Effects of polishing disc material and substrate surface temperature on the tribological behaviors and machining results of β-Ga2O3(100)

Effects of polishing disc material and substrate surface temperature on the tribological behaviors and machining results of β-Ga2O3(100) | Research Square window.SnipcartSettings = { analytics: { enabled: false } }; (function() { var accessVector = localStorage.getItem('access_vector') || ''; window.dataLayer = window.dataLayer || []; if (accessVector) { window.dataLayer.push({ user: { profile: { profileInfo: { snid: accessVector } } } }); } })(); (function(w,d,s,l,i){w[l]=w[l]||[];w[l].push({'gtm.start':new Date().getTime(),event:'gtm.js'});var f=d.getElementsByTagName(s)[0],j=d.createElement(s),dl=l!='dataLayer'?'&l='+l:'';j.async=true;j.src='https://www.googletagmanager.com/gtm.js?id='+i+dl;f.parentNode.insertBefore(j,f);})(window,document,'script','dataLayer','GTM-K279D39R'); Browse Preprints In Review Journals COVID-19 Preprints AJE Video Bytes Research Tools Research Promotion AJE Professional Editing AJE Rubriq About Preprint Platform In Review Editorial Policies Our Team Advisory Board Help Center Sign In Submit a Preprint Cite Share Download PDF Research Article Effects of polishing disc material and substrate surface temperature on the tribological behaviors and machining results of β-Ga2O3(100) Tao Wang, Qiang xiong, Qiusheng Yan, Shun peng, Junqiang lin, and 3 more This is a preprint; it has not been peer reviewed by a journal. https://doi.org/ 10.21203/rs.3.rs-3846408/v1 This work is licensed under a CC BY 4.0 License Status: Published Journal Publication published 25 Jul, 2024 Read the published version in The International Journal of Advanced Manufacturing Technology → Version 1 posted 4 You are reading this latest preprint version Abstract Defects, such as scratches, cleavage fracture, and cleavage pit, occur during surface processing and affect the surface integrity of β-Ga 2 O 3 (100) substrates. This study analyzed the effects of polishing materials (polyurethane, lead, and copper) and substrate surface temperatures (25, 10, and 0 ℃) on the polishing results to overcome the effects of such defects on the substrates. Vickers indentation test was used to detect the effects of the material and surface temperature on the hardness of the disc and substrate, respectively. Machining was verified by conducting ball-disk friction wear and polishing experiments. The experimental results indicate that the material of the polished optical disc significantly affected β-Ga 2 O 3 (100) during surface processing. The higher the hardness of the polished optical disc, the greater is the material removal rate ( MRR ) of substrate surface, and more serious is the surface cleavage phenomenon. A lead disc with lower hardness can be used to process β-Ga 2 O 3 (100) for realizing a higher MRR , thereby effectively avoiding cleavage fractures and obtaining a surface roughness ( Ra ) and scratch depth of 3.4 nm and 18 nm, respectively. The hardness and mechanical strength of the substrate can be enhanced at low temperatures, and the indentation depth becomes smaller under the action of external forces, effectively inhibiting the formation of scratches and pits on the surface of the substrate during polishing. After polishing the substrate at 0 ℃, the Ra , scratch depth, and total number of cleavage pits were 2.2 nm, 14.3 nm, and 246, respectively. Compared with 25℃, Polishing the substrate at 0 ℃ decreased the Ra , scratch depth, and number of cleavage pits by 35.3, 20.6, and 34.9%, respectively. At 0 ℃, the substrate effectively avoided cleavage fracture and inhibited scratch and pit formation, thereby significantly improving the polishing effect. β-Ga2O3(100) substrate Tribological behavior Polishing Surface morphology Cleavage Full Text Supplementary Files Supplementaryfile.docx Highlights.docx Cite Share Download PDF Status: Published Journal Publication published 25 Jul, 2024 Read the published version in The International Journal of Advanced Manufacturing Technology → Version 1 posted Reviewers agreed at journal 15 Jan, 2024 Reviewers invited by journal 15 Jan, 2024 Editor assigned by journal 11 Jan, 2024 First submitted to journal 10 Jan, 2024 You are reading this latest preprint version Research Square lets you share your work early, gain feedback from the community, and start making changes to your manuscript prior to peer review in a journal. As a division of Research Square Company, we’re committed to making research communication faster, fairer, and more useful. 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Also discoverable on Platform About Our Team In Review Editorial Policies Advisory Board Help Center Resources Author Services Accessibility API Access RSS feed Manage Cookie Preferences © Research Square 2026 | ISSN 2693-5015 (online) Privacy Policy Terms of Service Do Not Sell My Personal Information {"props":{"pageProps":{"initialData":{"identity":"rs-3846408","acceptedTermsAndConditions":true,"allowDirectSubmit":false,"archivedVersions":[],"articleType":"Research Article","associatedPublications":[],"authors":[{"id":267242010,"identity":"2093d3e6-0e56-45e1-ba8b-e4347b87aff9","order_by":0,"name":"Tao Wang","email":"","orcid":"","institution":"","correspondingAuthor":false,"prefix":"","firstName":"Tao","middleName":"","lastName":"Wang","suffix":""},{"id":267242011,"identity":"e329105a-a7f8-47ff-964f-c042a7afd861","order_by":1,"name":"Qiang 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Technology","twitterHandle":"","acdcEnabled":true,"dfaEnabled":true,"editorialSystem":"em","reportingPortfolio":"Springer Hybrid","inReviewEnabled":true,"inReviewRevisionsEnabled":false},"keywords":"β-Ga2O3(100) substrate, Tribological behavior, Polishing, Surface morphology, Cleavage","lastPublishedDoi":"10.21203/rs.3.rs-3846408/v1","lastPublishedDoiUrl":"https://doi.org/10.21203/rs.3.rs-3846408/v1","license":{"name":"CC BY 4.0","url":"https://creativecommons.org/licenses/by/4.0/"},"manuscriptAbstract":"\u003cp\u003eDefects, such as scratches, cleavage fracture, and cleavage pit, occur during surface processing and affect the surface integrity of β-Ga\u003csub\u003e2\u003c/sub\u003eO\u003csub\u003e3\u003c/sub\u003e(100) substrates. This study analyzed the effects of polishing materials (polyurethane, lead, and copper) and substrate surface temperatures (25, 10, and 0 ℃) on the polishing results to overcome the effects of such defects on the substrates. Vickers indentation test was used to detect the effects of the material and surface temperature on the hardness of the disc and substrate, respectively. Machining was verified by conducting ball-disk friction wear and polishing experiments. The experimental results indicate that the material of the polished optical disc significantly affected β-Ga\u003csub\u003e2\u003c/sub\u003eO\u003csub\u003e3\u003c/sub\u003e(100) during surface processing. The higher the hardness of the polished optical disc, the greater is the material removal rate (\u003cem\u003eMRR\u003c/em\u003e) of substrate surface, and more serious is the surface cleavage phenomenon. A lead disc with lower hardness can be used to process β-Ga\u003csub\u003e2\u003c/sub\u003eO\u003csub\u003e3\u003c/sub\u003e(100) for realizing a higher \u003cem\u003eMRR\u003c/em\u003e, thereby effectively avoiding cleavage fractures and obtaining a surface roughness (\u003cem\u003eRa\u003c/em\u003e) and scratch depth of 3.4 nm and 18 nm, respectively. The hardness and mechanical strength of the substrate can be enhanced at low temperatures, and the indentation depth becomes smaller under the action of external forces, effectively inhibiting the formation of scratches and pits on the surface of the substrate during polishing. After polishing the substrate at 0 ℃, the \u003cem\u003eRa\u003c/em\u003e, scratch depth, and total number of cleavage pits were 2.2 nm, 14.3 nm, and 246, respectively. Compared with 25℃, Polishing the substrate at 0 ℃ decreased the \u003cem\u003eRa\u003c/em\u003e, scratch depth, and number of cleavage pits by 35.3, 20.6, and 34.9%, respectively. At 0 ℃, the substrate effectively avoided cleavage fracture and inhibited scratch and pit formation, thereby significantly improving the polishing effect.\u003c/p\u003e","manuscriptTitle":"Effects of polishing disc material and substrate surface temperature on the tribological behaviors and machining results of β-Ga2O3(100)","msid":"","msnumber":"","nonDraftVersions":[{"code":1,"date":"2024-01-17 04:21:26","doi":"10.21203/rs.3.rs-3846408/v1","editorialEvents":[{"type":"communityComments","content":0},{"type":"reviewerAgreed","content":"","date":"2024-01-15T11:06:59+00:00","index":0,"fulltext":""},{"type":"reviewersInvited","content":"","date":"2024-01-15T10:38:06+00:00","index":"","fulltext":""},{"type":"editorAssigned","content":"","date":"2024-01-11T07:31:06+00:00","index":"","fulltext":""},{"type":"submitted","content":"The International Journal of Advanced Manufacturing Technology","date":"2024-01-10T07:59:30+00:00","index":"","fulltext":""}],"status":"published","journal":{"display":true,"email":"[email protected]","identity":"the-international-journal-of-advanced-manufacturing-technology","isNatureJournal":false,"hasQc":true,"allowDirectSubmit":false,"externalIdentity":"jamt","sideBox":"Learn more about [The International Journal of Advanced Manufacturing Technology](https://www.springer.com/journal/170)","snPcode":"170","submissionUrl":"https://submission.nature.com/new-submission/170/3","title":"The International Journal of Advanced Manufacturing Technology","twitterHandle":"","acdcEnabled":true,"dfaEnabled":true,"editorialSystem":"em","reportingPortfolio":"Springer Hybrid","inReviewEnabled":true,"inReviewRevisionsEnabled":false}}],"origin":"","ownerIdentity":"79da5aa6-a417-41f4-852e-6f15d098dfb8","owner":[],"postedDate":"January 17th, 2024","published":true,"recentEditorialEvents":[],"rejectedJournal":[],"revision":"","amendment":"","status":"published-in-journal","subjectAreas":[],"tags":[],"updatedAt":"2024-07-27T00:35:12+00:00","versionOfRecord":{"articleIdentity":"rs-3846408","link":"https://doi.org/10.1007/s00170-024-14067-9","journal":{"identity":"the-international-journal-of-advanced-manufacturing-technology","isVorOnly":false,"title":"The International Journal of Advanced Manufacturing Technology"},"publishedOn":"2024-07-26 00:35:12","publishedOnDateReadable":"July 26th, 2024"},"versionCreatedAt":"2024-01-17 04:21:26","video":"","vorDoi":"10.1007/s00170-024-14067-9","vorDoiUrl":"https://doi.org/10.1007/s00170-024-14067-9","workflowStages":[]},"version":"v1","identity":"rs-3846408","journalConfig":"researchsquare"},"__N_SSP":true},"page":"/article/[identity]/[[...version]]","query":{"redirect":"/article/rs-3846408","identity":"rs-3846408","version":["v1"]},"buildId":"qtupq5eGEP_6zYnWcrvyt","isFallback":false,"isExperimentalCompile":false,"dynamicIds":[84888],"gssp":true,"scriptLoader":[]}