Capacitance Response of Concave Well Substrate MEMS Double Touch Mode Capacitive Pressure Sensor: Robust Design, Theoretical Modeling, Numerical Simulation and Performance Comparison

Touch Mode Capacitive Pressure Sensor (TMCPS) is very suitable for industrial applications where pressure sensing is necessary because of their linearity, mechanical robust nature and large overload protection from harsh industrial condition. This work proposes an introduction of a notch in the concave substrate for further improvement of the sensitivity of the sensor. Small deflection mode is utilized for the mathematical analysis of the design proposed and MATLAB is utilized for all the software simulations. The sensitivity of the proposed model is very high compared to other models with flat substrate. The analysis and simulation show significant increase in sensitivity in touch mode. The pressure at which the value of the capacitance saturates is also much higher than the designs stated in the literature. The analysis of concave substrate Double Touch Mode Capacitive Pressure Sensor (DTMCPS) will be helpful in designing new sensor for performance increase and to evaluate the behaviour of it.