Study of Phonon Transport Across Si/Ge Interfaces Using Full-Band Phonon Monte Carlo Simulation

Abstract A Full Band Monte Carlo simulatorhas been developed to considerphonon transmission across interfaces disposedperpendicularlyto the heat flux. This solver of the Boltzmann transport equation does not require any assumption on the shape the phonon distribution and can naturally consider all phonon transport regimes from the diffusive to the fully ballistic regime. This simulatoris used to study single and double Si/Ge heterostructures from the micrometer scale downto the nanometer scale,i.e. in all phonon transport regime from fully diffusive toballistic.A methodology to determine the thermal conductivity atthermal interfaces is presented.