Dynamic Behavior of T-beam Resonator With Repulsive Actuation

Abstract We introduce a MEMS resonator that uses a "T"-shape beam driven by repulsive force, of which the first advantage is to avoid pull-in instability; thus, high enough voltages can be applied to the MEMS system to tune the center frequency. A T-beam model is derived from the beam-paddle hypothesis, and theoretical analysis regarding both static and dynamic behaviors, including primary resonance and secondary resonance, is conducted. This study shows an electrostatic T-beam resonator's feasibility based on repulsive force and outlines its advantages over a traditional cantilever beam resonator. Additional micro-paddle to the micro-beam means larger surface for absorption of targeted analytes and lower natural frequency, but higher resonant responses. We present a thorough analysis of primary and parametric resonances, which can enhance the system signal-to noise ratio and response time. This design enables potential applications in MEMS mass-sensors, where a large area for attachment and a high resolution are often vital.