Compact Adaptive Spectral Imager Enabled by MEMS Fabry-Perot Filtering Chip in Longwave Infrared

Compact Adaptive Spectral Imager Enabled by MEMS Fabry-Perot Filtering Chip in Longwave Infrared | Research Square window.SnipcartSettings = { analytics: { enabled: false } }; (function() { var accessVector = localStorage.getItem('access_vector') || ''; window.dataLayer = window.dataLayer || []; if (accessVector) { window.dataLayer.push({ user: { profile: { profileInfo: { snid: accessVector } } } }); } })(); (function(w,d,s,l,i){w[l]=w[l]||[];w[l].push({'gtm.start':new Date().getTime(),event:'gtm.js'});var f=d.getElementsByTagName(s)[0],j=d.createElement(s),dl=l!='dataLayer'?'&l='+l:'';j.async=true;j.src='https://www.googletagmanager.com/gtm.js?id='+i+dl;f.parentNode.insertBefore(j,f);})(window,document,'script','dataLayer','GTM-K279D39R'); Browse Preprints In Review Journals COVID-19 Preprints AJE Video Bytes Research Tools Research Promotion AJE Professional Editing AJE Rubriq About Preprint Platform In Review Editorial Policies Our Team Advisory Board Help Center Sign In Submit a Preprint Cite Share Download PDF Article Compact Adaptive Spectral Imager Enabled by MEMS Fabry-Perot Filtering Chip in Longwave Infrared Yiting Yu, Kui Zhou, Xiaodong Wang, Geng Tong, Xingchen Xiao, and 2 more This is a preprint; it has not been peer reviewed by a journal. https://doi.org/ 10.21203/rs.3.rs-8139728/v1 This work is licensed under a CC BY 4.0 License Status: Under Review Version 1 posted 9 You are reading this latest preprint version Abstract Longwave infrared (LWIR) spectral imaging offers unique capabilities for gas/liquid detection, mineral exploration, environmental monitoring, and military security applications. Conventional LWIR spectral imagers, however, are hampered by reliance on existing dispersion elements, resulting in inflexible operation, limited spectral channels, and excessive bulk, which preclude deployment in intelligent, multi-scenario settings. To address such issue, we introduce a compact adaptive spectral imager (CASI) leveraging a LWIR large-aperture micro-electro-mechanical systems based Fabry-Perot filtering chip (MEMS-FPFC). A modular chip-front optical architecture yields an ultra-compact volume (150×77×88 mm³), low-weight (1.11 kg), and “plug-and-play” operation. A synergistic adaptation control system exploits the intrinsic programmability of the MEMS-FPFC to enable diverse adaptive imaging modes-including programmable spectral acquisition spanning global coarse/fine scans, localized fine scans, and arbitrary spectral band combinations-tailored to specific application demands. This adaptability, coupled with spectral channel selection and image fusion algorithms, facilitates efficient and precise target identification. The CASI’s compactness and programmability enable integration onto small unmanned platforms, advancing intelligent LWIR spectral imaging for field-deployable applications in industrial pollution monitoring, mineral prospecting, and security. Physical sciences/Optics and photonics/Applied optics Physical sciences/Nanoscience and technology/Other nanotechnology Adaptive spectral imaging MEMS Fabry-Perot filtering chip Compact spectral imager Programmable filtering Arbitrary spectral channel combination Full Text Additional Declarations There is no conflict of interest Cite Share Download PDF Status: Under Review Version 1 posted Editorial decision: revise 26 Jan, 2026 Review # 2 received at journal 22 Jan, 2026 Review # 1 received at journal 01 Jan, 2026 Reviewer # 2 agreed at journal 19 Dec, 2025 Reviewer # 1 agreed at journal 11 Dec, 2025 Reviewers invited by journal 11 Dec, 2025 Submission checks completed at journal 20 Nov, 2025 Editor assigned by journal 17 Nov, 2025 First submitted to journal 17 Nov, 2025 You are reading this latest preprint version Research Square lets you share your work early, gain feedback from the community, and start making changes to your manuscript prior to peer review in a journal. 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Also discoverable on Platform About Our Team In Review Editorial Policies Advisory Board Help Center Resources Author Services Accessibility API Access RSS feed Manage Cookie Preferences © Research Square 2026 | ISSN 2693-5015 (online) Privacy Policy Terms of Service Do Not Sell My Personal Information {"props":{"pageProps":{"initialData":{"identity":"rs-8139728","acceptedTermsAndConditions":true,"allowDirectSubmit":false,"archivedVersions":[],"articleType":"Article","associatedPublications":[],"authors":[{"id":558802650,"identity":"3ef3fbdb-4621-4cca-bf5e-18999666a201","order_by":0,"name":"Yiting Yu","email":"data:image/png;base64,iVBORw0KGgoAAAANSUhEUgAAAZAAAAAyAQMAAABI0h/eAAAABlBMVEX///8AAABVwtN+AAAACXBIWXMAAA7EAAAOxAGVKw4bAAAAqElEQVRIiWNgGAWjYHACxgdQhgGxOpiZYUqJ18ImQZoWgxv5x6oL2+4kNrA3b5NgqLlDjJZkttsz254lNvAcK5NgOPaMSC282w4nNkjkmEkwNhwmTksxWIv8GxK0MENs4SFSi+SZx8bSvP+eGbfxpBVbJBwjQgvf8cSHn3nO3JHtZz+88caHGiK0KFxIAFEHGNhAVAJhDQwM8v0HIFpGwSgYBaNgFOAEANoRO7vdc7TRAAAAAElFTkSuQmCC","orcid":"https://orcid.org/0000-0001-9405-1869","institution":"Northwestern Polytechnical University","correspondingAuthor":true,"prefix":"","firstName":"Yiting","middleName":"","lastName":"Yu","suffix":""},{"id":558802651,"identity":"ac56ba76-31d0-44bf-93ed-6e9821416b7d","order_by":1,"name":"Kui Zhou","email":"","orcid":"https://orcid.org/0009-0002-8086-7669","institution":"Northwestern Polytechnical University","correspondingAuthor":false,"prefix":"","firstName":"Kui","middleName":"","lastName":"Zhou","suffix":""},{"id":558802652,"identity":"631881e3-dcb2-4375-be58-1bfee43a7c47","order_by":2,"name":"Xiaodong Wang","email":"","orcid":"","institution":"Northwestern Polytechnical University","correspondingAuthor":false,"prefix":"","firstName":"Xiaodong","middleName":"","lastName":"Wang","suffix":""},{"id":558802653,"identity":"f870e74c-5753-486e-bdab-bee35b08d13a","order_by":3,"name":"Geng Tong","email":"","orcid":"","institution":"Northwestern Polytechnical University","correspondingAuthor":false,"prefix":"","firstName":"Geng","middleName":"","lastName":"Tong","suffix":""},{"id":558802654,"identity":"fc86935d-09fd-451b-87a3-34ee75a3ec05","order_by":4,"name":"Xingchen Xiao","email":"","orcid":"","institution":"Northwestern Polytechnical University","correspondingAuthor":false,"prefix":"","firstName":"Xingchen","middleName":"","lastName":"Xiao","suffix":""},{"id":558802655,"identity":"255d3017-e6c7-48f0-bea1-a6665b19ea7c","order_by":5,"name":"Jiancun Zhao","email":"","orcid":"","institution":"Northwestern Polytechnical University","correspondingAuthor":false,"prefix":"","firstName":"Jiancun","middleName":"","lastName":"Zhao","suffix":""},{"id":558802656,"identity":"57521ab0-6f58-4d40-a897-e0dab7757e72","order_by":6,"name":"Xiaochang Yu","email":"","orcid":"","institution":"Northwestern Polytechnical University","correspondingAuthor":false,"prefix":"","firstName":"Xiaochang","middleName":"","lastName":"Yu","suffix":""}],"badges":[],"createdAt":"2025-11-18 01:25:09","currentVersionCode":1,"declarations":"","doi":"10.21203/rs.3.rs-8139728/v1","doiUrl":"https://doi.org/10.21203/rs.3.rs-8139728/v1","draftVersion":[],"editorialEvents":[],"editorialNote":"","failedWorkflow":false,"files":[{"id":98325737,"identity":"f7a30b04-8203-4f63-9a3c-214826d38f1c","added_by":"auto","created_at":"2025-12-16 14:39:32","extension":"docx","order_by":0,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":10175797,"visible":true,"origin":"","legend":"","description":"","filename":"Manuscript.docx","url":"https://assets-eu.researchsquare.com/files/rs-8139728/v1/71684253e2b53150504fae1a.docx"},{"id":98325711,"identity":"52cf099b-b603-4150-bcd9-8421baad83af","added_by":"auto","created_at":"2025-12-16 14:39:31","extension":"json","order_by":1,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":8326,"visible":true,"origin":"","legend":"","description":"","filename":"MICRONANO05123.json","url":"https://assets-eu.researchsquare.com/files/rs-8139728/v1/4d10563ab254a049dfee04f9.json"},{"id":98325745,"identity":"1f72a5ba-8cdc-476e-bc59-7091df46c144","added_by":"auto","created_at":"2025-12-16 14:39:33","extension":"xml","order_by":2,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":108083,"visible":true,"origin":"","legend":"","description":"","filename":"MICRONANO051230enriched.xml","url":"https://assets-eu.researchsquare.com/files/rs-8139728/v1/ab3428c73e29ef1dca31d414.xml"},{"id":98325738,"identity":"a6868d38-5b2e-4bfb-aef0-9e975fb80ad0","added_by":"auto","created_at":"2025-12-16 14:39:32","extension":"jpeg","order_by":3,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":335172,"visible":true,"origin":"","legend":"","description":"","filename":"floatimage1.jpeg","url":"https://assets-eu.researchsquare.com/files/rs-8139728/v1/793c9f3eb1823e3e25a1a7d4.jpeg"},{"id":98325720,"identity":"84b75afc-4c4c-49c8-aa82-cf7e6f26b95f","added_by":"auto","created_at":"2025-12-16 14:39:31","extension":"jpeg","order_by":4,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":976513,"visible":true,"origin":"","legend":"","description":"","filename":"floatimage2.jpeg","url":"https://assets-eu.researchsquare.com/files/rs-8139728/v1/8c0780521c2c4b7adabc290a.jpeg"},{"id":98325681,"identity":"7b3261d8-0a2e-4de2-9b8a-a208521297e4","added_by":"auto","created_at":"2025-12-16 14:39:29","extension":"jpeg","order_by":5,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":728285,"visible":true,"origin":"","legend":"","description":"","filename":"floatimage3.jpeg","url":"https://assets-eu.researchsquare.com/files/rs-8139728/v1/c7b0ab1c82af4b15c89d2add.jpeg"},{"id":98325774,"identity":"179296f8-c28e-48d0-bbc2-8a51b9cf2bc2","added_by":"auto","created_at":"2025-12-16 14:39:33","extension":"jpeg","order_by":6,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":1424197,"visible":true,"origin":"","legend":"","description":"","filename":"floatimage4.jpeg","url":"https://assets-eu.researchsquare.com/files/rs-8139728/v1/dc577c08f3b36998ab94a3f2.jpeg"},{"id":98325769,"identity":"33456d01-2e82-47f5-bea1-dfb47bda02ae","added_by":"auto","created_at":"2025-12-16 14:39:33","extension":"jpeg","order_by":7,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":833942,"visible":true,"origin":"","legend":"","description":"","filename":"floatimage5.jpeg","url":"https://assets-eu.researchsquare.com/files/rs-8139728/v1/45bc625ad2571271a6ddeefc.jpeg"},{"id":98438350,"identity":"c5fcc6fd-f994-4ec8-b452-478599aa9022","added_by":"auto","created_at":"2025-12-17 16:59:03","extension":"jpeg","order_by":8,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":524126,"visible":true,"origin":"","legend":"","description":"","filename":"floatimage6.jpeg","url":"https://assets-eu.researchsquare.com/files/rs-8139728/v1/18904ea4d7fd51f0806c6f38.jpeg"},{"id":98436697,"identity":"9ee7eb8a-be78-492e-a74e-9a52d5412c2b","added_by":"auto","created_at":"2025-12-17 16:56:04","extension":"wmf","order_by":9,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":3626,"visible":true,"origin":"","legend":"","description":"","filename":"image11.wmf","url":"https://assets-eu.researchsquare.com/files/rs-8139728/v1/0b410bb371efa3f8c50abfe5.wmf"},{"id":98325717,"identity":"fd5144f7-30c5-444b-af09-9f1e20f2852f","added_by":"auto","created_at":"2025-12-16 14:39:31","extension":"wmf","order_by":10,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":2800,"visible":true,"origin":"","legend":"","description":"","filename":"image12.wmf","url":"https://assets-eu.researchsquare.com/files/rs-8139728/v1/c05e479d604298c8e80c3c9a.wmf"},{"id":98325773,"identity":"48bc4233-7d7d-4065-bd34-e872c8b1edf5","added_by":"auto","created_at":"2025-12-16 14:39:33","extension":"wmf","order_by":11,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":1044,"visible":true,"origin":"","legend":"","description":"","filename":"image2.wmf","url":"https://assets-eu.researchsquare.com/files/rs-8139728/v1/467936c40733a3b83fd6d959.wmf"},{"id":98325771,"identity":"208521fb-fa20-46e9-a071-bc07df412342","added_by":"auto","created_at":"2025-12-16 14:39:33","extension":"wmf","order_by":12,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":1666,"visible":true,"origin":"","legend":"","description":"","filename":"image5.wmf","url":"https://assets-eu.researchsquare.com/files/rs-8139728/v1/28a05e55a90634d4876a6840.wmf"},{"id":98325770,"identity":"63333417-1ee0-4e00-a4c2-aff315e7f785","added_by":"auto","created_at":"2025-12-16 14:39:33","extension":"wmf","order_by":13,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":1660,"visible":true,"origin":"","legend":"","description":"","filename":"image6.wmf","url":"https://assets-eu.researchsquare.com/files/rs-8139728/v1/55ff414ab25f9341941ad78f.wmf"},{"id":98325724,"identity":"3a377d62-2dc5-42b6-bf0b-da6f742590f1","added_by":"auto","created_at":"2025-12-16 14:39:31","extension":"wmf","order_by":14,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":1660,"visible":true,"origin":"","legend":"","description":"","filename":"image7.wmf","url":"https://assets-eu.researchsquare.com/files/rs-8139728/v1/654f4d591ce2486c0a6dd946.wmf"},{"id":98325778,"identity":"f6cb415a-b90c-49ac-ad92-49740ccabf11","added_by":"auto","created_at":"2025-12-16 14:39:35","extension":"wmf","order_by":15,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":1660,"visible":true,"origin":"","legend":"","description":"","filename":"image8.wmf","url":"https://assets-eu.researchsquare.com/files/rs-8139728/v1/454eab0b45060345fe706390.wmf"},{"id":98438507,"identity":"5da0f302-d2ee-4394-ba5d-95dbd5248552","added_by":"auto","created_at":"2025-12-17 16:59:21","extension":"png","order_by":16,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":68507,"visible":true,"origin":"","legend":"","description":"","filename":"Onlinefloatimage1.png","url":"https://assets-eu.researchsquare.com/files/rs-8139728/v1/aac15c86bed7ea674f2552d6.png"},{"id":98325728,"identity":"a7ba9275-6cbd-4bab-a472-46bcb6f6f029","added_by":"auto","created_at":"2025-12-16 14:39:32","extension":"png","order_by":17,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":301645,"visible":true,"origin":"","legend":"","description":"","filename":"Onlinefloatimage2.png","url":"https://assets-eu.researchsquare.com/files/rs-8139728/v1/887a2cb21eeeefbb5e1f1394.png"},{"id":98436920,"identity":"fbac96a1-24a7-4452-a769-7f96348acb8e","added_by":"auto","created_at":"2025-12-17 16:56:27","extension":"png","order_by":18,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":180465,"visible":true,"origin":"","legend":"","description":"","filename":"Onlinefloatimage3.png","url":"https://assets-eu.researchsquare.com/files/rs-8139728/v1/b31f4dae9d9175f514e703f6.png"},{"id":98325739,"identity":"ed845fa7-8500-4622-9178-a6b3442f6877","added_by":"auto","created_at":"2025-12-16 14:39:32","extension":"png","order_by":19,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":297315,"visible":true,"origin":"","legend":"","description":"","filename":"Onlinefloatimage4.png","url":"https://assets-eu.researchsquare.com/files/rs-8139728/v1/336c62dddf1ef13fe4ea77b9.png"},{"id":98325740,"identity":"ce4ae500-9438-418b-a22e-3c3b39d63149","added_by":"auto","created_at":"2025-12-16 14:39:32","extension":"png","order_by":20,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":197516,"visible":true,"origin":"","legend":"","description":"","filename":"Onlinefloatimage5.png","url":"https://assets-eu.researchsquare.com/files/rs-8139728/v1/c4fc5f7dbfd323eca5298233.png"},{"id":98325777,"identity":"ef435830-e36b-43e3-a04a-bac578caa309","added_by":"auto","created_at":"2025-12-16 14:39:34","extension":"png","order_by":21,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":113281,"visible":true,"origin":"","legend":"","description":"","filename":"Onlinefloatimage6.png","url":"https://assets-eu.researchsquare.com/files/rs-8139728/v1/4b0c3b51e4062ad20cbbbcd3.png"},{"id":98325715,"identity":"209550aa-3111-4648-bc27-953c05f2171b","added_by":"auto","created_at":"2025-12-16 14:39:31","extension":"png","order_by":22,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":1609,"visible":true,"origin":"","legend":"","description":"","filename":"Onlineimage11.png","url":"https://assets-eu.researchsquare.com/files/rs-8139728/v1/eadd96826f5134a86e981845.png"},{"id":98325723,"identity":"4b659cad-8c42-4351-a59d-030cdb0d7699","added_by":"auto","created_at":"2025-12-16 14:39:31","extension":"png","order_by":23,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":1183,"visible":true,"origin":"","legend":"","description":"","filename":"Onlineimage12.png","url":"https://assets-eu.researchsquare.com/files/rs-8139728/v1/88ff2a2826dca91520232d97.png"},{"id":98325721,"identity":"caf70633-cacd-426e-a434-5d4e76eaa649","added_by":"auto","created_at":"2025-12-16 14:39:31","extension":"png","order_by":24,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":712,"visible":true,"origin":"","legend":"","description":"","filename":"Onlineimage2.png","url":"https://assets-eu.researchsquare.com/files/rs-8139728/v1/e818d77e972d316d817a1a6d.png"},{"id":98436787,"identity":"15148b7d-a511-4621-8087-69cc2dcc0b00","added_by":"auto","created_at":"2025-12-17 16:56:15","extension":"png","order_by":25,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":759,"visible":true,"origin":"","legend":"","description":"","filename":"Onlineimage5.png","url":"https://assets-eu.researchsquare.com/files/rs-8139728/v1/ab21b2ae727f9c4aa471ce93.png"},{"id":98325719,"identity":"c218191f-7e40-4505-b389-45a485ee6d36","added_by":"auto","created_at":"2025-12-16 14:39:31","extension":"png","order_by":26,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":712,"visible":true,"origin":"","legend":"","description":"","filename":"Onlineimage6.png","url":"https://assets-eu.researchsquare.com/files/rs-8139728/v1/f72f965556efa5d6dc63c06e.png"},{"id":98325776,"identity":"2352a963-c879-4af1-8146-9c8095e9a25d","added_by":"auto","created_at":"2025-12-16 14:39:34","extension":"png","order_by":27,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":769,"visible":true,"origin":"","legend":"","description":"","filename":"Onlineimage7.png","url":"https://assets-eu.researchsquare.com/files/rs-8139728/v1/6b0572bf16c2434be8e366e6.png"},{"id":98325779,"identity":"dcea2dc5-a81a-4a17-a0b2-6b23ac9ec0e1","added_by":"auto","created_at":"2025-12-16 14:39:35","extension":"png","order_by":28,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":733,"visible":true,"origin":"","legend":"","description":"","filename":"Onlineimage8.png","url":"https://assets-eu.researchsquare.com/files/rs-8139728/v1/5e217eb6421030a86186d663.png"},{"id":98325725,"identity":"b9686218-b9c7-4f1d-be0d-58b18ae77eb1","added_by":"auto","created_at":"2025-12-16 14:39:31","extension":"xml","order_by":29,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":105245,"visible":true,"origin":"","legend":"","description":"","filename":"MICRONANO051230structuring.xml","url":"https://assets-eu.researchsquare.com/files/rs-8139728/v1/6b39767bdace93b1c8cb26db.xml"},{"id":98325697,"identity":"717bce4b-5615-42ed-aa54-16dfa94ffd11","added_by":"auto","created_at":"2025-12-16 14:39:30","extension":"html","order_by":30,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":119166,"visible":true,"origin":"","legend":"","description":"","filename":"earlyproof.html","url":"https://assets-eu.researchsquare.com/files/rs-8139728/v1/c20fe725cb8b3eed563dac2d.html"},{"id":98445641,"identity":"70897c26-b23c-4fe5-ade9-0cefc8f5c696","added_by":"auto","created_at":"2025-12-17 17:20:35","extension":"pdf","order_by":1,"title":"","display":"","copyAsset":false,"role":"manuscript-pdf","size":1260671,"visible":true,"origin":"","legend":"","description":"","filename":"Manuscript.pdf","url":"https://assets-eu.researchsquare.com/files/rs-8139728/v1_covered_4392c0d4-4b4c-47a1-bc66-32074e9ca99c.pdf"}],"financialInterests":"There is no conflict of interest","formattedTitle":"Compact Adaptive Spectral Imager Enabled by MEMS Fabry-Perot Filtering Chip in Longwave Infrared","fulltext":[],"fulltextSource":"","fullText":"","funders":[],"hasAdminPriorityOnWorkflow":false,"hasManuscriptDocX":false,"hasOptedInToPreprint":true,"hasPassedJournalQc":"","hasAnyPriority":false,"hideJournal":false,"highlight":"","institution":"","isAcceptedByJournal":true,"isAuthorSuppliedPdf":true,"isDeskRejected":"","isHiddenFromSearch":false,"isInQc":false,"isInWorkflow":false,"isPdf":true,"isPdfUpToDate":true,"isWithdrawnOrRetracted":false,"journal":{"display":true,"email":"[email protected]","identity":"microsystems-and-nanoengineering","isNatureJournal":false,"hasQc":false,"allowDirectSubmit":false,"externalIdentity":"micronano","sideBox":"Learn more about [Microsystems \u0026 Nanoengineering](http://www.nature.com/micronano/)","snPcode":"41378","submissionUrl":"https://mts-micronano.nature.com/","title":"Microsystems \u0026 Nanoengineering","twitterHandle":"","acdcEnabled":true,"dfaEnabled":true,"editorialSystem":"ejp","reportingPortfolio":"Nature AJ","inReviewEnabled":true,"inReviewRevisionsEnabled":true},"keywords":"Adaptive spectral imaging, MEMS Fabry-Perot filtering chip, Compact spectral imager, Programmable filtering, Arbitrary spectral channel combination","lastPublishedDoi":"10.21203/rs.3.rs-8139728/v1","lastPublishedDoiUrl":"https://doi.org/10.21203/rs.3.rs-8139728/v1","license":{"name":"CC BY 4.0","url":"https://creativecommons.org/licenses/by/4.0/"},"manuscriptAbstract":"\u003cp\u003eLongwave infrared (LWIR) spectral imaging offers unique capabilities for gas/liquid detection, mineral exploration, environmental monitoring, and military security applications. Conventional LWIR spectral imagers, however, are hampered by reliance on existing dispersion elements, resulting in inflexible operation, limited spectral channels, and excessive bulk, which preclude deployment in intelligent, multi-scenario settings. To address such issue, we introduce a compact adaptive spectral imager (CASI) leveraging a LWIR large-aperture micro-electro-mechanical systems based Fabry-Perot filtering chip (MEMS-FPFC). A modular chip-front optical architecture yields an ultra-compact volume (150\u0026times;77\u0026times;88 mm\u0026sup3;), low-weight (1.11 kg), and \u0026ldquo;plug-and-play\u0026rdquo; operation. A synergistic adaptation control system exploits the intrinsic programmability of the MEMS-FPFC to enable diverse adaptive imaging modes-including programmable spectral acquisition spanning global coarse/fine scans, localized fine scans, and arbitrary spectral band combinations-tailored to specific application demands. This adaptability, coupled with spectral channel selection and image fusion algorithms, facilitates efficient and precise target identification. The CASI\u0026rsquo;s compactness and programmability enable integration onto small unmanned platforms, advancing intelligent LWIR spectral imaging for field-deployable applications in industrial pollution monitoring, mineral prospecting, and security.\u003c/p\u003e","manuscriptTitle":"Compact Adaptive Spectral Imager Enabled by MEMS Fabry-Perot Filtering Chip in Longwave Infrared","msid":"","msnumber":"","nonDraftVersions":[{"code":1,"date":"2025-12-16 14:38:37","doi":"10.21203/rs.3.rs-8139728/v1","editorialEvents":[{"type":"communityComments","content":0},{"type":"decision","content":"revise","date":"2026-01-26T11:38:34+00:00","index":"","fulltext":""},{"type":"editorInvitedReview","content":"This content is not available.","date":"2026-01-22T10:04:33+00:00","index":2,"fulltext":"This content is not available."},{"type":"editorInvitedReview","content":"This content is not available.","date":"2026-01-01T23:06:47+00:00","index":1,"fulltext":"This content is not available."},{"type":"reviewerAgreed","content":"This content is not available.","date":"2025-12-19T20:33:02+00:00","index":2,"fulltext":"This content is not available."},{"type":"reviewerAgreed","content":"This content is not available.","date":"2025-12-11T11:41:35+00:00","index":1,"fulltext":"This content is not available."},{"type":"reviewersInvited","content":"","date":"2025-12-11T11:40:14+00:00","index":"","fulltext":""},{"type":"checksComplete","content":"","date":"2025-11-20T09:01:57+00:00","index":"","fulltext":""},{"type":"editorAssigned","content":"","date":"2025-11-18T01:20:35+00:00","index":"","fulltext":""},{"type":"submitted","content":"Microsystems \u0026 Nanoengineering","date":"2025-11-18T01:20:34+00:00","index":"","fulltext":""}],"status":"published","journal":{"display":true,"email":"[email protected]","identity":"microsystems-and-nanoengineering","isNatureJournal":false,"hasQc":false,"allowDirectSubmit":false,"externalIdentity":"micronano","sideBox":"Learn more about [Microsystems \u0026 Nanoengineering](http://www.nature.com/micronano/)","snPcode":"41378","submissionUrl":"https://mts-micronano.nature.com/","title":"Microsystems \u0026 Nanoengineering","twitterHandle":"","acdcEnabled":true,"dfaEnabled":true,"editorialSystem":"ejp","reportingPortfolio":"Nature AJ","inReviewEnabled":true,"inReviewRevisionsEnabled":true}}],"origin":"","ownerIdentity":"41950ebc-ec2e-44ba-ab91-dd48a75ab4b7","owner":[],"postedDate":"December 16th, 2025","published":true,"recentEditorialEvents":[],"rejectedJournal":[],"revision":"","amendment":"","status":"under-review","subjectAreas":[{"id":59486643,"name":"Physical sciences/Optics and photonics/Applied optics"},{"id":59486644,"name":"Physical sciences/Nanoscience and technology/Other nanotechnology"}],"tags":[],"updatedAt":"2026-03-31T00:45:17+00:00","versionOfRecord":[],"versionCreatedAt":"2025-12-16 14:38:37","video":"","vorDoi":"","vorDoiUrl":"","workflowStages":[]},"version":"v1","identity":"rs-8139728","journalConfig":"researchsquare"},"__N_SSP":true},"page":"/article/[identity]/[[...version]]","query":{"redirect":"/article/rs-8139728","identity":"rs-8139728","version":["v1"]},"buildId":"8U1c8b4HqxoKbykW_rLl7","isFallback":false,"isExperimentalCompile":false,"dynamicIds":[84888],"gssp":true,"scriptLoader":[]}