1D Modelling and Diagnostics of Low-Pressure Capacitively Coupled Radio-Frequency Argon Plasma

1D Modelling and Diagnostics of Low-Pressure Capacitively Coupled Radio-Frequency Argon Plasma | Research Square window.SnipcartSettings = { analytics: { enabled: false } }; (function() { var accessVector = localStorage.getItem('access_vector') || ''; window.dataLayer = window.dataLayer || []; if (accessVector) { window.dataLayer.push({ user: { profile: { profileInfo: { snid: accessVector } } } }); } })(); (function(w,d,s,l,i){w[l]=w[l]||[];w[l].push({'gtm.start':new Date().getTime(),event:'gtm.js'});var f=d.getElementsByTagName(s)[0],j=d.createElement(s),dl=l!='dataLayer'?'&l='+l:'';j.async=true;j.src='https://www.googletagmanager.com/gtm.js?id='+i+dl;f.parentNode.insertBefore(j,f);})(window,document,'script','dataLayer','GTM-K279D39R'); Browse Preprints In Review Journals COVID-19 Preprints AJE Video Bytes Research Tools Research Promotion AJE Professional Editing AJE Rubriq About Preprint Platform In Review Editorial Policies Our Team Advisory Board Help Center Sign In Submit a Preprint Cite Share Download PDF Research Article 1D Modelling and Diagnostics of Low-Pressure Capacitively Coupled Radio-Frequency Argon Plasma Sharona Atlas, Shani Har Lavan, Amir Kaplan, Avi Lehrer, Illya Rozenberg, and 2 more This is a preprint; it has not been peer reviewed by a journal. https://doi.org/ 10.21203/rs.3.rs-5381771/v1 This work is licensed under a CC BY 4.0 License Status: Under Review Version 1 posted 10 You are reading this latest preprint version Abstract We utilized a combination of experimental alongside data-driven and theoretical modelling techniques to study non-thermal plasma properties and observables including optical emission spectral intensities, electron temperature, species concentrations, degree of ionization, and reaction rates. As a case study we measured the plasma properties of Argon gas in the low-pressure regime using optical emission spectroscopy (OES) while varying plasma input power and gas flow rate. We used data-driven and drift-diffusion modeling techniques to obtain complementary information, including electron temperature, reduced electric field, and species densities. The calculated density number of excited argon has a linear correlation to measured emission intensity, and we found that the dominant effect on Ar I intensity is the applied power with the gas flow (or pressure) the secondary factor (77% and 20%, respectively). The electron temperature increases with power but decreases with flow (or pressure). Combining the measured and modelling results help to understand the cold plasma dynamics and chemistry towards more complex plasma chemistry applications. low-pressure plasma optical emission spectroscopy capacitively coupled plasma multivariate analysis drift-diffusion model Full Text Additional Declarations No competing interests reported. Supplementary Files SAArpaperSI.docx Cite Share Download PDF Status: Under Review Version 1 posted Editorial decision: Revision requested 05 Jan, 2025 Reviews received at journal 03 Jan, 2025 Reviews received at journal 25 Nov, 2024 Reviewers agreed at journal 15 Nov, 2024 Reviewers agreed at journal 06 Nov, 2024 Reviewers agreed at journal 06 Nov, 2024 Reviewers invited by journal 06 Nov, 2024 Editor assigned by journal 05 Nov, 2024 Submission checks completed at journal 05 Nov, 2024 First submitted to journal 03 Nov, 2024 You are reading this latest preprint version Research Square lets you share your work early, gain feedback from the community, and start making changes to your manuscript prior to peer review in a journal. As a division of Research Square Company, we’re committed to making research communication faster, fairer, and more useful. We do this by developing innovative software and high quality services for the global research community. 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Also discoverable on Platform About Our Team In Review Editorial Policies Advisory Board Help Center Resources Author Services Accessibility API Access RSS feed Manage Cookie Preferences © Research Square 2026 | ISSN 2693-5015 (online) Privacy Policy Terms of Service Do Not Sell My Personal Information {"props":{"pageProps":{"initialData":{"identity":"rs-5381771","acceptedTermsAndConditions":true,"allowDirectSubmit":false,"archivedVersions":[],"articleType":"Research Article","associatedPublications":[],"authors":[{"id":378490131,"identity":"81b080cc-ad20-4a40-8626-b68386b9033e","order_by":0,"name":"Sharona Atlas","email":"","orcid":"","institution":"Ben-Gurion University of the Negev","correspondingAuthor":false,"prefix":"","firstName":"Sharona","middleName":"","lastName":"Atlas","suffix":""},{"id":378490132,"identity":"00c4c9ef-1378-4587-99ba-7f06a852ecfe","order_by":1,"name":"Shani Har Lavan","email":"","orcid":"","institution":"Ben-Gurion University of the Negev","correspondingAuthor":false,"prefix":"","firstName":"Shani","middleName":"Har","lastName":"Lavan","suffix":""},{"id":378490133,"identity":"299935cb-b04d-4fb5-85f2-d571c8a2abfb","order_by":2,"name":"Amir Kaplan","email":"","orcid":"","institution":"Nuclear Research Center Negev","correspondingAuthor":false,"prefix":"","firstName":"Amir","middleName":"","lastName":"Kaplan","suffix":""},{"id":378490134,"identity":"38c08f08-6082-45f9-acc4-bf57089d5a44","order_by":3,"name":"Avi Lehrer","email":"","orcid":"","institution":"Ben-Gurion University of the Negev","correspondingAuthor":false,"prefix":"","firstName":"Avi","middleName":"","lastName":"Lehrer","suffix":""},{"id":378490135,"identity":"530c0a80-c4d5-4e0d-8710-cf7ebb33a86d","order_by":4,"name":"Illya Rozenberg","email":"","orcid":"","institution":"Ben-Gurion University of the Negev","correspondingAuthor":false,"prefix":"","firstName":"Illya","middleName":"","lastName":"Rozenberg","suffix":""},{"id":378490136,"identity":"c95a548d-3b9a-4c1a-9021-94b04e6e022b","order_by":5,"name":"Hao Zhao","email":"","orcid":"","institution":"Peking University","correspondingAuthor":false,"prefix":"","firstName":"Hao","middleName":"","lastName":"Zhao","suffix":""},{"id":378490137,"identity":"0810826d-803f-4f89-afb0-fcc1b52a8fa7","order_by":6,"name":"Joshua H. 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