Highly-Efficient thin Film LiNbO3 Surface Couplers Connected by Ridge-Waveguide Subwavelength Gratings

Highly-Efficient thin Film LiNbO3 Surface Couplers Connected by Ridge-Waveguide Subwavelength Gratings | Research Square window.SnipcartSettings = { analytics: { enabled: false } }; (function() { var accessVector = localStorage.getItem('access_vector') || ''; window.dataLayer = window.dataLayer || []; if (accessVector) { window.dataLayer.push({ user: { profile: { profileInfo: { snid: accessVector } } } }); } })(); (function(w,d,s,l,i){w[l]=w[l]||[];w[l].push({'gtm.start':new Date().getTime(),event:'gtm.js'});var f=d.getElementsByTagName(s)[0],j=d.createElement(s),dl=l!='dataLayer'?'&l='+l:'';j.async=true;j.src='https://www.googletagmanager.com/gtm.js?id='+i+dl;f.parentNode.insertBefore(j,f);})(window,document,'script','dataLayer','GTM-K279D39R'); Browse Preprints In Review Journals COVID-19 Preprints AJE Video Bytes Research Tools Research Promotion AJE Professional Editing AJE Rubriq About Preprint Platform In Review Editorial Policies Our Team Advisory Board Help Center Sign In Submit a Preprint Cite Share Download PDF Research Article Highly-Efficient thin Film LiNbO3 Surface Couplers Connected by Ridge-Waveguide Subwavelength Gratings Sipan Yang, Jinbin Xu, Yaqian Li, Liying Wu, Xueling Quan, Liucheng Fu, and 3 more This is a preprint; it has not been peer reviewed by a journal. https://doi.org/ 10.21203/rs.3.rs-265413/v1 This work is licensed under a CC BY 4.0 License Status: Published Journal Publication published 02 Aug, 2021 Read the published version in Journal of Materials Science: Materials in Electronics → Version 1 posted You are reading this latest preprint version Abstract The ridge waveguide integrated grating couplers (GCs) in lithium niobate on insulator (LiNbO 3 , LNOI) were designed, fabricated and characterized. Two ends of the gratings structures were connected through the middle photonic rib-waveguide of a sub-micrometric-diameter, which was nanostructured with the geometry of side-wall corrugated subwavelength gratings structure. A high coupling efficiency of -5.1 dB for the best thin film LiNbO 3 (TFLN) grating coupler was measured at the telecommunication wavelength of 1561 nm for quasi-transverse-electric (TE) polarized signals, with a broad 3-dB optical bandwidth of wider than 95 nm. All the devices structure patterns for the integrated LNOI GCs could be simultaneously defined by one step of electron-beam lithography, and then easily fabricated by the dry-etching processes. This compact component exhibited magnificent performance, and might show the potential functionalities for the TFLN-based integrated optical waveguide devices. Materials Engineering film lithium niobate grating coupler ridge waveguide subwavelength grating Figures Figure 1 Figure 2 Figure 3 Figure 4 Figure 5 Full Text Due to technical limitations, full-text HTML conversion of this manuscript could not be completed. However, the latest manuscript can be downloaded and accessed as a PDF. Cite Share Download PDF Status: Published Journal Publication published 02 Aug, 2021 Read the published version in Journal of Materials Science: Materials in Electronics → Version 1 posted You are reading this latest preprint version Research Square lets you share your work early, gain feedback from the community, and start making changes to your manuscript prior to peer review in a journal. As a division of Research Square Company, we’re committed to making research communication faster, fairer, and more useful. We do this by developing innovative software and high quality services for the global research community. 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Also discoverable on Platform About Our Team In Review Editorial Policies Advisory Board Help Center Resources Author Services Accessibility API Access RSS feed Manage Cookie Preferences © Research Square 2026 | ISSN 2693-5015 (online) Privacy Policy Terms of Service Do Not Sell My Personal Information {"props":{"pageProps":{"initialData":{"identity":"rs-265413","acceptedTermsAndConditions":true,"allowDirectSubmit":true,"archivedVersions":[],"articleType":"Research Article","associatedPublications":[],"authors":[{"id":15286281,"identity":"0dadd3df-3ff1-4d8a-86f8-d2f58b77660d","order_by":0,"name":"Sipan Yang","email":"","orcid":"https://orcid.org/0000-0002-8833-4149","institution":"Shanghai Jiao Tong University","correspondingAuthor":false,"prefix":"","firstName":"Sipan","middleName":"","lastName":"Yang","suffix":""},{"id":15286282,"identity":"4d4e838f-4320-4bee-9d1b-449bc6a437a3","order_by":1,"name":"Jinbin Xu","email":"","orcid":"","institution":"Shanghai Jiao Tong University","correspondingAuthor":false,"prefix":"","firstName":"Jinbin","middleName":"","lastName":"Xu","suffix":""},{"id":15286283,"identity":"c816b9be-0ce1-4650-b1a4-76d991867744","order_by":2,"name":"Yaqian Li","email":"","orcid":"","institution":"Shanghai Jiao Tong University","correspondingAuthor":false,"prefix":"","firstName":"Yaqian","middleName":"","lastName":"Li","suffix":""},{"id":15286284,"identity":"26d2e594-ada3-4665-a66e-fe50b048513f","order_by":3,"name":"Liying Wu","email":"","orcid":"","institution":"Shanghai Jiao Tong University","correspondingAuthor":false,"prefix":"","firstName":"Liying","middleName":"","lastName":"Wu","suffix":""},{"id":15286285,"identity":"bea9ac06-de54-4ff6-89a0-aa1e0b643a44","order_by":4,"name":"Xueling Quan","email":"","orcid":"","institution":"Shanghai Jiao Tong University","correspondingAuthor":false,"prefix":"","firstName":"Xueling","middleName":"","lastName":"Quan","suffix":""},{"id":15286286,"identity":"440faa5c-bb68-4297-966b-a51d8878b0e3","order_by":5,"name":"Liucheng Fu","email":"","orcid":"","institution":"Shanghai Jiao Tong University","correspondingAuthor":false,"prefix":"","firstName":"Liucheng","middleName":"","lastName":"Fu","suffix":""},{"id":15286287,"identity":"319e616f-5d16-4727-b1c3-feaae76d40c4","order_by":6,"name":"Min Liu","email":"","orcid":"","institution":"Shanghai Jiao Tong University","correspondingAuthor":false,"prefix":"","firstName":"Min","middleName":"","lastName":"Liu","suffix":""},{"id":15286288,"identity":"336090e4-fbba-4665-ad7d-0cca3478503d","order_by":7,"name":"Zhengjie Wang","email":"","orcid":"","institution":"Shanghai Jiao Tong University","correspondingAuthor":false,"prefix":"","firstName":"Zhengjie","middleName":"","lastName":"Wang","suffix":""},{"id":15286289,"identity":"7c6acdca-8237-4b6f-87f2-4ed9979ca30c","order_by":8,"name":"Xiulan Cheng","email":"data:image/png;base64,iVBORw0KGgoAAAANSUhEUgAAAZAAAAAyAQMAAABI0h/eAAAABlBMVEX///8AAABVwtN+AAAACXBIWXMAAA7EAAAOxAGVKw4bAAAA4ElEQVRIiWNgGAWjYDACdgY2ECXHwHAARDMToYUZosWYgeEwiVoSGyCqidBicJj52YOPO2rT5zeePybBUGGd2MB+9gBeLZLNbOaGM88cz91w4DCbBMOZ9MQGnrwEvFr4mXnYpHnbjuVuYABqYWw7nNggwWOAVwsbSMvftmPp8g0gLf+I0AK2hbGtJoEB5DDGBiK0AP1iJtnbdsAQ6Bdji4Rj6cZtPDn4tRgcb34m8bOtTl5+xsGHNz7UWMv2s5/BrwUKgNEocYCBIQHkO2LUA0Ed0FcNRKodBaNgFIyCEQcA7IZA2bInWjwAAAAASUVORK5CYII=","orcid":"https://orcid.org/0000-0002-2552-464X","institution":"Shanghai Jiao Tong University","correspondingAuthor":true,"prefix":"","firstName":"Xiulan","middleName":"","lastName":"Cheng","suffix":""}],"badges":[],"createdAt":"2021-02-22 04:37:39","currentVersionCode":1,"declarations":"","doi":"10.21203/rs.3.rs-265413/v1","doiUrl":"https://doi.org/10.21203/rs.3.rs-265413/v1","draftVersion":[],"editorialEvents":[{"content":"https://doi.org/10.1007/s10854-021-06599-7","type":"published","date":"2021-08-02T15:04:28+00:00"}],"editorialNote":"","failedWorkflow":false,"files":[{"id":6825277,"identity":"b9a0aded-6e9c-4377-94a9-977300cb5c6b","added_by":"auto","created_at":"2021-03-11 01:21:40","extension":"jpg","order_by":1,"title":"Figure 1","display":"","copyAsset":false,"role":"figure","size":81638,"visible":true,"origin":"","legend":"Schematic of the proposed LNOI integrated GCs and the simulation details. (a) The top-view of ridge waveguide GCs integrated with SWG structure; (b) The simulated transmission spectra were recorded by the monitors as displayed with different color arrows, and the scanned transmissivity was plotted; (c) The simulated transverse-electric fields (Ez) distribution of light mode at 1550 nm in the middle photonic waveguide.","description":"","filename":"1.jpg","url":"https://assets-eu.researchsquare.com/files/rs-265413/v1/34ad0a97d02f64a904c86118.jpg"},{"id":6825657,"identity":"c16c5a2b-e161-4c14-bee5-6f1edb600e60","added_by":"auto","created_at":"2021-03-11 01:24:40","extension":"jpg","order_by":2,"title":"Figure 2","display":"","copyAsset":false,"role":"figure","size":69794,"visible":true,"origin":"","legend":"Optical properties simulations for the proposed GCs. (a) The simulated light mode distributions of the x-cut\nLNOI integrated GCs operated at 1550 nm corresponding to a maximum CE. The origin of the coordinate axes was\nlocated at the leftmost end of the left taper in the model, and the input source of fiber core was launched at x=+5.1 μm\nand y=-7.8 μm; (b) The simulated transmission spectra were recorded by the monitors as displayed in Fig. 1(b), and\nthe scanned transmissivity was extracted and plotted with M1 (cyan curve), M2 (orange curve), M3 (purple curve) and\nM4 (green curve), respectively.","description":"","filename":"2.jpg","url":"https://assets-eu.researchsquare.com/files/rs-265413/v1/967ec7e5c1f773e981f07f97.jpg"},{"id":6825279,"identity":"be7c35a5-9946-484f-8cc6-4c5645632874","added_by":"auto","created_at":"2021-03-11 01:21:40","extension":"jpg","order_by":3,"title":"Figure 3","display":"","copyAsset":false,"role":"figure","size":74743,"visible":true,"origin":"","legend":"The structure characterizations for the fabricated LNOI devices. (a) Optical image of the fabricated GCs and taper structure; (b) Enlarged LSM optical microscope graph of the uniform gratings layout; (c) SEM image of the partial device structure embedded with waveguide SWG.","description":"","filename":"3.jpg","url":"https://assets-eu.researchsquare.com/files/rs-265413/v1/77ce0fe88a08cae515eff6f2.jpg"},{"id":6824858,"identity":"c5bc5ed3-7367-4019-8229-4f3aca5190b5","added_by":"auto","created_at":"2021-03-11 01:18:40","extension":"jpg","order_by":4,"title":"Figure 4","display":"","copyAsset":false,"role":"figure","size":48786,"visible":true,"origin":"","legend":"Schematic of the optical testing systems employing several individual optical fibers. D. U. T: device under test.","description":"","filename":"4.jpg","url":"https://assets-eu.researchsquare.com/files/rs-265413/v1/5b874fc89ddb32e9387a37d6.jpg"},{"id":6825280,"identity":"67c5d5af-0abd-4b9a-ac2b-423bc1e1dcfe","added_by":"auto","created_at":"2021-03-11 01:21:40","extension":"jpg","order_by":5,"title":"Figure 5","display":"","copyAsset":false,"role":"figure","size":80003,"visible":true,"origin":"","legend":"The simulated (black line) and experimentally measured transmissivities of the ridge-waveguide GCs.","description":"","filename":"5.jpg","url":"https://assets-eu.researchsquare.com/files/rs-265413/v1/871d258523bd0173dee72033.jpg"},{"id":13602892,"identity":"5b8b797d-0fb9-420a-a876-5f868e49079a","added_by":"auto","created_at":"2021-09-17 05:53:18","extension":"pdf","order_by":1,"title":"","display":"","copyAsset":false,"role":"manuscript-pdf","size":703389,"visible":true,"origin":"","legend":"","description":"","filename":"Manuscriptysp.pdf","url":"https://assets-eu.researchsquare.com/files/rs-265413/v1_covered.pdf"},{"id":6825957,"identity":"740769f2-74d4-4b95-95bb-b6bd0aa64a39","added_by":"auto","created_at":"2021-03-11 01:27:47","extension":"pdf","order_by":1,"title":"","display":"","copyAsset":false,"role":"manuscript-pdf","size":449678,"visible":true,"origin":"","legend":"","description":"","filename":"Manuscriptysp.pdf","url":"https://assets-eu.researchsquare.com/files/rs-265413/v1_stamped.pdf"}],"financialInterests":"","formattedTitle":"\u003cp\u003eHighly-Efficient thin Film LiNbO3 Surface Couplers Connected by Ridge-Waveguide Subwavelength Gratings\u003c/p\u003e","fulltext":[{"header":"Full Text","content":"Due to technical limitations, full-text HTML conversion of this manuscript could not be completed. However, the latest manuscript can be downloaded and \u003ca href='/article/rs-265413/latest.pdf' target='_blank'\u003e accessed as a PDF.\u003c/a\u003e"}],"fulltextSource":"","fullText":"","funders":[],"hasAdminPriorityOnWorkflow":false,"hasManuscriptDocX":false,"hasOptedInToPreprint":true,"hasPassedJournalQc":"","hasAnyPriority":false,"hideJournal":true,"highlight":"","institution":"","isAcceptedByJournal":true,"isAuthorSuppliedPdf":true,"isDeskRejected":"","isHiddenFromSearch":false,"isInQc":false,"isInWorkflow":true,"isPdf":false,"isPdfUpToDate":true,"isWithdrawnOrRetracted":false,"journal":{"display":true,"email":"[email protected]","identity":"researchsquare","isNatureJournal":false,"hasQc":true,"allowDirectSubmit":true,"externalIdentity":"","sideBox":"","snPcode":"","submissionUrl":"/submission","title":"Research Square","twitterHandle":"researchsquare","acdcEnabled":true,"dfaEnabled":false,"editorialSystem":"","reportingPortfolio":"","inReviewEnabled":false,"inReviewRevisionsEnabled":true},"keywords":"film, lithium niobate, grating coupler, ridge waveguide, subwavelength grating","lastPublishedDoi":"10.21203/rs.3.rs-265413/v1","lastPublishedDoiUrl":"https://doi.org/10.21203/rs.3.rs-265413/v1","license":{"name":"CC BY 4.0","url":"https://creativecommons.org/licenses/by/4.0/"},"manuscriptAbstract":"The ridge waveguide integrated grating couplers (GCs) in lithium niobate on insulator (LiNbO 3 , LNOI) were designed, fabricated and characterized. Two ends of the gratings structures were connected through the middle photonic rib-waveguide of a sub-micrometric-diameter, which was nanostructured with the geometry of side-wall corrugated subwavelength gratings structure. A high coupling efficiency of -5.1 dB for the best thin film LiNbO 3 (TFLN) grating coupler was measured at the telecommunication wavelength of 1561 nm for quasi-transverse-electric (TE) polarized signals, with a broad 3-dB optical bandwidth of wider than 95 nm. All the devices structure patterns for the integrated LNOI GCs could be simultaneously defined by one step of electron-beam lithography, and then easily fabricated by the dry-etching processes. This compact component exhibited magnificent performance, and might show the potential functionalities for the TFLN-based integrated optical waveguide devices.","manuscriptTitle":"Highly-Efficient thin Film LiNbO3 Surface Couplers Connected by Ridge-Waveguide Subwavelength Gratings","msid":"","msnumber":"","nonDraftVersions":[{"code":1,"date":"2021-03-11 01:18:39","doi":"10.21203/rs.3.rs-265413/v1","editorialEvents":[{"type":"communityComments","content":0}],"status":"published","journal":{"display":true,"email":"[email protected]","identity":"researchsquare","isNatureJournal":false,"hasQc":true,"allowDirectSubmit":true,"externalIdentity":"","sideBox":"","snPcode":"","submissionUrl":"/submission","title":"Research Square","twitterHandle":"researchsquare","acdcEnabled":true,"dfaEnabled":false,"editorialSystem":"","reportingPortfolio":"","inReviewEnabled":false,"inReviewRevisionsEnabled":true}}],"origin":"","ownerIdentity":"76269e6c-099f-41df-a2ae-c4094e00dab7","owner":[],"postedDate":"March 11th, 2021","published":true,"recentEditorialEvents":[],"rejectedJournal":[],"revision":"","amendment":"","status":"posted","subjectAreas":[{"id":2880496,"name":"Materials Engineering"}],"tags":[],"updatedAt":"2021-08-22T15:30:52+00:00","versionOfRecord":{"articleIdentity":"rs-265413","link":"https://doi.org/10.1007/s10854-021-06599-7","journal":{"identity":"journal-of-materials-science-materials-in-electronics","isVorOnly":false,"title":"Journal of Materials Science: Materials in Electronics"},"publishedOn":"2021-08-02 15:04:28","publishedOnDateReadable":"August 2nd, 2021"},"versionCreatedAt":"2021-03-11 01:18:39","video":"","vorDoi":"10.1007/s10854-021-06599-7","vorDoiUrl":"https://doi.org/10.1007/s10854-021-06599-7","workflowStages":[]},"version":"v1","identity":"rs-265413","journalConfig":"researchsquare"},"__N_SSP":true},"page":"/article/[identity]/[[...version]]","query":{"redirect":"/article/rs-265413","identity":"rs-265413","version":["v1"]},"buildId":"_2-kVJe1T_tPrBINL-cwx","isFallback":false,"isExperimentalCompile":false,"dynamicIds":[84888],"gssp":true,"scriptLoader":[]}