Dynamic piezoelectric MEMS-based acoustic attenuators

Dynamic piezoelectric MEMS-based acoustic attenuators | Research Square window.SnipcartSettings = { analytics: { enabled: false } }; (function() { var accessVector = localStorage.getItem('access_vector') || ''; window.dataLayer = window.dataLayer || []; if (accessVector) { window.dataLayer.push({ user: { profile: { profileInfo: { snid: accessVector } } } }); } })(); (function(w,d,s,l,i){w[l]=w[l]||[];w[l].push({'gtm.start':new Date().getTime(),event:'gtm.js'});var f=d.getElementsByTagName(s)[0],j=d.createElement(s),dl=l!='dataLayer'?'&l='+l:'';j.async=true;j.src='https://www.googletagmanager.com/gtm.js?id='+i+dl;f.parentNode.insertBefore(j,f);})(window,document,'script','dataLayer','GTM-K279D39R'); Browse Preprints In Review Journals COVID-19 Preprints AJE Video Bytes Research Tools Research Promotion AJE Professional Editing AJE Rubriq About Preprint Platform In Review Editorial Policies Our Team Advisory Board Help Center Sign In Submit a Preprint Cite Share Download PDF Article Dynamic piezoelectric MEMS-based acoustic attenuators Runar Dahl-Hansen, Olav Kvaløy, Tom Trones, Firehun Dullo This is a preprint; it has not been peer reviewed by a journal. https://doi.org/ 10.21203/rs.3.rs-4349850/v1 This work is licensed under a CC BY 4.0 License Status: Posted Version 1 posted You are reading this latest preprint version Abstract Noise-induced hearing loss is the most prevalent global occupational disease but can be prevented by using Hearing Protection Devices. Acoustic vents are crucial in the design of hearing protection devices, earphones, and hearing aids, serving to balance effective sound attenuation with natural sound perception and user comfort. A hybrid acousto-mechanical vent is presented here, facilitating controlled acoustic impedance using a Pb(Zr,Ti)O3-based thin film piezoelectric micromechanical system. A combination of mechanical stress-compensation and novel design techniques are used to achieve a distortion-free acoustic throughput with an impedance-range from 3.6 to 500 [MΩ]. At 30 [V] bias, the maximum power consumption is below 400 [nW]. It is shown that the system response can be well simulated using Lumped Parameter Modelling, accurately reflecting the measured dynamic attenuation range of close to 140. This highly reliable system, assessed using accelerated lifetime measurements, offers possibilities for developing smaller, lighter, and more energy-efficient hearing protection devices. Physical sciences/Engineering/Electrical and electronic engineering Physical sciences/Physics/Applied physics/Acoustics Thin films piezoelectric MEMS PZT acoustics Lumped Parameter Modelling Full Text Additional Declarations There is NO Competing Interest. Supplementary Files SuplementaryinformationDynamicpiezoelectricMEMSbasedacousticattenuators.docx Cite Share Download PDF Status: Posted Version 1 posted You are reading this latest preprint version Research Square lets you share your work early, gain feedback from the community, and start making changes to your manuscript prior to peer review in a journal. As a division of Research Square Company, we’re committed to making research communication faster, fairer, and more useful. We do this by developing innovative software and high quality services for the global research community. Our growing team is made up of researchers and industry professionals working together to solve the most critical problems facing scientific publishing. Also discoverable on Platform About Our Team In Review Editorial Policies Advisory Board Help Center Resources Author Services Accessibility API Access RSS feed Manage Cookie Preferences © Research Square 2026 | ISSN 2693-5015 (online) Privacy Policy Terms of Service Do Not Sell My Personal Information {"props":{"pageProps":{"initialData":{"identity":"rs-4349850","acceptedTermsAndConditions":true,"allowDirectSubmit":true,"archivedVersions":[],"articleType":"Article","associatedPublications":[],"authors":[{"id":325599122,"identity":"622c9342-1a9c-4063-9901-18868c713e9c","order_by":0,"name":"Runar Dahl-Hansen","email":"data:image/png;base64,iVBORw0KGgoAAAANSUhEUgAAAZAAAAAyAQMAAABI0h/eAAAABlBMVEX///8AAABVwtN+AAAACXBIWXMAAA7EAAAOxAGVKw4bAAAAtUlEQVRIiWNgGAWjYNACNhsGNhBdQYKWNKAWZgaGMyRoOQwkiNViPiP34OeKsvP2fNL9Bx8cYLgjR1CLzI28ZMkz524ntskcZjY4wPDMmKAWCYkcA8nGttsJbBLJbNIfGA4nNhChxfhnY9s5e6AW9h8HiNRiBrTlAGMb0BYG4rTwvDGzbDiXnAjUYixxwOAwEX5hzzG+2VBmZy8/I/HhhwMVhwmHGBowIFXDKBgFo2AUjAKsAACzdjf47XYBOgAAAABJRU5ErkJggg==","orcid":"https://orcid.org/0000-0002-7823-6027","institution":"SINTEF Norway","correspondingAuthor":true,"prefix":"","firstName":"Runar","middleName":"","lastName":"Dahl-Hansen","suffix":""},{"id":325599123,"identity":"58ceaf06-2971-45e9-a20a-845d76c23fad","order_by":1,"name":"Olav Kvaløy","email":"","orcid":"","institution":"Minuendo AS","correspondingAuthor":false,"prefix":"","firstName":"Olav","middleName":"","lastName":"Kvaløy","suffix":""},{"id":325599124,"identity":"c221578d-e04f-4dc0-ab69-ef555010004e","order_by":2,"name":"Tom Trones","email":"","orcid":"","institution":"Minuendo AS","correspondingAuthor":false,"prefix":"","firstName":"Tom","middleName":"","lastName":"Trones","suffix":""},{"id":325599125,"identity":"b1af7a29-f980-4109-9cf4-d0d1b7628131","order_by":3,"name":"Firehun Dullo","email":"","orcid":"","institution":"SINTEF/SINTEF Digital","correspondingAuthor":false,"prefix":"","firstName":"Firehun","middleName":"","lastName":"Dullo","suffix":""}],"badges":[],"createdAt":"2024-04-30 14:45:18","currentVersionCode":1,"declarations":"","doi":"10.21203/rs.3.rs-4349850/v1","doiUrl":"https://doi.org/10.21203/rs.3.rs-4349850/v1","draftVersion":[],"editorialEvents":[],"editorialNote":"","failedWorkflow":false,"files":[{"id":87415105,"identity":"f7b72564-fe20-4938-b0c7-82c0e3deed84","added_by":"auto","created_at":"2025-07-23 14:28:45","extension":"pdf","order_by":1,"title":"","display":"","copyAsset":false,"role":"manuscript-pdf","size":1609200,"visible":true,"origin":"","legend":"","description":"","filename":"MainmanuscriptDynamicpiezoelectricMEMSbasedacousticattenuators.pdf","url":"https://assets-eu.researchsquare.com/files/rs-4349850/v1_covered_f9dfac41-79eb-4f3a-b5ed-3c431b09ef9c.pdf"},{"id":61737710,"identity":"87c6d865-95e5-40d6-b166-7841b90466b5","added_by":"auto","created_at":"2024-08-05 03:54:25","extension":"docx","order_by":1,"title":"","display":"","copyAsset":false,"role":"supplement","size":2173991,"visible":true,"origin":"","legend":"\u003cp\u003e\u003cbr\u003e\u003c/p\u003e","description":"","filename":"SuplementaryinformationDynamicpiezoelectricMEMSbasedacousticattenuators.docx","url":"https://assets-eu.researchsquare.com/files/rs-4349850/v1/185b5e1508196571b8e3ecb7.docx"}],"financialInterests":"There is \u003cb\u003eNO\u003c/b\u003e Competing Interest.","formattedTitle":"Dynamic piezoelectric MEMS-based acoustic attenuators","fulltext":[],"fulltextSource":"","fullText":"","funders":[],"hasAdminPriorityOnWorkflow":false,"hasManuscriptDocX":false,"hasOptedInToPreprint":true,"hasPassedJournalQc":"","hasAnyPriority":false,"hideJournal":true,"highlight":"","institution":"","isAcceptedByJournal":false,"isAuthorSuppliedPdf":true,"isDeskRejected":"","isHiddenFromSearch":false,"isInQc":false,"isInWorkflow":false,"isPdf":true,"isPdfUpToDate":true,"isWithdrawnOrRetracted":false,"journal":{"display":true,"email":"[email protected]","identity":"researchsquare","isNatureJournal":false,"hasQc":true,"allowDirectSubmit":true,"externalIdentity":"","sideBox":"","snPcode":"","submissionUrl":"/submission","title":"Research Square","twitterHandle":"researchsquare","acdcEnabled":true,"dfaEnabled":false,"editorialSystem":"","reportingPortfolio":"","inReviewEnabled":false,"inReviewRevisionsEnabled":true},"keywords":"Thin films, piezoelectric MEMS, PZT, acoustics, Lumped Parameter Modelling","lastPublishedDoi":"10.21203/rs.3.rs-4349850/v1","lastPublishedDoiUrl":"https://doi.org/10.21203/rs.3.rs-4349850/v1","license":{"name":"CC BY 4.0","url":"https://creativecommons.org/licenses/by/4.0/"},"manuscriptAbstract":"Noise-induced hearing loss is the most prevalent global occupational disease but can be prevented by using Hearing Protection Devices. 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