Development of MEMS Pressure Sensor with High Proof Pressure for Multiple Discrete Adjustable Ranges up to 10...60 kPa

Development of MEMS Pressure Sensor with High Proof Pressure for Multiple Discrete Adjustable Ranges up to 10...60 kPa | Authorea try { document.documentElement.classList.add('js'); } catch (e) { } var _gaq = _gaq || []; _gaq.push(['_setAccount', 'G-8VDV14Y67G']); _gaq.push(['_trackPageview']); (function() { var ga = document.createElement('script'); ga.type = 'text/javascript'; ga.async = true; ga.src = ('https:' == document.location.protocol ? 'https://ssl' : 'http://www') + '.google-analytics.com/ga.js'; var s = document.getElementsByTagName('script')[0]; s.parentNode.insertBefore(ga, s); })(); Skip to main content Preprints Collections Wiley Open Research IET Open Research Ecological Society of Japan All Collections About About Authorea FAQs Contact Us Quick Search anywhere Search for preprint articles, keywords, etc. Search Search ADVANCED SEARCH SCROLL This is a preprint and has not been peer reviewed. Data may be preliminary. 2 March 2026 V1 Latest version Share on Development of MEMS Pressure Sensor with High Proof Pressure for Multiple Discrete Adjustable Ranges up to 10...60 kPa Author : Mikhail Basov 0000-0003-0798-4500 [email protected] Authors Info & Affiliations https://doi.org/10.22541/au.177247884.44873982/v1 Published IEEE Sensors Journal Version of record Peer review timeline 73 views 64 downloads Contents Abstract Supplementary Material Information & Authors Metrics & Citations View Options References Figures Tables Media Share Abstract The various application conditions of MEMS pressure sensors require achieving a wide range of specific parameters. The ability to save pressure sensor by repeated proof pressure is one of the important requirements. The research presents a new microassembly design for the piezoresistive pressure sensor chip for adjustable differential pressure ranges up to 10...60 kPa. The microassembly design contains stops on both sides of the chip to increase the proof pressure to Pproof = 1.5 MPa. Additionally, the microassembly also allows for significant improvement of mechanical decoupling of chip from packing and all existing mechanical connections. The research demonstrates the efficiency of using of thermocycling and barocycling for pressure sensor. In results, more than 120 samples of developed pressure sensor have sensitivity S = 0.61 ± 0.15 mV/V/kPa and low error for nonlinearity 2KNL < 0.20%/FS, mechanical hysteresis H < 0.10%/FS and mechanical repeatability R < 0.05%/FS, as well as for the effect of overload pressure dUPproof < 0.30%/FS and all-round compression with pressure of 16 MPa dUcomp < 0.15%/FS. The significant advantage of the microassembly design for removing the residual mechanical stresses (RMS) is also summarized in the achievement of relatively low uncompensated error for longterm stability during 1 year for the zero signal dU0 stab < 0.15 %/FS and sensitivity dU0 stab < 0.20/FS. Supplementary Material File (preprint- development of mems pressure sensor with high proof pressure for multiple discrete adjustable ranges up to 10---60 kpa.pdf) Download 913.62 KB Information & Authors Information Version history V1 Version 1 02 March 2026 Peer review timeline Published IEEE Sensors Journal Version of Record 1 Apr 2026 Published Copyright This work is licensed under a Creative Commons Attribution 4.0 International License Keywords engineering profession high proof pressure low error microassembly design pressure sensor residual mechanical stress Authors Affiliations Mikhail Basov 0000-0003-0798-4500 [email protected] View all articles by this author Metrics & Citations Metrics Article Usage 73 views 64 downloads .FvxKWukQNSOunydq8rnd { width: 100px; } Citations Download citation Mikhail Basov. Development of MEMS Pressure Sensor with High Proof Pressure for Multiple Discrete Adjustable Ranges up to 10...60 kPa. Authorea . 02 March 2026. DOI: https://doi.org/10.22541/au.177247884.44873982/v1 If you have the appropriate software installed, you can download article citation data to the citation manager of your choice. Simply select your manager software from the list below and click Download. For more information or tips please see 'Downloading to a citation manager' in the Help menu . Format Please select one from the list RIS (ProCite, Reference Manager) EndNote BibTex Medlars RefWorks Direct import Tips for downloading citations document.getElementById('citMgrHelpLink').addEventListener('click', function() { popupHelp(this.href); return false; }); $(".js__slcInclude").on("change", function(e){ if ($(this).val() == 'refworks') $('#direct').prop("checked", false); $('#direct').prop("disabled", ($(this).val() == 'refworks')); }); View Options View options PDF View PDF Figures Tables Media Share Share Share article link Copy Link Copied! Copying failed. 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