Novel Submicron Sheet Fully-Enclosed Gate-Drift SOI LDMOS Achieving Ultra-Low RON,sp

Novel Submicron Sheet Fully-Enclosed Gate-Drift SOI LDMOS Achieving Ultra-Low RON,sp | Research Square window.SnipcartSettings = { analytics: { enabled: false } }; (function() { var accessVector = localStorage.getItem('access_vector') || ''; window.dataLayer = window.dataLayer || []; if (accessVector) { window.dataLayer.push({ user: { profile: { profileInfo: { snid: accessVector } } } }); } })(); (function(w,d,s,l,i){w[l]=w[l]||[];w[l].push({'gtm.start':new Date().getTime(),event:'gtm.js'});var f=d.getElementsByTagName(s)[0],j=d.createElement(s),dl=l!='dataLayer'?'&l='+l:'';j.async=true;j.src='https://www.googletagmanager.com/gtm.js?id='+i+dl;f.parentNode.insertBefore(j,f);})(window,document,'script','dataLayer','GTM-K279D39R'); Browse Preprints In Review Journals COVID-19 Preprints AJE Video Bytes Research Tools Research Promotion AJE Professional Editing AJE Rubriq About Preprint Platform In Review Editorial Policies Our Team Advisory Board Help Center Sign In Submit a Preprint Cite Share Download PDF Research Article Novel Submicron Sheet Fully-Enclosed Gate-Drift SOI LDMOS Achieving Ultra-Low RON,sp Ziye Deng, Qi Li, Lanyi Liang, Yonghe Chen, Ye Deng, Hong Huang, and 1 more This is a preprint; it has not been peer reviewed by a journal. https://doi.org/ 10.21203/rs.3.rs-7913354/v1 This work is licensed under a CC BY 4.0 License Status: Under Review Version 1 posted 9 You are reading this latest preprint version Abstract A lateral double-diffused MOSFET based on silicon-on-insulator technology with submicron sheet fully-enclosed gate and drift structures (FEGD-LDMOS) is proposed and investigated. The fully-enclosed gate (FEG) architecture maximizes effective channel width utilization, significantly reducing channel resistance while enhancing gate control over charge carriers. Meanwhile, the ON-resistance in the drift is significantly reduced, as the proposed FEGD device incorporates a fully-enclosed drift (FED) region that completely surrounds the drift and introduces a 3D completely enclosed electron accumulation layer (EAL) in the drift region. Moreover, a control electrode integrated atop the FED region deftly modulates the strength of the EAL to achieve the optimal accumulation effect, which reduces the ON-state power consumption. Consequently, the FEGD device allows synergistic optimization of drift and channel resistances, achieving an ultra-low specific ON-resistance ( \((R_{ON,sp})\) ) . Simulation results indicated that the \((R_{ON,sp})\) of FEGD-LDMOS was reduced from 14.18 \((\text{m}\Omega \cdot \text{cm}^2)\) for the conventional planar LDMOS (Cov. LDMOS) to 0.14 \((\text{m}\Omega \cdot \text{cm}^2)\) , representing a remarkable reduction of 99.0% at the same breakdown voltage ( BV ) of 190 V. The Figure-of-merit ( FOM ) of the FEGD-LDMOS increased from 2.8 MW/ \((\text{cm}^2)\) for the Cov. LDMOS to an extremely-high 269.1 MW/ \((\text{cm}^2)\) , demonstrating exceptional performance. Breakdown voltage Specific ON-resistance LDMOS Silicon On Insulator (SOI) Fully-enclosed Auxiliary electrode Full Text Additional Declarations No competing interests reported. Cite Share Download PDF Status: Under Review Version 1 posted Editorial decision: Revision requested 30 Jan, 2026 Reviews received at journal 29 Dec, 2025 Reviews received at journal 05 Dec, 2025 Reviewers agreed at journal 03 Dec, 2025 Reviewers agreed at journal 03 Dec, 2025 Reviewers invited by journal 03 Dec, 2025 Editor assigned by journal 21 Oct, 2025 Submission checks completed at journal 21 Oct, 2025 First submitted to journal 21 Oct, 2025 You are reading this latest preprint version Research Square lets you share your work early, gain feedback from the community, and start making changes to your manuscript prior to peer review in a journal. As a division of Research Square Company, we’re committed to making research communication faster, fairer, and more useful. We do this by developing innovative software and high quality services for the global research community. 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Also discoverable on Platform About Our Team In Review Editorial Policies Advisory Board Help Center Resources Author Services Accessibility API Access RSS feed Manage Cookie Preferences © Research Square 2026 | ISSN 2693-5015 (online) Privacy Policy Terms of Service Do Not Sell My Personal Information {"props":{"pageProps":{"initialData":{"identity":"rs-7913354","acceptedTermsAndConditions":true,"allowDirectSubmit":false,"archivedVersions":[],"articleType":"Research Article","associatedPublications":[],"authors":[{"id":555018367,"identity":"566e6385-17f1-4037-a4ed-0b9694ec0508","order_by":0,"name":"Ziye Deng","email":"","orcid":"","institution":"Guilin University of Electronic Technology","correspondingAuthor":false,"prefix":"","firstName":"Ziye","middleName":"","lastName":"Deng","suffix":""},{"id":555018368,"identity":"1864cd6f-bb27-4ead-a9b9-37457504a000","order_by":1,"name":"Qi Li","email":"data:image/png;base64,iVBORw0KGgoAAAANSUhEUgAAAZAAAAAyAQMAAABI0h/eAAAABlBMVEX///8AAABVwtN+AAAACXBIWXMAAA7EAAAOxAGVKw4bAAAAxUlEQVRIiWNgGAWjYBACPghlA+WyEaEFqiYNiJlJ03KYFC3s2YkPPu44b7fheP8Bhg9lhxn4ZzcQ0MLzdrPhzDO3kzecOczAOOPcYQaJOwcIaJHI3SbN23Y72eBGMgMzb9thBgOJBKK0nEs2uP+YgfkvCVoO2BncYGZgZiRKC9gvbckJkmeSDQ72nEvnkbhBQAs/e+7GBx/b7Oz5jh98+OBHmbUc/wwCWhgYIAoSG4DEASDmIaQersWeCJWjYBSMglEwUgEAODRBQJw9tSgAAAAASUVORK5CYII=","orcid":"","institution":"Guilin University of Electronic Technology","correspondingAuthor":true,"prefix":"","firstName":"Qi","middleName":"","lastName":"Li","suffix":""},{"id":555018370,"identity":"1d00bd43-a029-4329-801f-190ab6cbe10d","order_by":2,"name":"Lanyi Liang","email":"","orcid":"","institution":"Guilin University of Electronic Technology","correspondingAuthor":false,"prefix":"","firstName":"Lanyi","middleName":"","lastName":"Liang","suffix":""},{"id":555018371,"identity":"f74eaa23-dfe0-485f-81ba-47ffc6e34763","order_by":3,"name":"Yonghe Chen","email":"","orcid":"","institution":"Guilin University of Electronic Technology","correspondingAuthor":false,"prefix":"","firstName":"Yonghe","middleName":"","lastName":"Chen","suffix":""},{"id":555018372,"identity":"f5f88df9-e518-414c-b571-dc7d6ae9332c","order_by":4,"name":"Ye Deng","email":"","orcid":"","institution":"Guilin University of Electronic Technology","correspondingAuthor":false,"prefix":"","firstName":"Ye","middleName":"","lastName":"Deng","suffix":""},{"id":555018373,"identity":"81bdc3e1-a571-419f-b97c-47edf25b6873","order_by":5,"name":"Hong Huang","email":"","orcid":"","institution":"Guilin University of Electronic Technology","correspondingAuthor":false,"prefix":"","firstName":"Hong","middleName":"","lastName":"Huang","suffix":""},{"id":555018374,"identity":"6349d22b-c6b5-4058-90b7-30d779928d3b","order_by":6,"name":"Xiaosong Hu","email":"","orcid":"","institution":"Guilin University of Electronic Technology","correspondingAuthor":false,"prefix":"","firstName":"Xiaosong","middleName":"","lastName":"Hu","suffix":""}],"badges":[],"createdAt":"2025-10-21 10:16:25","currentVersionCode":1,"declarations":"","doi":"10.21203/rs.3.rs-7913354/v1","doiUrl":"https://doi.org/10.21203/rs.3.rs-7913354/v1","draftVersion":[],"editorialEvents":[],"editorialNote":"","failedWorkflow":false,"files":[{"id":97515819,"identity":"d5c1cfcc-b7f1-4530-a7f9-4490ab3ec63c","added_by":"auto","created_at":"2025-12-05 10:02:38","extension":"json","order_by":0,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":8618,"visible":true,"origin":"","legend":"","description":"","filename":"e7304ec0b7e042b6a9369264753bf97f.json","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/b6ab05904dbc8ce9c95a25df.json"},{"id":97515824,"identity":"65a7c568-a7a6-4d4c-bcef-7a23ab1047cc","added_by":"auto","created_at":"2025-12-05 10:02:39","extension":"xml","order_by":1,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":102754,"visible":true,"origin":"","legend":"","description":"","filename":"e7304ec0b7e042b6a9369264753bf97f1enriched.xml","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/e617a351b1d5c2cb6143417b.xml"},{"id":97672010,"identity":"9336f734-fc59-4dfe-8050-9379ba95eb59","added_by":"auto","created_at":"2025-12-08 09:33:45","extension":"jpg","order_by":2,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":2636165,"visible":true,"origin":"","legend":"","description":"","filename":"1.jpg","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/bde4a6a6258966bc0e29afd9.jpg"},{"id":97515828,"identity":"f61117d7-1c75-4beb-bf56-0cc24cc4ac72","added_by":"auto","created_at":"2025-12-05 10:02:39","extension":"jpg","order_by":3,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":5127757,"visible":true,"origin":"","legend":"","description":"","filename":"2.jpg","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/0a2fd480cc2ea7dbb3de3fcd.jpg"},{"id":97670289,"identity":"051856bb-00de-4806-a35c-242fb4e02088","added_by":"auto","created_at":"2025-12-08 09:30:11","extension":"jpg","order_by":4,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":4995422,"visible":true,"origin":"","legend":"","description":"","filename":"3.jpg","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/b429137e841fbd0194129941.jpg"},{"id":97515822,"identity":"8dae646f-0556-452a-a0dc-0220624f0c27","added_by":"auto","created_at":"2025-12-05 10:02:39","extension":"jpg","order_by":5,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":4452172,"visible":true,"origin":"","legend":"","description":"","filename":"4.jpg","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/f514c34a6aa39e493d7f1f1d.jpg"},{"id":97515827,"identity":"1afa5227-4e1b-4c29-980b-c0ffa1cc3153","added_by":"auto","created_at":"2025-12-05 10:02:39","extension":"jpg","order_by":6,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":5051753,"visible":true,"origin":"","legend":"","description":"","filename":"5.jpg","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/2a7910cac51ae0413df0d4e6.jpg"},{"id":97670900,"identity":"6b875006-1b6d-4963-baf1-079cdd0e4360","added_by":"auto","created_at":"2025-12-08 09:31:30","extension":"pdf","order_by":7,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":29164628,"visible":true,"origin":"","legend":"","description":"","filename":"FEGDLDMOS.pdf","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/74401afa295d61ff19ffa46d.pdf"},{"id":97515821,"identity":"cb6276af-a6ec-46ec-a158-7f7c00ef4cdb","added_by":"auto","created_at":"2025-12-05 10:02:38","extension":"doc","order_by":8,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":20480,"visible":true,"origin":"","legend":"","description":"","filename":"coveringletter.doc","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/60b857d23722b72c4ac71fd3.doc"},{"id":97515820,"identity":"5113818c-55fb-4230-b527-355b82a072c5","added_by":"auto","created_at":"2025-12-05 10:02:38","extension":"eps","order_by":9,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":2890,"visible":true,"origin":"","legend":"","description":"","filename":"empty.eps","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/8659e649288d504aa2d1c189.eps"},{"id":97515826,"identity":"3d197d6d-2093-4e03-b5c2-80480a348ccb","added_by":"auto","created_at":"2025-12-05 10:02:39","extension":"eps","order_by":10,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":91593,"visible":true,"origin":"","legend":"","description":"","filename":"fig.eps","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/95382ab8318c9866113667f8.eps"},{"id":97515838,"identity":"694599a8-00b6-4cc1-b969-26935c0a3b03","added_by":"auto","created_at":"2025-12-05 10:02:39","extension":"jpg","order_by":11,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":2640276,"visible":true,"origin":"","legend":"","description":"","filename":"fig1.jpg","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/b9fd3429c5c48e38b96790c0.jpg"},{"id":97670666,"identity":"c7784882-6506-403d-a190-9ead6a7a27ff","added_by":"auto","created_at":"2025-12-08 09:31:09","extension":"jpg","order_by":12,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":1035194,"visible":true,"origin":"","legend":"","description":"","filename":"fig10.jpg","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/64ddc206326398b64917bc0e.jpg"},{"id":97515845,"identity":"6aa5d1c5-eaf7-4f9d-816c-271d17a81f74","added_by":"auto","created_at":"2025-12-05 10:02:39","extension":"jpg","order_by":13,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":1256691,"visible":true,"origin":"","legend":"","description":"","filename":"fig11.jpg","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/c97ccc371b96652084d54a87.jpg"},{"id":97515831,"identity":"8bab0740-dbf4-4470-a45d-2a2c4ebe9906","added_by":"auto","created_at":"2025-12-05 10:02:39","extension":"jpg","order_by":14,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":829081,"visible":true,"origin":"","legend":"","description":"","filename":"fig12.jpg","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/b44e4ac65dbf830b1ead706a.jpg"},{"id":97670301,"identity":"c762067b-e785-46e4-ad1c-ad1155e02b0e","added_by":"auto","created_at":"2025-12-08 09:30:13","extension":"jpg","order_by":15,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":4943833,"visible":true,"origin":"","legend":"","description":"","filename":"fig13.jpg","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/83de7a9313f5e7d4ee1671bc.jpg"},{"id":97515847,"identity":"b6473735-f9ff-4f63-b1b9-d626b64a5bef","added_by":"auto","created_at":"2025-12-05 10:02:39","extension":"jpg","order_by":16,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":2290340,"visible":true,"origin":"","legend":"","description":"","filename":"fig2.jpg","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/5b2ce8fdc96ae19209de81b1.jpg"},{"id":97670946,"identity":"8354a494-7611-4097-9b6d-b044a907a31a","added_by":"auto","created_at":"2025-12-08 09:31:33","extension":"jpg","order_by":17,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":4374552,"visible":true,"origin":"","legend":"","description":"","filename":"fig3.jpg","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/b27ab596983e5575a6f879db.jpg"},{"id":97515857,"identity":"7e6e37e1-548a-4239-8657-632fb0a57d0e","added_by":"auto","created_at":"2025-12-05 10:02:40","extension":"jpg","order_by":18,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":1365347,"visible":true,"origin":"","legend":"","description":"","filename":"fig4.jpg","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/08c47230d1391710961f0c8d.jpg"},{"id":97671437,"identity":"fc81c853-0d04-48b2-b495-755864a8534a","added_by":"auto","created_at":"2025-12-08 09:32:37","extension":"jpg","order_by":19,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":4507498,"visible":true,"origin":"","legend":"","description":"","filename":"fig5.jpg","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/254afb3504587abd6f84e4b5.jpg"},{"id":97670244,"identity":"efeb6aab-1237-4eea-ae21-59eb8ebf2cc2","added_by":"auto","created_at":"2025-12-08 09:29:59","extension":"jpg","order_by":20,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":2120332,"visible":true,"origin":"","legend":"","description":"","filename":"fig6.jpg","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/50619a8a2bf150c437359d10.jpg"},{"id":97670950,"identity":"54cef3f2-e8b4-4b50-b608-68c88454221d","added_by":"auto","created_at":"2025-12-08 09:31:34","extension":"jpg","order_by":21,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":1361662,"visible":true,"origin":"","legend":"","description":"","filename":"fig7.jpg","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/962e43ba0975e32a28c9107b.jpg"},{"id":97671477,"identity":"2d87b7e0-afdc-4e93-bf89-af672fdfa155","added_by":"auto","created_at":"2025-12-08 09:32:38","extension":"jpg","order_by":22,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":979152,"visible":true,"origin":"","legend":"","description":"","filename":"fig8.jpg","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/508c237419243f8889546905.jpg"},{"id":97515856,"identity":"00024138-d2f5-433f-ad99-dbc58fa0cb8b","added_by":"auto","created_at":"2025-12-05 10:02:40","extension":"jpg","order_by":23,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":981991,"visible":true,"origin":"","legend":"","description":"","filename":"fig9.jpg","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/5a75eb8d04ebd5e96d82fbe5.jpg"},{"id":97515830,"identity":"51652c56-7d79-4b54-bc48-5c1074a628ab","added_by":"auto","created_at":"2025-12-05 10:02:39","extension":"bst","order_by":24,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":146013,"visible":true,"origin":"","legend":"","description":"","filename":"snapacite.bst","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/cc1a38345e6e69a36d1c52ff.bst"},{"id":97515835,"identity":"f5251bc8-6099-4eed-abf7-b2a782707000","added_by":"auto","created_at":"2025-12-05 10:02:39","extension":"bst","order_by":25,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":29828,"visible":true,"origin":"","legend":"","description":"","filename":"snaps.bst","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/a9afd0a0ef625adada203510.bst"},{"id":97515842,"identity":"a8ae0d60-1419-4f41-9b9a-48f9fdf9b302","added_by":"auto","created_at":"2025-12-05 10:02:39","extension":"pdf","order_by":26,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":421391,"visible":true,"origin":"","legend":"","description":"","filename":"snarticle.pdf","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/8ff110f195b6a362db66e6d8.pdf"},{"id":97671268,"identity":"d7e0fd2e-9433-4766-a651-7a90e9e400b3","added_by":"auto","created_at":"2025-12-08 09:32:21","extension":"bst","order_by":27,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":35517,"visible":true,"origin":"","legend":"","description":"","filename":"snbasic.bst","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/6d847d9eb2ea58d42f87c896.bst"},{"id":97515850,"identity":"c3be4424-9603-4763-afde-a4ae1d0a5062","added_by":"auto","created_at":"2025-12-05 10:02:39","extension":"bst","order_by":28,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":33968,"visible":true,"origin":"","legend":"","description":"","filename":"snchicago.bst","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/c81d8cdcd7ad0cb689da1edc.bst"},{"id":97515841,"identity":"cc558a45-7d12-4e29-8d85-3971340874e2","added_by":"auto","created_at":"2025-12-05 10:02:39","extension":"cls","order_by":29,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":55928,"visible":true,"origin":"","legend":"","description":"","filename":"snjnl.cls","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/253d370722415dd995ed3cf6.cls"},{"id":97515839,"identity":"e37e2362-b371-4a61-9925-71e676192dad","added_by":"auto","created_at":"2025-12-05 10:02:39","extension":"bst","order_by":30,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":64023,"visible":true,"origin":"","legend":"","description":"","filename":"snmathphysay.bst","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/049ad972ed9d0fe6601bd921.bst"},{"id":97515837,"identity":"b3676438-abf5-405e-9c55-d7377764b827","added_by":"auto","created_at":"2025-12-05 10:02:39","extension":"bst","order_by":31,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":64166,"visible":true,"origin":"","legend":"","description":"","filename":"snmathphysnum.bst","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/d800c03a10e8d06e5e536ea1.bst"},{"id":97515833,"identity":"71846bb8-8286-450b-be9f-41410969894a","added_by":"auto","created_at":"2025-12-05 10:02:39","extension":"bst","order_by":32,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":37333,"visible":true,"origin":"","legend":"","description":"","filename":"snnature.bst","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/d720717c271c1bc8c38f4db3.bst"},{"id":97515852,"identity":"28af5aa4-6e3e-44aa-ad10-788c230a6a12","added_by":"auto","created_at":"2025-12-05 10:02:39","extension":"bst","order_by":33,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":39951,"visible":true,"origin":"","legend":"","description":"","filename":"snvancouveray.bst","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/899fd2a5bd0bb69d64792c97.bst"},{"id":97515844,"identity":"7dc69b43-2297-4ecb-854c-eac248726aa1","added_by":"auto","created_at":"2025-12-05 10:02:39","extension":"bst","order_by":34,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":40758,"visible":true,"origin":"","legend":"","description":"","filename":"snvancouvernum.bst","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/57fda493dc1c7eb948c9eb11.bst"},{"id":97515858,"identity":"d08a2e8e-e990-4254-9e49-8dd3933acf4d","added_by":"auto","created_at":"2025-12-05 10:02:40","extension":"pdf","order_by":35,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":418495,"visible":true,"origin":"","legend":"","description":"","filename":"usermanual.pdf","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/f4d6555c72ea55156e8c79a9.pdf"},{"id":97515843,"identity":"fd3849bc-14d2-4b68-b7ed-71cb63e4f0c9","added_by":"auto","created_at":"2025-12-05 10:02:39","extension":"png","order_by":37,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":4517370,"visible":true,"origin":"","legend":"","description":"","filename":"Online2.png","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/5522820ed34c6e0bce3d3b0b.png"},{"id":97515849,"identity":"1ad2935f-c001-42e9-9ec1-f3cce1b65501","added_by":"auto","created_at":"2025-12-05 10:02:39","extension":"png","order_by":38,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":6003766,"visible":true,"origin":"","legend":"","description":"","filename":"Online3.png","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/711baa6b2c04ed6b16c90f6e.png"},{"id":97515864,"identity":"c0bba7af-361a-43d5-96a2-cc0592d997ee","added_by":"auto","created_at":"2025-12-05 10:02:40","extension":"png","order_by":39,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":2673404,"visible":true,"origin":"","legend":"","description":"","filename":"Online4.png","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/a54cc7bc203c48f902b3b40b.png"},{"id":97515854,"identity":"866a4f11-dce0-406a-9ecb-4b49c5ca8387","added_by":"auto","created_at":"2025-12-05 10:02:40","extension":"png","order_by":40,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":2778115,"visible":true,"origin":"","legend":"","description":"","filename":"Online5.png","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/aa41c63e25a4daccc24e9524.png"},{"id":97515853,"identity":"a76d3947-d46f-4d05-9edb-a8aabb8a2102","added_by":"auto","created_at":"2025-12-05 10:02:39","extension":"png","order_by":41,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":1267884,"visible":true,"origin":"","legend":"","description":"","filename":"Onlinefig1.png","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/46f67f3a530245a5ca8432ca.png"},{"id":97515862,"identity":"685cecbf-146e-47a3-8ff8-0c0c8f0e6b45","added_by":"auto","created_at":"2025-12-05 10:02:40","extension":"png","order_by":43,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":851282,"visible":true,"origin":"","legend":"","description":"","filename":"Onlinefig11.png","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/a08eea15cb2473fb10b54c2d.png"},{"id":97515863,"identity":"e452eccf-8815-4413-b647-c939efdda816","added_by":"auto","created_at":"2025-12-05 10:02:40","extension":"png","order_by":49,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":4574121,"visible":true,"origin":"","legend":"","description":"","filename":"Onlinefig5.png","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/87226fc1f7109e8afdb98f96.png"},{"id":97670085,"identity":"f4877d72-58bb-4f9a-8a5f-79a4dead98c1","added_by":"auto","created_at":"2025-12-08 09:29:40","extension":"png","order_by":51,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":913559,"visible":true,"origin":"","legend":"","description":"","filename":"Onlinefig7.png","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/87d65dc4f39addac97d0270f.png"},{"id":97515860,"identity":"da5facfe-1d23-41a6-b2a4-f2039d38c6a6","added_by":"auto","created_at":"2025-12-05 10:02:40","extension":"xml","order_by":54,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":112280,"visible":true,"origin":"","legend":"","description":"","filename":"e7304ec0b7e042b6a9369264753bf97f1structuring.xml","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/fcacdc95b2b6ba18896e1d85.xml"},{"id":97515861,"identity":"4740926e-d766-4466-9905-2ec36368aba8","added_by":"auto","created_at":"2025-12-05 10:02:40","extension":"html","order_by":55,"title":"","display":"","copyAsset":false,"role":"acdc-reference","size":132729,"visible":true,"origin":"","legend":"","description":"","filename":"earlyproof.html","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1/e741c991cc7b32b42fe96530.html"},{"id":97678027,"identity":"a1f7ab40-d860-4390-8dad-fb201114ad83","added_by":"auto","created_at":"2025-12-08 09:55:04","extension":"pdf","order_by":1,"title":"","display":"","copyAsset":false,"role":"manuscript-pdf","size":28959186,"visible":true,"origin":"","legend":"","description":"","filename":"FEGDLDMOS.pdf","url":"https://assets-eu.researchsquare.com/files/rs-7913354/v1_covered_692afa75-5836-437b-ac53-5706633e15c1.pdf"}],"financialInterests":"No competing interests reported.","formattedTitle":"Novel Submicron Sheet Fully-Enclosed Gate-Drift SOI LDMOS Achieving Ultra-Low RON,sp","fulltext":[],"fulltextSource":"","fullText":"","funders":[],"hasAdminPriorityOnWorkflow":false,"hasManuscriptDocX":false,"hasOptedInToPreprint":true,"hasPassedJournalQc":"","hasAnyPriority":false,"hideJournal":false,"highlight":"","institution":"","isAcceptedByJournal":false,"isAuthorSuppliedPdf":true,"isDeskRejected":"","isHiddenFromSearch":false,"isInQc":false,"isInWorkflow":false,"isPdf":true,"isPdfUpToDate":true,"isWithdrawnOrRetracted":false,"journal":{"display":true,"email":"[email protected]","identity":"silicon","isNatureJournal":false,"hasQc":true,"allowDirectSubmit":false,"externalIdentity":"scon","sideBox":"Learn more about [Silicon](https://www.springer.com/journal/12633)","snPcode":"12633","submissionUrl":"https://submission.nature.com/new-submission/12633/3","title":"Silicon","twitterHandle":"","acdcEnabled":true,"dfaEnabled":true,"editorialSystem":"em","reportingPortfolio":"Springer Hybrid","inReviewEnabled":true,"inReviewRevisionsEnabled":false},"keywords":"Breakdown voltage, Specific ON-resistance, LDMOS, Silicon On Insulator (SOI), Fully-enclosed, Auxiliary electrode","lastPublishedDoi":"10.21203/rs.3.rs-7913354/v1","lastPublishedDoiUrl":"https://doi.org/10.21203/rs.3.rs-7913354/v1","license":{"name":"CC BY 4.0","url":"https://creativecommons.org/licenses/by/4.0/"},"manuscriptAbstract":"\u003cp\u003eA lateral double-diffused MOSFET based on silicon-on-insulator technology with submicron sheet fully-enclosed gate and drift structures (FEGD-LDMOS) is proposed and investigated. The fully-enclosed gate (FEG) architecture maximizes effective channel width utilization, significantly reducing channel resistance while enhancing gate control over charge carriers. Meanwhile, the ON-resistance in the drift is significantly reduced, as the proposed FEGD device incorporates a fully-enclosed drift (FED) region that completely surrounds the drift and introduces a 3D completely enclosed electron accumulation layer (EAL) in the drift region. Moreover, a control electrode integrated atop the FED region deftly modulates the strength of the EAL to achieve the optimal accumulation effect, which reduces the ON-state power consumption. Consequently, the FEGD device allows synergistic optimization of drift and channel resistances, achieving an ultra-low specific ON-resistance \u003cem\u003e(\u003cspan class=\"InlineEquation\"\u003e\u003cspan class=\"mathinline\"\u003e\\((R_{ON,sp})\\)\u003c/span\u003e\u003c/span\u003e)\u003c/em\u003e. Simulation results indicated that the \u003cspan class=\"InlineEquation\"\u003e\u003cspan class=\"mathinline\"\u003e\\((R_{ON,sp})\\)\u003c/span\u003e\u003c/span\u003e of FEGD-LDMOS was reduced from 14.18 \u003cspan class=\"InlineEquation\"\u003e\u003cspan class=\"mathinline\"\u003e\\((\\text{m}\\Omega \\cdot \\text{cm}^2)\\)\u003c/span\u003e\u003c/span\u003e for the conventional planar LDMOS (Cov. LDMOS) to 0.14 \u003cspan class=\"InlineEquation\"\u003e\u003cspan class=\"mathinline\"\u003e\\((\\text{m}\\Omega \\cdot \\text{cm}^2)\\)\u003c/span\u003e\u003c/span\u003e, representing a remarkable reduction of 99.0% at the same breakdown voltage (\u003cem\u003eBV\u003c/em\u003e) of 190 V. The Figure-of-merit (\u003cem\u003eFOM\u003c/em\u003e) of the FEGD-LDMOS increased from 2.8 MW/\u003cspan class=\"InlineEquation\"\u003e\u003cspan class=\"mathinline\"\u003e\\((\\text{cm}^2)\\)\u003c/span\u003e\u003c/span\u003e for the Cov. LDMOS to an extremely-high 269.1 MW/\u003cspan class=\"InlineEquation\"\u003e\u003cspan class=\"mathinline\"\u003e\\((\\text{cm}^2)\\)\u003c/span\u003e\u003c/span\u003e, demonstrating exceptional performance.\u003c/p\u003e","manuscriptTitle":"Novel Submicron Sheet Fully-Enclosed Gate-Drift SOI LDMOS Achieving Ultra-Low RON,sp","msid":"","msnumber":"","nonDraftVersions":[{"code":1,"date":"2025-12-05 10:02:33","doi":"10.21203/rs.3.rs-7913354/v1","editorialEvents":[{"type":"communityComments","content":0},{"type":"decision","content":"Revision requested","date":"2026-01-30T08:19:14+00:00","index":"","fulltext":""},{"type":"editorInvitedReview","content":"","date":"2025-12-29T17:50:58+00:00","index":"hide","fulltext":""},{"type":"editorInvitedReview","content":"","date":"2025-12-05T10:22:22+00:00","index":"hide","fulltext":""},{"type":"reviewerAgreed","content":"298501070846413545560032358679307491007","date":"2025-12-04T04:44:01+00:00","index":"hide","fulltext":""},{"type":"reviewerAgreed","content":"233623669477415939187862749701348450605","date":"2025-12-04T03:07:05+00:00","index":"hide","fulltext":""},{"type":"reviewersInvited","content":"","date":"2025-12-04T02:56:07+00:00","index":"","fulltext":""},{"type":"editorAssigned","content":"","date":"2025-10-22T01:27:34+00:00","index":"","fulltext":""},{"type":"checksComplete","content":"","date":"2025-10-22T01:26:37+00:00","index":"","fulltext":""},{"type":"submitted","content":"Silicon","date":"2025-10-21T09:54:55+00:00","index":"","fulltext":""}],"status":"published","journal":{"display":true,"email":"[email protected]","identity":"silicon","isNatureJournal":false,"hasQc":true,"allowDirectSubmit":false,"externalIdentity":"scon","sideBox":"Learn more about [Silicon](https://www.springer.com/journal/12633)","snPcode":"12633","submissionUrl":"https://submission.nature.com/new-submission/12633/3","title":"Silicon","twitterHandle":"","acdcEnabled":true,"dfaEnabled":true,"editorialSystem":"em","reportingPortfolio":"Springer Hybrid","inReviewEnabled":true,"inReviewRevisionsEnabled":false}}],"origin":"","ownerIdentity":"62e8a55b-f438-4e91-a731-64386564b3c7","owner":[],"postedDate":"December 5th, 2025","published":true,"recentEditorialEvents":[],"rejectedJournal":[],"revision":"","amendment":"","status":"under-review","subjectAreas":[],"tags":[],"updatedAt":"2026-03-04T08:10:46+00:00","versionOfRecord":[],"versionCreatedAt":"2025-12-05 10:02:33","video":"","vorDoi":"","vorDoiUrl":"","workflowStages":[]},"version":"v1","identity":"rs-7913354","journalConfig":"researchsquare"},"__N_SSP":true},"page":"/article/[identity]/[[...version]]","query":{"redirect":"/article/rs-7913354","identity":"rs-7913354","version":["v1"]},"buildId":"XKTyCvWXoU3ODBz1xrDgd","isFallback":false,"isExperimentalCompile":false,"dynamicIds":[84888],"gssp":true,"scriptLoader":[]}