Electron Impact Ionization Cross-sections of CH3 and SiH3 Radicals Targets

Abstract Single differential cross sections as a function of secondary electron energy at fixed incident electron energies 100 and 200 eV for the targeted molecule CH3 and SiH3 have been evaluated by using a modified Jain-Khare semiempirical approach. The integral or total electron-impact ionization cross-sections and the averaged secondary electron energy from differential ionization cross sections are calculated for incident electron energy from ionization threshold to 5 keV regime. The temperature dependent ionization rate coefficient is also calculated using total ionization cross-sections and Maxwell-Boltzmann distribution of electron energy. The calculated values of total ionization cross sections corresponding to (e, 2e) processes for CH3 and SiH3 molecules are in good accord with available theoretical and experimental results.