Frequency-Angle Decoupling Design for Grid-Etched Piezoelectric MEMS Cantilevers and its Application to Quasi-Static Micromirrors

Frequency-Angle Decoupling Design for Grid-Etched Piezoelectric MEMS Cantilevers and its Application to Quasi-Static Micromirrors | Research Square window.SnipcartSettings = { analytics: { enabled: false } }; (function() { var accessVector = localStorage.getItem('access_vector') || ''; window.dataLayer = window.dataLayer || []; if (accessVector) { window.dataLayer.push({ user: { profile: { profileInfo: { snid: accessVector } } } }); } })(); (function(w,d,s,l,i){w[l]=w[l]||[];w[l].push({'gtm.start':new Date().getTime(),event:'gtm.js'});var f=d.getElementsByTagName(s)[0],j=d.createElement(s),dl=l!='dataLayer'?'&l='+l:'';j.async=true;j.src='https://www.googletagmanager.com/gtm.js?id='+i+dl;f.parentNode.insertBefore(j,f);})(window,document,'script','dataLayer','GTM-K279D39R'); Browse Preprints In Review Journals COVID-19 Preprints AJE Video Bytes Research Tools Research Promotion AJE Professional Editing AJE Rubriq About Preprint Platform In Review Editorial Policies Our Team Advisory Board Help Center Sign In Submit a Preprint Cite Share Download PDF Article Frequency-Angle Decoupling Design for Grid-Etched Piezoelectric MEMS Cantilevers and its Application to Quasi-Static Micromirrors Lihao Wang, Wenli Xue, Yongquan Su, Wanzhu Qiao, Yichen Liu, Yi Yang, and 6 more This is a preprint; it has not been peer reviewed by a journal. https://doi.org/ 10.21203/rs.3.rs-8106460/v1 This work is licensed under a CC BY 4.0 License Status: Under Review Version 1 posted 9 You are reading this latest preprint version Abstract Micro-electro-mechanical systems (MEMS) cantilever actuators are pivotal in applications ranging from micro-optics to precision manipulation. However, their performance is fundamentally constrained by a trade-off between dynamic response and static deformation. To address this limitation, this paper presents a segmented grid-etched technique for MEMS cantilever actuators that decouples the resonant frequency from the tilting angle and displacement. The proposed approach strategically modulates the stiffness and mass distribution along the cantilever by etching grid patterns on the segment near the free end, thereby creating a compliant zone for large deformation while preserving the stiffness of the segment near the fixed end to maintain a high resonant frequency. The proposed cantilevers were fabricated using a Cavity SOI-based Single Piezoelectric Layer Double Release (C-SSD) process, achieving a 100% increase in tip inclination angle and a 54% increase in tip displacement, while maintaining a resonant frequency equivalent to that of a conventional uniform cantilever. Additionally, the practical application of this approach is demonstrated through its application to a biaxial piezoelectric micromirror that integrates resonant motion for the fast horizontal axis and quasi-static motion for the slow vertical axis. Notably, the grid-etched structure on the slow axis enhances the optical scan angle by 257% and the frequency-angle product by 64%, achieving a field of view (FOV) of 25°. Furthermore, the successful implementation of this grid-etched cantilever structure in a micromirror validates its potential as a general-purpose design strategy for a wide range of MEMS cantilever actuators. Physical sciences/Engineering/Electrical and electronic engineering Physical sciences/Optics and photonics/Applied optics/Optical sensors MEMS actuator Grid-etched cantilever Frequency-angle decoupling cavity SOI Micromirror Full Text Additional Declarations There is no conflict of interest Cite Share Download PDF Status: Under Review Version 1 posted Editorial decision: revise 25 Jan, 2026 Review # 2 received at journal 22 Jan, 2026 Reviewer # 2 agreed at journal 06 Jan, 2026 Review # 1 received at journal 04 Jan, 2026 Reviewer # 1 agreed at journal 12 Dec, 2025 Reviewers invited by journal 21 Nov, 2025 Submission checks completed at journal 14 Nov, 2025 Editor assigned by journal 13 Nov, 2025 First submitted to journal 13 Nov, 2025 You are reading this latest preprint version Research Square lets you share your work early, gain feedback from the community, and start making changes to your manuscript prior to peer review in a journal. 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Also discoverable on Platform About Our Team In Review Editorial Policies Advisory Board Help Center Resources Author Services Accessibility API Access RSS feed Manage Cookie Preferences © Research Square 2026 | ISSN 2693-5015 (online) Privacy Policy Terms of Service Do Not Sell My Personal Information {"props":{"pageProps":{"initialData":{"identity":"rs-8106460","acceptedTermsAndConditions":true,"allowDirectSubmit":false,"archivedVersions":[],"articleType":"Article","associatedPublications":[],"authors":[{"id":548568255,"identity":"b652762e-684e-4fdf-ac82-b1ba23e32051","order_by":0,"name":"Lihao 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Micromirrors","fulltext":[],"fulltextSource":"","fullText":"","funders":[],"hasAdminPriorityOnWorkflow":false,"hasManuscriptDocX":false,"hasOptedInToPreprint":true,"hasPassedJournalQc":"","hasAnyPriority":false,"hideJournal":false,"highlight":"","institution":"","isAcceptedByJournal":true,"isAuthorSuppliedPdf":true,"isDeskRejected":"","isHiddenFromSearch":false,"isInQc":false,"isInWorkflow":false,"isPdf":true,"isPdfUpToDate":true,"isWithdrawnOrRetracted":false,"journal":{"display":true,"email":"[email protected]","identity":"microsystems-and-nanoengineering","isNatureJournal":false,"hasQc":false,"allowDirectSubmit":false,"externalIdentity":"micronano","sideBox":"Learn more about [Microsystems \u0026 Nanoengineering](http://www.nature.com/micronano/)","snPcode":"41378","submissionUrl":"https://mts-micronano.nature.com/","title":"Microsystems \u0026 Nanoengineering","twitterHandle":"","acdcEnabled":true,"dfaEnabled":true,"editorialSystem":"ejp","reportingPortfolio":"Nature AJ","inReviewEnabled":true,"inReviewRevisionsEnabled":true},"keywords":"MEMS actuator, Grid-etched cantilever, Frequency-angle decoupling, cavity SOI, Micromirror","lastPublishedDoi":"10.21203/rs.3.rs-8106460/v1","lastPublishedDoiUrl":"https://doi.org/10.21203/rs.3.rs-8106460/v1","license":{"name":"CC BY 4.0","url":"https://creativecommons.org/licenses/by/4.0/"},"manuscriptAbstract":"\u003cp\u003eMicro-electro-mechanical systems (MEMS) cantilever actuators are pivotal in applications ranging from micro-optics to precision manipulation. However, their performance is fundamentally constrained by a trade-off between dynamic response and static deformation. To address this limitation, this paper presents a segmented grid-etched technique for MEMS cantilever actuators that decouples the resonant frequency from the tilting angle and displacement. The proposed approach strategically modulates the stiffness and mass distribution along the cantilever by etching grid patterns on the segment near the free end, thereby creating a compliant zone for large deformation while preserving the stiffness of the segment near the fixed end to maintain a high resonant frequency. The proposed cantilevers were fabricated using a Cavity SOI-based Single Piezoelectric Layer Double Release (C-SSD) process, achieving a 100% increase in tip inclination angle and a 54% increase in tip displacement, while maintaining a resonant frequency equivalent to that of a conventional uniform cantilever. Additionally, the practical application of this approach is demonstrated through its application to a biaxial piezoelectric micromirror that integrates resonant motion for the fast horizontal axis and quasi-static motion for the slow vertical axis. Notably, the grid-etched structure on the slow axis enhances the optical scan angle by 257% and the frequency-angle product by 64%, achieving a field of view (FOV) of 25\u0026deg;. Furthermore, the successful implementation of this grid-etched cantilever structure in a micromirror validates its potential as a general-purpose design strategy for a wide range of MEMS cantilever actuators.\u003c/p\u003e","manuscriptTitle":"Frequency-Angle Decoupling Design for Grid-Etched Piezoelectric MEMS Cantilevers and its Application to Quasi-Static Micromirrors","msid":"","msnumber":"","nonDraftVersions":[{"code":1,"date":"2025-11-28 19:13:46","doi":"10.21203/rs.3.rs-8106460/v1","editorialEvents":[{"type":"communityComments","content":0},{"type":"decision","content":"revise","date":"2026-01-26T00:37:43+00:00","index":"","fulltext":""},{"type":"editorInvitedReview","content":"This content is not available.","date":"2026-01-22T16:11:41+00:00","index":2,"fulltext":"This content is not available."},{"type":"reviewerAgreed","content":"This content is not available.","date":"2026-01-06T17:46:47+00:00","index":2,"fulltext":"This content is not available."},{"type":"editorInvitedReview","content":"This content is not available.","date":"2026-01-04T19:20:11+00:00","index":1,"fulltext":"This content is not available."},{"type":"reviewerAgreed","content":"This content is not available.","date":"2025-12-12T14:54:56+00:00","index":1,"fulltext":"This content is not available."},{"type":"reviewersInvited","content":"","date":"2025-11-21T07:54:10+00:00","index":"","fulltext":""},{"type":"checksComplete","content":"","date":"2025-11-14T06:40:06+00:00","index":"","fulltext":""},{"type":"editorAssigned","content":"","date":"2025-11-13T13:54:27+00:00","index":"","fulltext":""},{"type":"submitted","content":"Microsystems \u0026 Nanoengineering","date":"2025-11-13T13:54:26+00:00","index":"","fulltext":""}],"status":"published","journal":{"display":true,"email":"[email protected]","identity":"microsystems-and-nanoengineering","isNatureJournal":false,"hasQc":false,"allowDirectSubmit":false,"externalIdentity":"micronano","sideBox":"Learn more about [Microsystems \u0026 Nanoengineering](http://www.nature.com/micronano/)","snPcode":"41378","submissionUrl":"https://mts-micronano.nature.com/","title":"Microsystems \u0026 Nanoengineering","twitterHandle":"","acdcEnabled":true,"dfaEnabled":true,"editorialSystem":"ejp","reportingPortfolio":"Nature AJ","inReviewEnabled":true,"inReviewRevisionsEnabled":true}}],"origin":"","ownerIdentity":"26def466-cb94-45c4-a40e-a752fd106940","owner":[],"postedDate":"November 28th, 2025","published":true,"recentEditorialEvents":[],"rejectedJournal":[],"revision":"","amendment":"","status":"under-review","subjectAreas":[{"id":58368659,"name":"Physical sciences/Engineering/Electrical and electronic engineering"},{"id":58368660,"name":"Physical sciences/Optics and photonics/Applied optics/Optical sensors"}],"tags":[],"updatedAt":"2026-04-14T00:45:25+00:00","versionOfRecord":[],"versionCreatedAt":"2025-11-28 19:13:46","video":"","vorDoi":"","vorDoiUrl":"","workflowStages":[]},"version":"v1","identity":"rs-8106460","journalConfig":"researchsquare"},"__N_SSP":true},"page":"/article/[identity]/[[...version]]","query":{"redirect":"/article/rs-8106460","identity":"rs-8106460","version":["v1"]},"buildId":"8U1c8b4HqxoKbykW_rLl7","isFallback":false,"isExperimentalCompile":false,"dynamicIds":[84888],"gssp":true,"scriptLoader":[]}