复合结构静电感应晶体管的终端造型
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OA: closed
CC0
Abstract
为了克服几何形状(曲率效应)造成的边角电场对平面扩散结击穿性能的劣化效应,对应于静电感应器件的复合结构,采用限场环与切断环作为终端造型,使结边界处的耗尽层宽度反窄化效应而展宽,以分散电力线并降低表面电场。
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- openalex
- last seen: 2026-05-11T08:25:21.894461+00:00
License: CC0
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