Design and simulation of a MEMS single proof mass capacitive accelerometer with integral parallel-plate capacitors

Design and simulation of a MEMS single proof mass capacitive accelerometer with integral parallel-plate capacitors | Research Square window.SnipcartSettings = { analytics: { enabled: false } }; (function() { var accessVector = localStorage.getItem('access_vector') || ''; window.dataLayer = window.dataLayer || []; if (accessVector) { window.dataLayer.push({ user: { profile: { profileInfo: { snid: accessVector } } } }); } })(); (function(w,d,s,l,i){w[l]=w[l]||[];w[l].push({'gtm.start':new Date().getTime(),event:'gtm.js'});var f=d.getElementsByTagName(s)[0],j=d.createElement(s),dl=l!='dataLayer'?'&l='+l:'';j.async=true;j.src='https://www.googletagmanager.com/gtm.js?id='+i+dl;f.parentNode.insertBefore(j,f);})(window,document,'script','dataLayer','GTM-K279D39R'); Browse Preprints In Review Journals COVID-19 Preprints AJE Video Bytes Research Tools Research Promotion AJE Professional Editing AJE Rubriq About Preprint Platform In Review Editorial Policies Our Team Advisory Board Help Center Sign In Submit a Preprint Cite Share Download PDF Research Article Design and simulation of a MEMS single proof mass capacitive accelerometer with integral parallel-plate capacitors Xinyu Zou, Guijuan Zhao, Zonglin Weng, Guipeng Liu This is a preprint; it has not been peer reviewed by a journal. https://doi.org/ 10.21203/rs.3.rs-6861503/v1 This work is licensed under a CC BY 4.0 License Status: Under Review Version 1 posted 8 You are reading this latest preprint version Abstract This work presents an accelerometer that uses capacitive sensing mechanisms. In the proposed structure, the accelerations are sensed by differential capacitances. This structure has a size of 500um×450um×6um with a measurement range of ± 50g. Simulated results showed that the sensitivities of the accelerometer are 3.04mV/g, and 0.034 mV/g for the Y-axis and Z-axis, respectively. Moreover, the cross-axis sensitivities of the structure are less than 1%. Brownian noises in each direction are 0.9 µg/√Hz for the y-axis, and 1.5 µg/√Hz for the z-axis. In this study, we employed the finite element software as a simulation tool to analyze the characteristics of accelerometer . Full Text Additional Declarations No competing interests reported. Cite Share Download PDF Status: Under Review Version 1 posted Editorial decision: Revision requested 01 Feb, 2026 Reviewers agreed at journal 27 Oct, 2025 Reviews received at journal 08 Jul, 2025 Reviewers agreed at journal 29 Jun, 2025 Reviewers invited by journal 27 Jun, 2025 Editor assigned by journal 12 Jun, 2025 Submission checks completed at journal 10 Jun, 2025 First submitted to journal 10 Jun, 2025 You are reading this latest preprint version Research Square lets you share your work early, gain feedback from the community, and start making changes to your manuscript prior to peer review in a journal. As a division of Research Square Company, we’re committed to making research communication faster, fairer, and more useful. We do this by developing innovative software and high quality services for the global research community. Our growing team is made up of researchers and industry professionals working together to solve the most critical problems facing scientific publishing. Also discoverable on Platform About Our Team In Review Editorial Policies Advisory Board Help Center Resources Author Services Accessibility API Access RSS feed Manage Cookie Preferences © Research Square 2026 | ISSN 2693-5015 (online) Privacy Policy Terms of Service Do Not Sell My Personal Information {"props":{"pageProps":{"initialData":{"identity":"rs-6861503","acceptedTermsAndConditions":true,"allowDirectSubmit":false,"archivedVersions":[],"articleType":"Research Article","associatedPublications":[],"authors":[{"id":478006328,"identity":"1423bc45-6b40-441a-8717-243b3608bdbe","order_by":0,"name":"Xinyu Zou","email":"","orcid":"","institution":"Lanzhou University","correspondingAuthor":false,"prefix":"","firstName":"Xinyu","middleName":"","lastName":"Zou","suffix":""},{"id":478006330,"identity":"a4608298-f553-426e-93b1-211c52846f01","order_by":1,"name":"Guijuan Zhao","email":"","orcid":"","institution":"Lanzhou University","correspondingAuthor":false,"prefix":"","firstName":"Guijuan","middleName":"","lastName":"Zhao","suffix":""},{"id":478006331,"identity":"13bdc033-d99d-4128-8adb-77e40d557df3","order_by":2,"name":"Zonglin Weng","email":"","orcid":"","institution":"Lanzhou University","correspondingAuthor":false,"prefix":"","firstName":"Zonglin","middleName":"","lastName":"Weng","suffix":""},{"id":478006333,"identity":"82a56cbf-ea98-4b0e-8490-24db524bb5f6","order_by":3,"name":"Guipeng Liu","email":"data:image/png;base64,iVBORw0KGgoAAAANSUhEUgAAAZAAAAAyAQMAAABI0h/eAAAABlBMVEX///8AAABVwtN+AAAACXBIWXMAAA7EAAAOxAGVKw4bAAAAtElEQVRIiWNgGAWjYBACPmYQWWEB5kgQpYUNrOWMBClaQARjG0la2HmMXxfOk7A3OMB88DYPg10eEQ7jMbOeuU2C2eAAW7I1D0NyMVFajHm3SbAZHOAxk+ZhOJDYQJyWORI8Bgf4vxGtxfgxb4OEBNAWNmK1sJUxzzgmYSB5mM3Yco5BMmEt/PyHN38uqLGx5zve/PDGmwo7wlpAFkmDKXCcGhChHqT2M3HqRsEoGAWjYMQCAE4tK1G/6UDAAAAAAElFTkSuQmCC","orcid":"","institution":"Lanzhou University","correspondingAuthor":true,"prefix":"","firstName":"Guipeng","middleName":"","lastName":"Liu","suffix":""}],"badges":[],"createdAt":"2025-06-10 09:38:23","currentVersionCode":1,"declarations":"","doi":"10.21203/rs.3.rs-6861503/v1","doiUrl":"https://doi.org/10.21203/rs.3.rs-6861503/v1","draftVersion":[],"editorialEvents":[],"editorialNote":"","failedWorkflow":false,"files":[{"id":85792768,"identity":"b012cf79-b9bb-46a7-afa9-2be20c51e61f","added_by":"auto","created_at":"2025-07-01 18:06:57","extension":"pdf","order_by":1,"title":"","display":"","copyAsset":false,"role":"manuscript-pdf","size":848171,"visible":true,"origin":"","legend":"","description":"","filename":"DesignandsimulationofaMEMSsingleproofmasscapacitiveaccelerometerwithintegralparallelplatecapacitors.pdf","url":"https://assets-eu.researchsquare.com/files/rs-6861503/v1_covered_cd6f1ac5-8f19-496a-83cd-310f872d4258.pdf"}],"financialInterests":"No competing interests reported.","formattedTitle":"Design and simulation of a MEMS single proof mass capacitive accelerometer with integral parallel-plate capacitors","fulltext":[],"fulltextSource":"","fullText":"","funders":[],"hasAdminPriorityOnWorkflow":false,"hasManuscriptDocX":false,"hasOptedInToPreprint":true,"hasPassedJournalQc":"","hasAnyPriority":false,"hideJournal":false,"highlight":"","institution":"","isAcceptedByJournal":true,"isAuthorSuppliedPdf":true,"isDeskRejected":"","isHiddenFromSearch":false,"isInQc":false,"isInWorkflow":false,"isPdf":true,"isPdfUpToDate":true,"isWithdrawnOrRetracted":false,"journal":{"display":true,"email":"[email protected]","identity":"microsystem-technologies","isNatureJournal":false,"hasQc":true,"allowDirectSubmit":false,"externalIdentity":"mite","sideBox":"Learn more about [Microsystem Technologies](http://link.springer.com/journal/542)","snPcode":"542","submissionUrl":"https://submission.nature.com/new-submission/542/3","title":"Microsystem Technologies","twitterHandle":"","acdcEnabled":true,"dfaEnabled":true,"editorialSystem":"stoa","reportingPortfolio":"Springer Hybrid","inReviewEnabled":true,"inReviewRevisionsEnabled":false},"keywords":"","lastPublishedDoi":"10.21203/rs.3.rs-6861503/v1","lastPublishedDoiUrl":"https://doi.org/10.21203/rs.3.rs-6861503/v1","license":{"name":"CC BY 4.0","url":"https://creativecommons.org/licenses/by/4.0/"},"manuscriptAbstract":"\u003cp\u003eThis work presents an accelerometer that uses capacitive sensing mechanisms. 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