of Service Do Not Sell My Personal Information {"props":{"pageProps":{"initialData":{"identity":"rs-7645102","acceptedTermsAndConditions":true,"allowDirectSubmit":false,"archivedVersions":[],"articleType":"Research Article","associatedPublications":[],"authors":[{"id":542309873,"identity":"7e0577a5-a90f-424e-b96b-6703c6292f37","order_by":0,"name":"Yujin Kim","email":"","orcid":"","institution":"Kongju National University","correspondingAuthor":false,"prefix":"","firstName":"Yujin","middleName":"","lastName":"Kim","suffix":""},{"id":542309874,"identity":"c7865e6d-7ab6-4aec-ad32-945702aca93d","order_by":1,"name":"Jae-Hyuk Park","email":"","orcid":"","institution":"Sungkyunkwan 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optimization","fulltext":[],"fulltextSource":"","fullText":"","funders":[],"hasAdminPriorityOnWorkflow":false,"hasManuscriptDocX":false,"hasOptedInToPreprint":true,"hasPassedJournalQc":"","hasAnyPriority":false,"hideJournal":false,"highlight":"","institution":"","isAcceptedByJournal":true,"isAuthorSuppliedPdf":true,"isDeskRejected":"","isHiddenFromSearch":false,"isInQc":false,"isInWorkflow":false,"isPdf":true,"isPdfUpToDate":true,"isWithdrawnOrRetracted":false,"journal":{"display":true,"email":"[email protected]","identity":"advanced-composites-and-hybrid-materials","isNatureJournal":false,"hasQc":true,"allowDirectSubmit":false,"externalIdentity":"achm","sideBox":"Learn more about [Advanced Composites and Hybrid Materials](https://link.springer.com/journal/42114)","snPcode":"42114","submissionUrl":"https://submission.nature.com/new-submission/42114/3","title":"Advanced Composites and Hybrid Materials","twitterHandle":"","acdcEnabled":true,"dfaEnabled":true,"editorialSystem":"em","reportingPortfolio":"Springer Hybrid","inReviewEnabled":true,"inReviewRevisionsEnabled":false},"keywords":"Electrostatic chuck, Digital light processing, Finite element analysis, Barium titanate (BaTiO3), Alumina (Al2O3)","lastPublishedDoi":"10.21203/rs.3.rs-7645102/v1","lastPublishedDoiUrl":"https://doi.org/10.21203/rs.3.rs-7645102/v1","license":{"name":"CC BY 4.0","url":"https://creativecommons.org/licenses/by/4.0/"},"manuscriptAbstract":"\u003cp\u003eElectrostatic chucks (ESCs) are critical components in semiconductor and display manufacturing, providing contact handling of delicate substrates. However, optimizing their performance requires precise control of material properties and structural design, particularly the dielectric layer and ESC body. In this study, we fabricated ESCs using a dual-material design, in which the dielectric layers were printed from BaTiO\u003csub\u003e3\u003c/sub\u003e-resin inks, while the bodies were printed using Al\u003csub\u003e2\u003c/sub\u003eO\u003csub\u003e3\u003c/sub\u003e-resin ink via digital light-processing (DLP) three-dimensional printing. The rheological properties of both Al\u003csub\u003e2\u003c/sub\u003eO\u003csub\u003e3\u003c/sub\u003e- and BaTiO\u003csub\u003e3\u003c/sub\u003e-resin inks were systematically characterized to determine their suitability for DLP printing, and the dielectric properties of the corresponding cured composites were evaluated to guide ESC performance optimization. ESC bodies and dielectric layers could be printed using Al\u003csub\u003e2\u003c/sub\u003eO\u003csub\u003e3\u003c/sub\u003e-resin ink reliably. The ESC body exhibited high breakdown strength, whereas the dielectric layers exhibited high dielectric constants. The fabricated ESCs exhibited excellent structural fidelity and enabled the reliable integration of internal electrodes via liquid-metal injection. Finite element analysis simulations indicated that the dielectric constant primarily governed the chucking force and was highly localized near the edges of the embedded electrodes. Experimental results confirmed that ESCs with BaTiO\u003csub\u003e3\u003c/sub\u003e-based dielectrics consistently outperformed those with Al\u003csub\u003e2\u003c/sub\u003eO\u003csub\u003e3\u003c/sub\u003e-based dielectrics. This finding is consistent with the simulation results. Overall, the combination of material selection, additive manufacturing, and electrostatic modeling provides a comprehensive and robust strategy for developing next-generation ESCs with tunable performance and complex geometries. These ESCs are suitable for advanced precision handling in the semiconductor and display industries.\u003c/p\u003e","manuscriptTitle":"Material-specific three-dimensional printing of electrostatic chuck components via digital light processing: Integration of Al2O3 and BaTiO3 as dual materials for performance optimization","msid":"","msnumber":"","nonDraftVersions":[{"code":1,"date":"2025-11-11 19:07:13","doi":"10.21203/rs.3.rs-7645102/v1","editorialEvents":[{"type":"communityComments","content":0},{"type":"decision","content":"Revision requested","date":"2025-11-30T22:52:32+00:00","index":"","fulltext":""},{"type":"editorInvitedReview","content":"","date":"2025-11-24T18:20:34+00:00","index":"hide","fulltext":""},{"type":"editorInvitedReview","content":"","date":"2025-11-12T03:44:17+00:00","index":"hide","fulltext":""},{"type":"reviewerAgreed","content":"138258159052383409576769358528251324579","date":"2025-10-31T15:41:27+00:00","index":"hide","fulltext":""},{"type":"reviewerAgreed","content":"278434559015416670521763265604688823447","date":"2025-10-31T12:43:49+00:00","index":"hide","fulltext":""},{"type":"reviewersInvited","content":"","date":"2025-10-31T00:00:07+00:00","index":"","fulltext":""},{"type":"editorAssigned","content":"","date":"2025-10-14T16:07:55+00:00","index":"","fulltext":""},{"type":"checksComplete","content":"","date":"2025-09-20T00:35:54+00:00","index":"","fulltext":""},{"type":"submitted","content":"Advanced Composites and Hybrid Materials","date":"2025-09-18T04:23:00+00:00","index":"","fulltext":""}],"status":"published","journal":{"display":true,"email":"[email protected]","identity":"advanced-composites-and-hybrid-materials","isNatureJournal":false,"hasQc":true,"allowDirectSubmit":false,"externalIdentity":"achm","sideBox":"Learn more about [Advanced Composites and Hybrid Materials](https://link.springer.com/journal/42114)","snPcode":"42114","submissionUrl":"https://submission.nature.com/new-submission/42114/3","title":"Advanced Composites and Hybrid Materials","twitterHandle":"","acdcEnabled":true,"dfaEnabled":true,"editorialSystem":"em","reportingPortfolio":"Springer Hybrid","inReviewEnabled":true,"inReviewRevisionsEnabled":false}}],"origin":"","ownerIdentity":"9c57772d-64fa-4a64-aa28-1a601a148290","owner":[],"postedDate":"November 11th, 2025","published":true,"recentEditorialEvents":[],"rejectedJournal":[],"revision":"","amendment":"","status":"published-in-journal","subjectAreas":[],"tags":[],"updatedAt":"2026-03-16T16:03:58+00:00","versionOfRecord":{"articleIdentity":"rs-7645102","link":"https://doi.org/10.1007/s42114-026-01712-y","journal":{"identity":"advanced-composites-and-hybrid-materials","isVorOnly":false,"title":"Advanced Composites and Hybrid Materials"},"publishedOn":"2026-03-15 16:00:06","publishedOnDateReadable":"March 15th, 2026"},"versionCreatedAt":"2025-11-11 19:07:13","video":"","vorDoi":"10.1007/s42114-026-01712-y","vorDoiUrl":"https://doi.org/10.1007/s42114-026-01712-y","workflowStages":[]},"version":"v1","identity":"rs-7645102","journalConfig":"researchsquare"},"__N_SSP":true},"page":"/article/[identity]/[[...version]]","query":{"redirect":"/article/rs-7645102","identity":"rs-7645102","version":["v1"]},"buildId":"8U1c8b4HqxoKbykW_rLl7","isFallback":false,"isExperimentalCompile":false,"dynamicIds":[84888],"gssp":true,"scriptLoader":[]}