Sensitivity enhanced Mems vector hydrophone based on Piezoelectric varying sectioned beams for low frequency underwater sound waves detection

This paper introduces the design, analysis, and simulation of a MEMS-based Piezoelectric Vector hydrophone for various applications such as ocean monitoring, early detection of micro earthquakes and underwater exploration . The proposed hydrophone designed to operate at a resonant frequency of 21 hertz and also offers a promising solution for detecting low frequency signals in all directions. The input pressure is applied in the form of force and later converted into Sound Pressure level, which is calculated for 60 dB to 100 dB. The resonant frequency and spring constant of the fixed beam for the Piezoelectric hydrophones are compared and discussed based on experimental and simulation results.The displacement profile of the hydrophone ranges from 0.28 µm to 28.7 µm. Additionally, the designed hydrophone device exhibits vonmisses stress ranging from 22.8 MPa to 6.58 MPa for the applied sound pressure levels and the electric potential output ranges from 3 mV to 3 volts, achieving an optimal design.Simulation results shows that the increased sensitivity of the hydrophone about -91dB ref 1v/µPa @ 22 Hz. The analysis and simulations for the proposed device have been conducted using Comsol Multiphysics software, ensuring accurate and reliable resul