Mechanical properties and polishing performance of force rheological polishing slurry under vibration

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The simulation results show a similar trend to the experimental results, indicating that the pressure on the workpiece surface under vibration is positively correlated with the amplitude and frequency. The apparent morphology of the slurry under vibration is observed, the slurry undergoes a transition from liquid-like to solid-like state under vibration. The effect of different amplitudes and frequencies on the polishing of stainless steel sheet is investigated. When the polishing speed of 40 rpm, the amplitude of 0.35 mm, and the frequency of 80 Hz, the surface roughness S a of the workpiece decreases from (80 ± 10) nm to (7.1 ± 0.9) nm after 30 minutes of processing, with a material removal rate of 68 nm min − 1 . Physical sciences/Engineering/Mechanical engineering Physical sciences/Materials science/Techniques and instrumentation Vibration-assisted Force rheological polishing Material removal rate Surface roughness Figures Figure 1 Figure 2 Figure 3 Figure 4 Figure 5 Figure 6 Figure 7 Figure 8 Figure 9 Figure 10 Figure 11 Figure 12 Figure 13 Figure 14 Figure 15 Figure 16 Figure 17 Figure 18 Figure 19 Figure 20 Introduction Polishing is a main finishing method for high quality surface. In order to respond to continuously developing workpiece materials and meet the increasing quality requirement of parts and elements, various polishing methods were developed in the past few decades. Chemical mechanical polishing (CMP) 1 has been the preferred finishing method for hard and brittle materials, metallic materials and crystal materials in the applications of semiconductors, optics and structures, and achieved great success in commercial production 2 . Noncontact polishing method, typically including elastic emission machining (EEM) 3 , hydrodynamic polishing (HP) 4 and float polishing (FP) 5 , was proposed to obtain damage-free surface such as x-ray reflecting mirror made of monocrystalline silicon. Electrochemical polishing (ECP) 6,7 is widely applied in finishing “difficult-to-finish” metals such as tungsten, titanium and tantalum, and expanded to various electrochemical finishing processes. Magnetic field assisted polishing methods such as magnetic abrasive finishing (MAF) 8 , magnetic float polishing (MFP) 9 and magnetorheological finishing (MRF) 10,11 are proposed to finish the curved surface with high efficiency. As the rapid development of components with aspherical surface and free-form surface, computer-controlled polishing methods with deterministic material removal process have attracted high attention 12 . Bonnet tool polishing (BTP) 13 , MRF and electrorheological fluid-assisted polishing (EFP) 14 are successfully used in the deterministic polishing for aspherical surface and free-form surface, and high surface quality with less surface/sub-surface damage can be obtained with the ‘genital’ material removal process of the three polishing methods. Fluid jet polishing (FJP) 15 and magnetorheological jet polishing (MJP) 16,17 utilizing high kinetic energy liquid flow to spray impacting particles on the workpiece surface are considered as effective options to finish the steep concave. CMP can achieve both surface flatness and roughness, obtaining ultra-smooth and damage-free surfaces. However, the CMP process is highly sensitive to large abrasives and the chemical polishing slurry used has room for improvement in terms of environmental compatibility. EEM can obtain the damage free ultra-smooth surface, but the processing efficiency is limited due to several or dozens of atomic level of material removal amount only. The relatively high cost of magnetorheological fluid limits the wide application of magnetic field assisted polishing. There is still room for a high efficiency, high quality and low cost polishing method. Lyu 18 innovatively proposed shear-thickening polishing method (STP), which is an efficient and flexible polishing method based on the shear-thickening effect of non-Newtonian fluids. The STP method solves the issues of low polishing efficiency resulting from the limited restraint of slurry on abrasives in traditional polishing techniques, as well as the strong sensitivity of polishing quality to inconsistent abrasive sizes. STP has achieved efficient and precise polishing of lithium tantalite substrate 19 , quartz glass wafers 20 , hard alloy threaded inserts 21 , and curved concave surfaces of turbine blades 22 . To meet the demands of more complex ultra-precision polishing, the Lyu’s team has proposed the force rheological polishing method (FRP), which builds upon the principles of shear-thickening. The FRP method utilizes flexible abrasive retention to remove material during the polishing process, effectively reducing the risk of surface damage from large abrasives and eliminating the presence of subsurface damage layers after polishing. The rheological process of the traditional FRP method is difficult to control due to its strong dependence on polishing speed. On the one hand, when the rotation speed of the polishing tank is too low, it cannot generate an effective shear rate, resulting in a decrease in the holding force of the slurry on the abrasives and the shear force on the workpiece surface. On the other hand, the centrifugal effect on the slurry will cause it to be flung off if the polishing speed is too high, leading to uneven distribution of the slurry. These factors significantly inhibit the polishing efficiency and quality. This paper proposes a vibration-assisted force rheological polishing method (VFRP) to address the issues in the FRP. VFRP actively controls the rheological effect intensity of the slurry through vibration assistance, thereby achieving viscosity control. On the basis of ensuring the shear-thickening strength, VFRP effectively reduces the dependence of the shear-thickening degree on the velocity of the slurry in the FRP process. The pressure applied to the workpiece surface under various vibration parameters was simulated using ANSYS, and experimental verification has been conducted. The apparent morphology of the slurry under vibration was observed. The influence of various vibration parameters on the polishing of stainless steel sheet was analyzed. An ultra-smooth workpiece surface is obtained under the determined process parameters. The principle of VFRP The principle of FRP Shear thickening fluid (STF) is a type of non-Newtonian fluid, and its shear viscosity increases with the applied shear rate 23 . The mechanism of the shear thickening effect is widely accepted based on the theory of hydrogen cluster formation, as shown in Fig. 1a 24 . The principle of FRP is illustrated in Fig. 1 b. When the slurry moves relative to the workpiece, and the part in contact with the workpiece is subjected to shear stress exceeding the critical value, a shear thickening effect is formed. The uniform dispersion of the solid particles in the slurry wraps the abrasives to form particle clusters. The viscosity of the slurry in the contact area increases sharply, presenting a solid property instantly, enhancing the control of abrasives, forming a flexible "fixed abrasive tool" on the workpiece surface, and realizing the efficient and flexible machining of workpiece materials through the micro-cutting of abrasives. Thus, the material removal rate and surface quality can be effectively improved. As mentioned above, the strength of the shear thickening effect depends on the relative motion velocity, and the rheological process of the slurry is difficult to control. Within a certain range, stronger shear thickening requires a higher speed. Problems such as centrifugal force and uneven distribution of abrasives caused by high polishing speed (as shown in Fig. 2 ) and low polishing speed not forming a good shear thickening effect cannot be effectively solved in practice. Therefore, actively controlling shear thickening, that is, reducing the dependence of the shear thickening effect on the polishing speed, has become an important problem in FRP applications. The principle of VFRP The principle of VFRP is shown in Fig. 3 . A non-Newtonian power law fluid is used as the base liquid, and abrasives or micro-powders are added to prepare the slurry. The slurry is subjected to vibration in the machining area during the machining process, resulting in a relative phase difference between particles in the slurry, which generates a certain shear rate and leads to the rheological effect of the slurry in the polishing area. The interaction force between solid particles enhances, leading to an increase in the viscosity of the slurry and enhancing its holding power on the abrasives. Due to its excellent flow characteristics, the slurry can form a flexible “fixed abrasive tool” that tightly adheres to the surface being processed, allowing for material removal through the flexible gripping of abrasives. Active control of the shear thickening level of the slurry is achieved by adjusting the amplitude and vibration frequency, enabling effective shear thickening effect at lower polishing speeds. This increases the holding power of the slurry on the abrasives and the shear force on the workpiece surface. VFRP avoids the problems of slurry splattering and uneven distribution that arise from increasing the polishing speed in traditional FRP methods to achieve efficient material removal. Simulation and experiment of surface pressure of slurry on workpiece under vibration Simulation parameters To investigate the mechanical properties of the slurry under vibration, simulation parameters are set based on the form of vibration applied to the slurry in the schematic diagram. Firstly, vibration plate is an ideal plane rigid material. Secondly, the dispersed phases are uniformly distributed in the FRP slurry. Thirdly, the processing environmental temperature is controlled at 25°C. Based on the Computational Fluid Dynamics (CFD) module in the FLUENT software, the pressure simulation of the vibrating plate acting on different slurry is carried out. The simulation step chart is shown in Fig. 4 . The model is established and meshed in ANSYS as shown in Fig. 5 . To improve the accuracy and convergence of the calculation results, the fluid domain is meshed by mesh module in ANSYS. The mesh method is set as triangle and the max element size is set to 1 mm 2 . The outer boundary of the fluid domain is specified as a solid wall boundary. Fluent is designated as the solver, and uses its powerful interface to write User Define Files (UDF) to define the motion of the vibrating plate. The vibration plate motion is set to rigid body motion, and its area is the moving wall. The minimum mesh is set to 0.7 mm 2 to ensure that the meshes are all positive volumes in the simulation process, and the mesh deformation is set to smoothing and remeshing. Since the vibration frequency is higher than 60 Hz, the calculation time step is set to 1.5×10 − 3 s. The walls are all set as the boundary conditions of no-slip wall, and the standard wall function is used near the wall. The fluid in the computational domain is set as a non-Newtonian fluid, and the consistency coefficient K is 4×10 − 4 and the viscosity index n is 2.7, which is obtained by fitting the rheological curve of the prepared slurry. Simulation results and discussion The simulation results of the pressure exerted on the vibrating plate at different vibration frequencies are shown in Fig. 6 , with an amplitude of 0.3 mm. The peak pressures corresponding to frequencies of 60 Hz, 80 Hz, 100 Hz, and 120 Hz are 5.690×10 4 Pa, 1.538×10 5 Pa, 2.209×10 5 Pa, and 3.794×10 5 Pa, respectively. The peak pressure on the surface of the vibrating plate increases continuously with the increase in vibration frequency when the amplitude remains constant. The peak shear rate generated by the vibration of the slurry is directly proportional to the frequency. The simulation results of the force exerted on the vibrating plate at different amplitudes, with a fixed vibration frequency of 100 Hz, are shown in Fig. 7 . At amplitudes of 0.15 mm, 0.25 mm, 0.35 mm, and 0.45 mm, the corresponding peak pressures are 4.502×10 4 Pa, 2.247×10 5 Pa, 7.732×10 5 Pa, and 1.939×10 6 Pa, respectively. The peak pressure on the surface of the vibrating plate increases continuously with the increase in amplitude when the vibration frequency remains constant. The peak shear rate generated by the vibration of the slurry is directly proportional to the amplitude. Experiment and discussion Pressure experiment of slurry on workpiece surface under vibration To study the evolution of the surface pressure of the slurry on the workpiece during the vibration process, a force measuring platform device was built as shown in Fig. 8 . VFRP slurry is placed in the polishing pool. The voice coil motor is fixed on the rotating spindle, and the vibration signal with controllable amplitude and frequency is output through the control software. The vibrating plate exerts a vibration effect on the slurry, and the phase difference between the particles in the vibrating slurry will form a shear rate and produce a rheological effect. The force chain is formed between the solid particles, which strengthens the mutual force and increases the viscosity of the slurry. When the vibrating plate and the slurry move relative to each other, the slurry will form a certain pressure on the vibrating plate. The slurry will exert pressure on the vibrating plate when the vibrating plate and the slurry are in relative motion. The force sensor is a high-precision pressure sensor from Spartan Industries, which can accurately measure the tensile force. The sensor surface area is 1 cm 2 and the measurement accuracy is 0.1 N. The force sensor is fixed on the top of the amplitude rod, and the force of the slurry on the vibrating plate is collected by the sensor during the vibration process. When the amplitude is 0.3 mm, the vibration of different vibration frequencies is applied to the VFRP slurry, and the pressure on the vibrating plate is shown in Fig. 9 . When the vibration frequency is 100 Hz, the vibration of different vibration frequencies is applied to the VFRP slurry, and the pressure on the vibrating plate is shown in Fig. 10 , and the horizontal line is the average pressure curve. When the vibration frequency is constant, the peak pressure and average pressure exerted by the slurry on the vibration plate also increase as the amplitude increases. It can be obtained from the relationship between shear rate, amplitude and frequency, as the vibration frequency and amplitude of the slurry increase, the resulting shear rate is also larger, and the viscosity of the slurry is larger. Therefore, during the vibration process, the vibrating plate is more pressure. To visually observe the apparent morphology of the slurry under vibration, a vibrating plate is used to apply vibration to the slurry, and the apparent morphological changes of the vibrating slurry are observed using a high-speed photography system. When the vibration frequency is 60 Hz, the observed morphologies of the slurry under different phases are shown in Fig. 11 . The slurry is liquid without vibration, which has a water mirror reflection, as shown in Fig. 11 a. Figure 11 b shows the apparent morphology of the slurry when the vibrating plate is at maximum amplitude, where the slurry exhibits striped patterns and hole formations. This is due to the phase difference formed by the particles in the vibrating slurry, resulting in shear rate and shear thickening effect, which leads to an increase in viscosity and a solid-like state of the slurry. Figure 11 (c) shows the morphology of the slurry when the vibrating plate rebounds. Since the vibration frequency is higher than the response frequency for particle cluster disintegration in the slurry, the slurry remains in a shear thickening state. Based on surface pressure simulations and experiments on the workpiece, as well as observations of the apparent morphology of the slurry under vibration, it can be concluded that the slurry undergoes a transition from a liquid state to a solid-like state when subjected to vibration. Additionally, it has been observed that with increasing amplitude and frequency, the slurry exerts higher peak pressures on the workpiece surface. The changes in the pressure exerted by the slurry on the workpiece surface during VFRP process have a significant impact on the polishing efficiency. Therefore, it is important to investigate the influence of vibration parameters on the polishing process. Polishing experiment The VFRP slurry was prepared by uniformly mixing multiple hydroxyl polymers, abrasives, deionized water, and additives in a certain proportion. The rheological properties of the VFRP slurry were measured using a stress-controlled rheometer (MCR 302, Anton Paar, Austria). A cone plate with a diameter of 25 mm and a cone angle of 2° was used, with a gap of 0.103 mm. The measurement temperature was controlled at 25°C using a Peltier heating jacket. Three measurements were taken to reduce errors. The flow curve of the VFRP slurry with abrasive mass fraction of 12% is shown in Fig. 12 . The viscosity of the slurry exhibited three stages as the shear rate varied. The viscosity decreased with increasing shear rate at low shear rates, indicating shear thinning behavior. The viscosity increased significantly at shear rates exceeding a critical value, displaying strong shear thickening behavior. The slurry exhibited shear thinning behavior again at higher shear rates. The experimental setup for VFRP is shown in Fig. 13 . The workpiece is fixed on a rotating shaft using a fixture, and the slurry in the polishing tank generates relative motion with the workpiece. The voice coil motor is fixed on the rotating spindle through a conductive slip ring. During the polishing process, it applies axial vibrations to the workpiece with a certain frequency and amplitude. On one hand, this leads to effective relative displacement between the workpiece and the slurry. On the other hand, the vibration-induced rheological effect in the slurry causes a sharp increase in viscosity and enhances the retention force on the abrasives. Stainless steel sheet with a diameter of 25 mm are used as the workpieces for easy observation of the machining results. Table 1 shows the experimental conditions for VFRP, and the positions of observation points are indicated in Fig. 14 . The observation interval is 5 minutes. The mass of the workpiece before and after polishing is measured using a precision balance (MSA225S-CE) with an accuracy of 0.01 mg, and the mass difference Δ m was calculated. Three measurements are taken and the average value is calculated. The surface roughness at different positions is measured using a white light interferometer (Super View W1). The sampling area size is 0.5 mm × 0.5 mm, and the measurement results are averaged. The calculation method for the material removal rate is given in Eq. ( 1 ). $$MRR={10^7}\Delta m/(\rho St)$$ 1 where Δ m is the quality difference g before and after polishing, ρ is the quartz glass density g/cm 3 , S is the processing area cm 2 , and it is the processing time (min). Table 1 VFRP polishing experiment conditions. Parameters Value Workpiece 316 stainless steel ρ w = 8.03 g/cm 3 D =Ø25 mm, Thickness = 1 mm Diameter of polishing tank / mm 400 w (SiO 2 )/ % 12 Polishing speed / (r·min − 1 ) 40 Frequency / Hz 40, 60, 80, 100, 120 Amplitude / mm 0.15,0.25, 0.35, 0.45, 0.55 Observation interval / min 10 Influence of vibration frequency The changes in the material removal rate and surface roughness at different vibration frequencies are shown in Fig. 15 , when the rotation speed of the slurry was 40 rpm and the amplitude was 0.45 mm. With an increase in vibration frequency, the material removal rate and the decreasing rate of surface roughness first increases and then decreases. According to the relationship between the shear rate and vibration frequency, increasing the vibration frequency can improve the shear rate of the slurry in the processing area, thereby improving the viscosity of the slurry in the processing area, and the shear force and pressure of the slurry on the workpiece. Therefore, increasing the vibration frequency when the amplitude is constant can improve the MRR of the material and cause the surface roughness to decrease faster. However, the material removal rate exhibited a downward trend with a further increase in the vibration frequency. When the vibration frequency exceeded 100 Hz, the vibration affected the shear thinning interval of the slurry curve corresponding to the shear rate formed by the slurry, thus leading to a decrease in the material removal rate. The ability of the slurry to remove microconvex peaks on the workpiece surface decreased, increasing the surface roughness. Influence of vibration amplitude The changes in the material removal rate and surface roughness at different vibration frequencies are shown in Fig. 16 , when the rotational speed of the slurry was 40 rpm and vibration frequency was 60 Hz. With an increase in the amplitude, the material removal rate and decline rate of the surface roughness first increased and then decreased. Increasing the amplitude when the vibration frequency is constant can improve the shear rate formed by the slurry and then improve the viscosity of the slurry in the processing area and the shear force on the workpiece. Therefore, increasing the amplitude can improve the MRR material removal rate and obtain low surface roughness. However, with a further increase in the amplitude, the material removal rate of the workpiece exhibited a downward trend, and the surface roughness increased. This trend occurs because when the amplitude exceeds 0.5 mm, the vibration will affect the shear thinning interval of the slurry curve corresponding to the shear rate formed by the slurry, thus leading to a decrease in the material removal rate. The ability of the slurry to remove microconvex peaks on the workpiece surface decreased, increasing the surface roughness. Influence of VFRP on workpiece surface quality The results obtained with and without vibration assistance at a polishing speed of 20 rpm as shown in Fig. 17 . In experimental group A, the surface roughness S a of the workpiece decreased from (80 ± 10) nm to (37.3 ± 5.6) nm after 30 min of polishing. The scratches on the workpiece surface were not removed, and the material removal rate was only 19.1 nm/min. Experimental group B had a vibration frequency of 40 Hz and an amplitude of 0.45 mm, while experimental group C had a vibration frequency of 100 Hz and an amplitude of 0.15 mm. At a low polishing speed, the shear thickening effect of the slurry caused by the shear was weak, and it could not form a sufficiently large shear force on the workpiece surface to achieve material removal. Therefore, the workpiece surface scratches were not removed after 30 min of polishing in experimental group A, and the roughness was high. After a certain amplitude and frequency were applied, the material removal rate of the workpiece increased, and the micro-convex peaks on the workpiece surface were removed after 30 min of polishing. The surface roughness of experimental group B and experimental group C reached 17.5 nm and 20.3 nm, respectively. The shear thickening effect occurs after the slurry is subjected to vibration, the apparent viscosity increases during the polishing process, and the shear force of the slurry on the workpiece surface increases. Therefore, the material removal in experimental group B reaches 28.6 nm/min, and that in experimental group C reaches 26.5 nm/min. By analyzing the influence of the aforementioned processing parameters on the material removal rate and surface roughness, the polishing experiments were carried out under the selected conditions with a polishing speed of 40 rpm, amplitude of 0.35 mm and vibration frequency of 80 Hz. The polishing experiment was conducted on 316 stainless steel, and the variation of the surface roughness S a and surface morphology with polishing time can be seen in Fig. 18 . After polishing for 30 minutes under the optimized processing conditions, the surface roughness S a of the workpiece rapidly decreased from (80 ± 10) nm to (7.1 ± 0.9) nm. The micro 3D morphology of the workpiece surface before and after polishing can be seen in Fig. 19 , and the macro surface morphology is shown in Fig. 20 . The scratches on the processed surface have been removed, and the rough surface has been polished into a smooth surface with a mirror-like effect. The highest material removal rate reached 68 nm min − 1 . Conclusion The VFRP proposed in this study can further improve polishing efficiency and quality by controlling the shear rate applied to the polishing to control the viscosity of the slurry. From the above theoretical and experimental analyses, the following conclusions can be drawn: Through simulation and experimental analysis of the surface pressure on the workpiece under different vibration parameters, it was found that the positive pressure on the vibrational plate increases with the increase of amplitude and frequency. From the observation of the apparent morphology of the slurry under vibration, it can be concluded that the slurry undergoes a transition from liquid-like to solid-like state when subjected to vibration. Increasing the amplitude and frequency within a certain range can effectively increase the shear rate of the slurry, as well as enhance its viscosity and the forces acting on the workpiece surface, thereby improving the polishing efficiency. However, excessively high vibration parameters will cause the slurry to become shear thinning, reducing its gripping force on the abrasives and subsequently decreasing the polishing efficiency. After polishing with the selected process parameters for 30 minutes, the surface roughness ( S a ) of the 316 stainless steel decreased rapidly from (80 ± 10) nm to (7.1 ± 0.9) nm, and the material removal rate reached 68 nm min − 1 . The scratches on the processed surface were removed, and the rough surface was polished to a smooth surface with a mirror-like effect. Declarations Competing interests The authors declare no competing interests. Author Contribution Q.S. and B.L. wrote the main manuscript. Q.S. and G.L. set and analyzed the experiments. W.D. and J.W. did measurement and observation. J.Y. and P.Z. reviewed the main manuscript. All authors have read and agreed to the published version of the manuscript. Acknowledgments This study was co-supported by the National Natural Science Foundation of China (52175441, U20A20293, 51775508), the Natural Science Foundation of Zhejiang Province (LD22E050010). 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Shear thickening in colloidal dispersions, Phys. Today. 62, 27–32 (2009). Additional Declarations No competing interests reported. Cite Share Download PDF Status: Posted Version 1 posted You are reading this latest preprint version Research Square lets you share your work early, gain feedback from the community, and start making changes to your manuscript prior to peer review in a journal. As a division of Research Square Company, we’re committed to making research communication faster, fairer, and more useful. We do this by developing innovative software and high quality services for the global research community. Our growing team is made up of researchers and industry professionals working together to solve the most critical problems facing scientific publishing. Also discoverable on Platform About Our Team In Review Editorial Policies Advisory Board Help Center Resources Author Services Accessibility API Access RSS feed Manage Cookie Preferences © Research Square 2026 | ISSN 2693-5015 (online) Privacy Policy Terms of Service Do Not Sell My Personal Information {"props":{"pageProps":{"initialData":{"identity":"rs-4432275","acceptedTermsAndConditions":true,"allowDirectSubmit":true,"archivedVersions":[],"articleType":"Article","associatedPublications":[],"authors":[{"id":307903764,"identity":"f9042b9d-f755-4625-8cef-be426545090f","order_by":0,"name":"Qi 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Technology","correspondingAuthor":false,"prefix":"","firstName":"Jiahuan","middleName":"","lastName":"Wang","suffix":""},{"id":307903769,"identity":"ca665553-49cc-43f2-bcd5-47ae6a622071","order_by":5,"name":"Ping Zhao","email":"","orcid":"","institution":"Zhejiang University of Technology","correspondingAuthor":false,"prefix":"","firstName":"Ping","middleName":"","lastName":"Zhao","suffix":""},{"id":307903770,"identity":"24da7afa-97e6-4f25-90fc-e3e6eec20cb6","order_by":6,"name":"Julong Yuan","email":"","orcid":"","institution":"Zhejiang University of Technology","correspondingAuthor":false,"prefix":"","firstName":"Julong","middleName":"","lastName":"Yuan","suffix":""}],"badges":[],"createdAt":"2024-05-16 16:11:28","currentVersionCode":1,"declarations":"","doi":"10.21203/rs.3.rs-4432275/v1","doiUrl":"https://doi.org/10.21203/rs.3.rs-4432275/v1","draftVersion":[],"editorialEvents":[],"editorialNote":"","failedWorkflow":false,"files":[{"id":57479920,"identity":"6db08d68-629f-4101-8357-0e2e2e743892","added_by":"auto","created_at":"2024-05-31 08:52:54","extension":"png","order_by":1,"title":"Figure 1","display":"","copyAsset":false,"role":"figure","size":556103,"visible":true,"origin":"","legend":"\u003cp\u003eMechanism of FRP process: (a) Illustration of shear thickening mechanism, (b) Schematic diagram of FRP.\u003c/p\u003e","description":"","filename":"1.png","url":"https://assets-eu.researchsquare.com/files/rs-4432275/v1/160a01baea9cf56063678666.png"},{"id":57481414,"identity":"971d1deb-266a-498b-be6b-7dd774c2769d","added_by":"auto","created_at":"2024-05-31 09:08:54","extension":"png","order_by":2,"title":"Figure 2","display":"","copyAsset":false,"role":"figure","size":550403,"visible":true,"origin":"","legend":"\u003cp\u003eEffect of centrifugal force on distribution of slurry.\u003c/p\u003e","description":"","filename":"2.png","url":"https://assets-eu.researchsquare.com/files/rs-4432275/v1/8d783328786dd527a448b991.png"},{"id":57479922,"identity":"ef52105a-72b6-4e4f-ab50-0036e54bfcfd","added_by":"auto","created_at":"2024-05-31 08:52:54","extension":"png","order_by":3,"title":"Figure 3","display":"","copyAsset":false,"role":"figure","size":201539,"visible":true,"origin":"","legend":"\u003cp\u003eSchematic diagram of VFRP.\u003c/p\u003e","description":"","filename":"3.png","url":"https://assets-eu.researchsquare.com/files/rs-4432275/v1/3f260981f2c74abc408989e3.png"},{"id":57480551,"identity":"3bbe7b08-ad57-4e37-966b-eba4a9c7369e","added_by":"auto","created_at":"2024-05-31 09:00:54","extension":"png","order_by":4,"title":"Figure 4","display":"","copyAsset":false,"role":"figure","size":72322,"visible":true,"origin":"","legend":"\u003cp\u003eSimulation process.\u003c/p\u003e","description":"","filename":"4.png","url":"https://assets-eu.researchsquare.com/files/rs-4432275/v1/7c874d0810461306f152e309.png"},{"id":57482129,"identity":"8fbab5f9-6eac-4ce0-a366-b22a22711d59","added_by":"auto","created_at":"2024-05-31 09:16:54","extension":"png","order_by":5,"title":"Figure 5","display":"","copyAsset":false,"role":"figure","size":359743,"visible":true,"origin":"","legend":"\u003cp\u003eModel and its meshing.\u003c/p\u003e","description":"","filename":"5.png","url":"https://assets-eu.researchsquare.com/files/rs-4432275/v1/a244f9beebcd7727282a4e3d.png"},{"id":57479923,"identity":"a18c205c-06c2-4f51-8c62-fc3adb9fa80e","added_by":"auto","created_at":"2024-05-31 08:52:54","extension":"png","order_by":6,"title":"Figure 6","display":"","copyAsset":false,"role":"figure","size":325572,"visible":true,"origin":"","legend":"\u003cp\u003eSimulation of force on vibrating plate at different vibration frequencies: (a) 60 Hz, (b) 80 Hz, (c) 100 Hz, (d) 120 Hz.\u003c/p\u003e","description":"","filename":"6.png","url":"https://assets-eu.researchsquare.com/files/rs-4432275/v1/4251ac6905350a68fbe9c6a1.png"},{"id":57482130,"identity":"6e6d0b7c-7bc7-4b46-9e3e-12f7c4b0a92f","added_by":"auto","created_at":"2024-05-31 09:16:54","extension":"png","order_by":7,"title":"Figure 7","display":"","copyAsset":false,"role":"figure","size":272012,"visible":true,"origin":"","legend":"\u003cp\u003eSimulation of force on vibrating plate at different amplitudes: (a) 0.15 mm, (b) 0.25 mm, (c) 0.35 mm, (d) 0.45 mm.\u003c/p\u003e","description":"","filename":"7.png","url":"https://assets-eu.researchsquare.com/files/rs-4432275/v1/33d4cf7ddb0d143bed778a8b.png"},{"id":57479931,"identity":"c423af9e-eb14-4684-8176-64400440ab84","added_by":"auto","created_at":"2024-05-31 08:52:55","extension":"png","order_by":8,"title":"Figure 8","display":"","copyAsset":false,"role":"figure","size":487070,"visible":true,"origin":"","legend":"\u003cp\u003eVibration-assisted force measuring device.\u003c/p\u003e","description":"","filename":"8.png","url":"https://assets-eu.researchsquare.com/files/rs-4432275/v1/04ae31a0bc631e2efbde277c.png"},{"id":57479926,"identity":"afce00b3-ae52-49d2-8ba5-774e50721ad9","added_by":"auto","created_at":"2024-05-31 08:52:54","extension":"png","order_by":9,"title":"Figure 9","display":"","copyAsset":false,"role":"figure","size":48895,"visible":true,"origin":"","legend":"\u003cp\u003eThe force on the workpiece surface under different vibration frequencies.\u003c/p\u003e","description":"","filename":"9.png","url":"https://assets-eu.researchsquare.com/files/rs-4432275/v1/74eabda660c547e37af597d2.png"},{"id":57480554,"identity":"6b9463df-3fc6-41f5-9b57-6a5fa33a4e82","added_by":"auto","created_at":"2024-05-31 09:00:54","extension":"png","order_by":10,"title":"Figure 10","display":"","copyAsset":false,"role":"figure","size":43579,"visible":true,"origin":"","legend":"\u003cp\u003eThe force on the workpiece surface under different amplitudes.\u003c/p\u003e","description":"","filename":"10.png","url":"https://assets-eu.researchsquare.com/files/rs-4432275/v1/ec8b39622fdc2dac066af9db.png"},{"id":57479938,"identity":"96c08026-5f85-47eb-b7d3-78abb3ccd84d","added_by":"auto","created_at":"2024-05-31 08:52:56","extension":"png","order_by":11,"title":"Figure 11","display":"","copyAsset":false,"role":"figure","size":957419,"visible":true,"origin":"","legend":"\u003cp\u003eThe morphology of polishing slurry under different phases when the vibration frequency is 60 Hz.\u003c/p\u003e","description":"","filename":"11.png","url":"https://assets-eu.researchsquare.com/files/rs-4432275/v1/a477a8d0182540a710b0d84b.png"},{"id":57479933,"identity":"d66211c9-dd3f-43bd-8cbd-9047f1a599b7","added_by":"auto","created_at":"2024-05-31 08:52:55","extension":"png","order_by":12,"title":"Figure 12","display":"","copyAsset":false,"role":"figure","size":19725,"visible":true,"origin":"","legend":"\u003cp\u003eRheological curves of slurry.\u003c/p\u003e","description":"","filename":"12.png","url":"https://assets-eu.researchsquare.com/files/rs-4432275/v1/cb75067e1138d9159adfed8c.png"},{"id":57479935,"identity":"ba0ff05b-f6c3-4fa4-a702-4aaddf18ec34","added_by":"auto","created_at":"2024-05-31 08:52:55","extension":"png","order_by":13,"title":"Figure 13","display":"","copyAsset":false,"role":"figure","size":499628,"visible":true,"origin":"","legend":"\u003cp\u003eSchematic diagram of VFRP and experimental device: (a) VFRP schematic, (b) Experimental equipment.\u003c/p\u003e","description":"","filename":"13.png","url":"https://assets-eu.researchsquare.com/files/rs-4432275/v1/fe7af7bf793e8b4f6095fa52.png"},{"id":57480557,"identity":"7e010b12-7b9b-47c3-a11a-b48b9c6fd360","added_by":"auto","created_at":"2024-05-31 09:00:55","extension":"png","order_by":14,"title":"Figure 14","display":"","copyAsset":false,"role":"figure","size":21159,"visible":true,"origin":"","legend":"\u003cp\u003eSchematic diagram of observation points on the 316 stainless steel.\u003c/p\u003e","description":"","filename":"14.png","url":"https://assets-eu.researchsquare.com/files/rs-4432275/v1/f65bf316aeac6bd769450963.png"},{"id":57481416,"identity":"3f5fdbe7-c98d-4a6c-83df-6a004c6d0900","added_by":"auto","created_at":"2024-05-31 09:08:54","extension":"png","order_by":15,"title":"Figure 15","display":"","copyAsset":false,"role":"figure","size":49310,"visible":true,"origin":"","legend":"\u003cp\u003eEffect of vibration frequencyon MRR and surface roughness.\u003c/p\u003e","description":"","filename":"15.png","url":"https://assets-eu.researchsquare.com/files/rs-4432275/v1/a3f981d26299e9fcb3566021.png"},{"id":57480558,"identity":"92f765cf-5865-469b-88af-fe8406222189","added_by":"auto","created_at":"2024-05-31 09:00:56","extension":"png","order_by":16,"title":"Figure 16","display":"","copyAsset":false,"role":"figure","size":54466,"visible":true,"origin":"","legend":"\u003cp\u003eEffect of vibration amplitude on MRR and surface roughness.\u003c/p\u003e","description":"","filename":"16.png","url":"https://assets-eu.researchsquare.com/files/rs-4432275/v1/bbc044a44d2c0fbf6e264f07.png"},{"id":57479930,"identity":"32ca1a6a-3a1d-406c-91fd-8320e4bba2c4","added_by":"auto","created_at":"2024-05-31 08:52:54","extension":"png","order_by":17,"title":"Figure 17","display":"","copyAsset":false,"role":"figure","size":32363,"visible":true,"origin":"","legend":"\u003cp\u003eEffect of vibration on material removal rate and surface roughness.\u003c/p\u003e","description":"","filename":"17.png","url":"https://assets-eu.researchsquare.com/files/rs-4432275/v1/ca613e19a28a2fbc35b3e71a.png"},{"id":57479936,"identity":"4fddbf90-8249-4dba-8f02-00af5c15a120","added_by":"auto","created_at":"2024-05-31 08:52:55","extension":"png","order_by":18,"title":"Figure 18","display":"","copyAsset":false,"role":"figure","size":243646,"visible":true,"origin":"","legend":"\u003cp\u003eSurface roughness changes with polishing time.\u003c/p\u003e","description":"","filename":"18.png","url":"https://assets-eu.researchsquare.com/files/rs-4432275/v1/117c3fad2ea979308d67024d.png"},{"id":57479940,"identity":"a3ea7295-efb4-403b-8794-e661f5594ba0","added_by":"auto","created_at":"2024-05-31 08:52:56","extension":"png","order_by":19,"title":"Figure 19","display":"","copyAsset":false,"role":"figure","size":517813,"visible":true,"origin":"","legend":"\u003cp\u003e3D topography of workpiece surface: (a) before polished, (b) Processed.\u003c/p\u003e","description":"","filename":"19.png","url":"https://assets-eu.researchsquare.com/files/rs-4432275/v1/c7fd8fe7a36e4c88e508c767.png"},{"id":57479937,"identity":"2780fa63-eb3c-4d84-a555-7c1608f6b1d2","added_by":"auto","created_at":"2024-05-31 08:52:55","extension":"png","order_by":20,"title":"Figure 20","display":"","copyAsset":false,"role":"figure","size":687640,"visible":true,"origin":"","legend":"\u003cp\u003eSurface of stainless steel workpiece before and after polishing.\u003c/p\u003e","description":"","filename":"20.png","url":"https://assets-eu.researchsquare.com/files/rs-4432275/v1/303a6029421d880f96614991.png"},{"id":71767679,"identity":"75f488b8-511c-44f3-8a7d-1da161e8eca4","added_by":"auto","created_at":"2024-12-18 12:02:14","extension":"pdf","order_by":0,"title":"","display":"","copyAsset":false,"role":"manuscript-pdf","size":5963235,"visible":true,"origin":"","legend":"","description":"","filename":"manuscript.pdf","url":"https://assets-eu.researchsquare.com/files/rs-4432275/v1/017a0375-1ed5-4ea1-9386-7c5b2582fbb6.pdf"}],"financialInterests":"No competing interests reported.","formattedTitle":"Mechanical properties and polishing performance of force rheological polishing slurry under vibration","fulltext":[{"header":"Introduction","content":"\u003cp\u003ePolishing is a main finishing method for high quality surface. In order to respond to continuously developing workpiece materials and meet the increasing quality requirement of parts and elements, various polishing methods were developed in the past few decades. Chemical mechanical polishing (CMP)\u003csup\u003e1\u003c/sup\u003e has been the preferred finishing method for hard and brittle materials, metallic materials and crystal materials in the applications of semiconductors, optics and structures, and achieved great success in commercial production\u003csup\u003e2\u003c/sup\u003e. Noncontact polishing method, typically including elastic emission machining (EEM)\u003csup\u003e3\u003c/sup\u003e, hydrodynamic polishing (HP)\u003csup\u003e4\u003c/sup\u003e and float polishing (FP)\u003csup\u003e5\u003c/sup\u003e, was proposed to obtain damage-free surface such as x-ray reflecting mirror made of monocrystalline silicon. Electrochemical polishing (ECP)\u003csup\u003e6,7\u003c/sup\u003e is widely applied in finishing \u0026ldquo;difficult-to-finish\u0026rdquo; metals such as tungsten, titanium and tantalum, and expanded to various electrochemical finishing processes. Magnetic field assisted polishing methods such as magnetic abrasive finishing (MAF)\u003csup\u003e8\u003c/sup\u003e, magnetic float polishing (MFP)\u003csup\u003e9\u003c/sup\u003e and magnetorheological finishing (MRF)\u003csup\u003e10,11\u003c/sup\u003e are proposed to finish the curved surface with high efficiency. As the rapid development of components with aspherical surface and free-form surface, computer-controlled polishing methods with deterministic material removal process have attracted high attention\u003csup\u003e12\u003c/sup\u003e. Bonnet tool polishing (BTP)\u003csup\u003e13\u003c/sup\u003e, MRF and electrorheological fluid-assisted polishing (EFP)\u003csup\u003e14\u003c/sup\u003e are successfully used in the deterministic polishing for aspherical surface and free-form surface, and high surface quality with less surface/sub-surface damage can be obtained with the \u0026lsquo;genital\u0026rsquo; material removal process of the three polishing methods. Fluid jet polishing (FJP)\u003csup\u003e15\u003c/sup\u003e and magnetorheological jet polishing (MJP)\u003csup\u003e16,17\u003c/sup\u003e utilizing high kinetic energy liquid flow to spray impacting particles on the workpiece surface are considered as effective options to finish the steep concave. CMP can achieve both surface flatness and roughness, obtaining ultra-smooth and damage-free surfaces. However, the CMP process is highly sensitive to large abrasives and the chemical polishing slurry used has room for improvement in terms of environmental compatibility. EEM can obtain the damage free ultra-smooth surface, but the processing efficiency is limited due to several or dozens of atomic level of material removal amount only. The relatively high cost of magnetorheological fluid limits the wide application of magnetic field assisted polishing. There is still room for a high efficiency, high quality and low cost polishing method.\u003c/p\u003e\u003cp\u003eLyu\u003csup\u003e18\u003c/sup\u003e innovatively proposed shear-thickening polishing method (STP), which is an efficient and flexible polishing method based on the shear-thickening effect of non-Newtonian fluids. The STP method solves the issues of low polishing efficiency resulting from the limited restraint of slurry on abrasives in traditional polishing techniques, as well as the strong sensitivity of polishing quality to inconsistent abrasive sizes. STP has achieved efficient and precise polishing of lithium tantalite substrate\u003csup\u003e19\u003c/sup\u003e, quartz glass wafers\u003csup\u003e20\u003c/sup\u003e, hard alloy threaded inserts\u003csup\u003e21\u003c/sup\u003e, and curved concave surfaces of turbine blades\u003csup\u003e22\u003c/sup\u003e. To meet the demands of more complex ultra-precision polishing, the Lyu\u0026rsquo;s team has proposed the force rheological polishing method (FRP), which builds upon the principles of shear-thickening. The FRP method utilizes flexible abrasive retention to remove material during the polishing process, effectively reducing the risk of surface damage from large abrasives and eliminating the presence of subsurface damage layers after polishing. The rheological process of the traditional FRP method is difficult to control due to its strong dependence on polishing speed. On the one hand, when the rotation speed of the polishing tank is too low, it cannot generate an effective shear rate, resulting in a decrease in the holding force of the slurry on the abrasives and the shear force on the workpiece surface. On the other hand, the centrifugal effect on the slurry will cause it to be flung off if the polishing speed is too high, leading to uneven distribution of the slurry. These factors significantly inhibit the polishing efficiency and quality.\u003c/p\u003e\u003cp\u003eThis paper proposes a vibration-assisted force rheological polishing method (VFRP) to address the issues in the FRP. VFRP actively controls the rheological effect intensity of the slurry through vibration assistance, thereby achieving viscosity control. On the basis of ensuring the shear-thickening strength, VFRP effectively reduces the dependence of the shear-thickening degree on the velocity of the slurry in the FRP process. The pressure applied to the workpiece surface under various vibration parameters was simulated using ANSYS, and experimental verification has been conducted. The apparent morphology of the slurry under vibration was observed. The influence of various vibration parameters on the polishing of stainless steel sheet was analyzed. An ultra-smooth workpiece surface is obtained under the determined process parameters.\u003c/p\u003e"},{"header":"The principle of VFRP","content":"\u003cdiv id=\"Sec2\" class=\"Section2\"\u003e \u003ch2\u003eThe principle of FRP\u003c/h2\u003e \u003cp\u003eShear thickening fluid (STF) is a type of non-Newtonian fluid, and its shear viscosity increases with the applied shear rate\u003csup\u003e23\u003c/sup\u003e. The mechanism of the shear thickening effect is widely accepted based on the theory of hydrogen cluster formation, as shown in Fig.\u0026nbsp;1a\u003csup\u003e24\u003c/sup\u003e. The principle of FRP is illustrated in Fig.\u0026nbsp;\u003cspan refid=\"Fig1\" class=\"InternalRef\"\u003e1\u003c/span\u003eb. When the slurry moves relative to the workpiece, and the part in contact with the workpiece is subjected to shear stress exceeding the critical value, a shear thickening effect is formed. The uniform dispersion of the solid particles in the slurry wraps the abrasives to form particle clusters. The viscosity of the slurry in the contact area increases sharply, presenting a solid property instantly, enhancing the control of abrasives, forming a flexible \"fixed abrasive tool\" on the workpiece surface, and realizing the efficient and flexible machining of workpiece materials through the micro-cutting of abrasives. Thus, the material removal rate and surface quality can be effectively improved.\u003c/p\u003e \u003cp\u003e \u003c/p\u003e \u003cp\u003eAs mentioned above, the strength of the shear thickening effect depends on the relative motion velocity, and the rheological process of the slurry is difficult to control. Within a certain range, stronger shear thickening requires a higher speed. Problems such as centrifugal force and uneven distribution of abrasives caused by high polishing speed (as shown in Fig.\u0026nbsp;\u003cspan refid=\"Fig2\" class=\"InternalRef\"\u003e2\u003c/span\u003e) and low polishing speed not forming a good shear thickening effect cannot be effectively solved in practice. Therefore, actively controlling shear thickening, that is, reducing the dependence of the shear thickening effect on the polishing speed, has become an important problem in FRP applications.\u003c/p\u003e \u003cp\u003e \u003c/p\u003e \u003c/div\u003e\n\u003ch3\u003eThe principle of VFRP\u003c/h3\u003e\n\u003cp\u003eThe principle of VFRP is shown in Fig.\u0026nbsp;\u003cspan refid=\"Fig3\" class=\"InternalRef\"\u003e3\u003c/span\u003e. A non-Newtonian power law fluid is used as the base liquid, and abrasives or micro-powders are added to prepare the slurry. The slurry is subjected to vibration in the machining area during the machining process, resulting in a relative phase difference between particles in the slurry, which generates a certain shear rate and leads to the rheological effect of the slurry in the polishing area. The interaction force between solid particles enhances, leading to an increase in the viscosity of the slurry and enhancing its holding power on the abrasives. Due to its excellent flow characteristics, the slurry can form a flexible \u0026ldquo;fixed abrasive tool\u0026rdquo; that tightly adheres to the surface being processed, allowing for material removal through the flexible gripping of abrasives. Active control of the shear thickening level of the slurry is achieved by adjusting the amplitude and vibration frequency, enabling effective shear thickening effect at lower polishing speeds. This increases the holding power of the slurry on the abrasives and the shear force on the workpiece surface. VFRP avoids the problems of slurry splattering and uneven distribution that arise from increasing the polishing speed in traditional FRP methods to achieve efficient material removal.\u003c/p\u003e \u003cp\u003e \u003c/p\u003e"},{"header":"Simulation and experiment of surface pressure of slurry on workpiece under vibration","content":"\u003cdiv id=\"Sec5\" class=\"Section2\"\u003e \u003ch2\u003eSimulation parameters\u003c/h2\u003e \u003cp\u003eTo investigate the mechanical properties of the slurry under vibration, simulation parameters are set based on the form of vibration applied to the slurry in the schematic diagram. Firstly, vibration plate is an ideal plane rigid material. Secondly, the dispersed phases are uniformly distributed in the FRP slurry. Thirdly, the processing environmental temperature is controlled at 25\u0026deg;C. Based on the Computational Fluid Dynamics (CFD) module in the FLUENT software, the pressure simulation of the vibrating plate acting on different slurry is carried out. The simulation step chart is shown in Fig.\u0026nbsp;\u003cspan refid=\"Fig4\" class=\"InternalRef\"\u003e4\u003c/span\u003e.\u003c/p\u003e\u003cp\u003eThe model is established and meshed in ANSYS as shown in Fig.\u0026nbsp;\u003cspan refid=\"Fig5\" class=\"InternalRef\"\u003e5\u003c/span\u003e. To improve the accuracy and convergence of the calculation results, the fluid domain is meshed by mesh module in ANSYS. The mesh method is set as triangle and the max element size is set to 1 mm\u003csup\u003e2\u003c/sup\u003e. The outer boundary of the fluid domain is specified as a solid wall boundary. Fluent is designated as the solver, and uses its powerful interface to write User Define Files (UDF) to define the motion of the vibrating plate. The vibration plate motion is set to rigid body motion, and its area is the moving wall. The minimum mesh is set to 0.7 mm\u003csup\u003e2\u003c/sup\u003e to ensure that the meshes are all positive volumes in the simulation process, and the mesh deformation is set to smoothing and remeshing. Since the vibration frequency is higher than 60 Hz, the calculation time step is set to 1.5\u0026times;10\u003csup\u003e\u0026minus;\u0026thinsp;3\u003c/sup\u003e s. The walls are all set as the boundary conditions of no-slip wall, and the standard wall function is used near the wall. The fluid in the computational domain is set as a non-Newtonian fluid, and the consistency coefficient \u003cem\u003eK\u003c/em\u003e is 4\u0026times;10\u003csup\u003e\u0026minus;\u0026thinsp;4\u003c/sup\u003e and the viscosity index \u003cem\u003en\u003c/em\u003e is 2.7, which is obtained by fitting the rheological curve of the prepared slurry.\u003c/p\u003e \u003cp\u003e \u003c/p\u003e \u003c/div\u003e\n\u003ch3\u003eSimulation results and discussion\u003c/h3\u003e\n\u003cp\u003eThe simulation results of the pressure exerted on the vibrating plate at different vibration frequencies are shown in Fig.\u0026nbsp;\u003cspan refid=\"Fig6\" class=\"InternalRef\"\u003e6\u003c/span\u003e, with an amplitude of 0.3 mm. The peak pressures corresponding to frequencies of 60 Hz, 80 Hz, 100 Hz, and 120 Hz are 5.690\u0026times;10\u003csup\u003e4\u003c/sup\u003e Pa, 1.538\u0026times;10\u003csup\u003e5\u003c/sup\u003e Pa, 2.209\u0026times;10\u003csup\u003e5\u003c/sup\u003e Pa, and 3.794\u0026times;10\u003csup\u003e5\u003c/sup\u003e Pa, respectively. The peak pressure on the surface of the vibrating plate increases continuously with the increase in vibration frequency when the amplitude remains constant. The peak shear rate generated by the vibration of the slurry is directly proportional to the frequency.\u003c/p\u003e \u003cp\u003e \u003c/p\u003e \u003cp\u003eThe simulation results of the force exerted on the vibrating plate at different amplitudes, with a fixed vibration frequency of 100 Hz, are shown in Fig.\u0026nbsp;\u003cspan refid=\"Fig7\" class=\"InternalRef\"\u003e7\u003c/span\u003e. At amplitudes of 0.15 mm, 0.25 mm, 0.35 mm, and 0.45 mm, the corresponding peak pressures are 4.502\u0026times;10\u003csup\u003e4\u003c/sup\u003e Pa, 2.247\u0026times;10\u003csup\u003e5\u003c/sup\u003e Pa, 7.732\u0026times;10\u003csup\u003e5\u003c/sup\u003e Pa, and 1.939\u0026times;10\u003csup\u003e6\u003c/sup\u003e Pa, respectively. The peak pressure on the surface of the vibrating plate increases continuously with the increase in amplitude when the vibration frequency remains constant. The peak shear rate generated by the vibration of the slurry is directly proportional to the amplitude.\u003c/p\u003e \u003cp\u003e \u003c/p\u003e"},{"header":"Experiment and discussion","content":"\u003cdiv id=\"Sec8\" class=\"Section2\"\u003e \u003ch2\u003ePressure experiment of slurry on workpiece surface under vibration\u003c/h2\u003e \u003cp\u003eTo study the evolution of the surface pressure of the slurry on the workpiece during the vibration process, a force measuring platform device was built as shown in Fig.\u0026nbsp;\u003cspan refid=\"Fig8\" class=\"InternalRef\"\u003e8\u003c/span\u003e. VFRP slurry is placed in the polishing pool. The voice coil motor is fixed on the rotating spindle, and the vibration signal with controllable amplitude and frequency is output through the control software. The vibrating plate exerts a vibration effect on the slurry, and the phase difference between the particles in the vibrating slurry will form a shear rate and produce a rheological effect. The force chain is formed between the solid particles, which strengthens the mutual force and increases the viscosity of the slurry. When the vibrating plate and the slurry move relative to each other, the slurry will form a certain pressure on the vibrating plate. The slurry will exert pressure on the vibrating plate when the vibrating plate and the slurry are in relative motion. The force sensor is a high-precision pressure sensor from Spartan Industries, which can accurately measure the tensile force. The sensor surface area is 1 cm\u003csup\u003e2\u003c/sup\u003e and the measurement accuracy is 0.1 N. The force sensor is fixed on the top of the amplitude rod, and the force of the slurry on the vibrating plate is collected by the sensor during the vibration process.\u003c/p\u003e \u003cp\u003e \u003c/p\u003e \u003cp\u003eWhen the amplitude is 0.3 mm, the vibration of different vibration frequencies is applied to the VFRP slurry, and the pressure on the vibrating plate is shown in Fig.\u0026nbsp;\u003cspan refid=\"Fig9\" class=\"InternalRef\"\u003e9\u003c/span\u003e. When the vibration frequency is 100 Hz, the vibration of different vibration frequencies is applied to the VFRP slurry, and the pressure on the vibrating plate is shown in Fig.\u0026nbsp;\u003cspan refid=\"Fig10\" class=\"InternalRef\"\u003e10\u003c/span\u003e, and the horizontal line is the average pressure curve. When the vibration frequency is constant, the peak pressure and average pressure exerted by the slurry on the vibration plate also increase as the amplitude increases. It can be obtained from the relationship between shear rate, amplitude and frequency, as the vibration frequency and amplitude of the slurry increase, the resulting shear rate is also larger, and the viscosity of the slurry is larger. Therefore, during the vibration process, the vibrating plate is more pressure.\u003c/p\u003e \u003cp\u003e \u003c/p\u003e \u003cp\u003e \u003c/p\u003e \u003cp\u003eTo visually observe the apparent morphology of the slurry under vibration, a vibrating plate is used to apply vibration to the slurry, and the apparent morphological changes of the vibrating slurry are observed using a high-speed photography system. When the vibration frequency is 60 Hz, the observed morphologies of the slurry under different phases are shown in Fig.\u0026nbsp;\u003cspan refid=\"Fig11\" class=\"InternalRef\"\u003e11\u003c/span\u003e. The slurry is liquid without vibration, which has a water mirror reflection, as shown in Fig.\u0026nbsp;\u003cspan refid=\"Fig11\" class=\"InternalRef\"\u003e11\u003c/span\u003ea. Figure\u0026nbsp;\u003cspan refid=\"Fig11\" class=\"InternalRef\"\u003e11\u003c/span\u003eb shows the apparent morphology of the slurry when the vibrating plate is at maximum amplitude, where the slurry exhibits striped patterns and hole formations. This is due to the phase difference formed by the particles in the vibrating slurry, resulting in shear rate and shear thickening effect, which leads to an increase in viscosity and a solid-like state of the slurry. Figure\u0026nbsp;\u003cspan refid=\"Fig11\" class=\"InternalRef\"\u003e11\u003c/span\u003e(c) shows the morphology of the slurry when the vibrating plate rebounds. Since the vibration frequency is higher than the response frequency for particle cluster disintegration in the slurry, the slurry remains in a shear thickening state.\u003c/p\u003e \u003cp\u003e \u003c/p\u003e \u003cp\u003eBased on surface pressure simulations and experiments on the workpiece, as well as observations of the apparent morphology of the slurry under vibration, it can be concluded that the slurry undergoes a transition from a liquid state to a solid-like state when subjected to vibration. Additionally, it has been observed that with increasing amplitude and frequency, the slurry exerts higher peak pressures on the workpiece surface. The changes in the pressure exerted by the slurry on the workpiece surface during VFRP process have a significant impact on the polishing efficiency. Therefore, it is important to investigate the influence of vibration parameters on the polishing process.\u003c/p\u003e \u003c/div\u003e\n\u003ch3\u003ePolishing experiment\u003c/h3\u003e\n\u003cp\u003eThe VFRP slurry was prepared by uniformly mixing multiple hydroxyl polymers, abrasives, deionized water, and additives in a certain proportion. The rheological properties of the VFRP slurry were measured using a stress-controlled rheometer (MCR 302, Anton Paar, Austria). A cone plate with a diameter of 25 mm and a cone angle of 2\u0026deg; was used, with a gap of 0.103 mm. The measurement temperature was controlled at 25\u0026deg;C using a Peltier heating jacket. Three measurements were taken to reduce errors. The flow curve of the VFRP slurry with abrasive mass fraction of 12% is shown in Fig.\u0026nbsp;\u003cspan refid=\"Fig12\" class=\"InternalRef\"\u003e12\u003c/span\u003e. The viscosity of the slurry exhibited three stages as the shear rate varied. The viscosity decreased with increasing shear rate at low shear rates, indicating shear thinning behavior. The viscosity increased significantly at shear rates exceeding a critical value, displaying strong shear thickening behavior. The slurry exhibited shear thinning behavior again at higher shear rates.\u003c/p\u003e \u003cp\u003eThe experimental setup for VFRP is shown in Fig.\u0026nbsp;\u003cspan refid=\"Fig13\" class=\"InternalRef\"\u003e13\u003c/span\u003e. The workpiece is fixed on a rotating shaft using a fixture, and the slurry in the polishing tank generates relative motion with the workpiece. The voice coil motor is fixed on the rotating spindle through a conductive slip ring. During the polishing process, it applies axial vibrations to the workpiece with a certain frequency and amplitude. On one hand, this leads to effective relative displacement between the workpiece and the slurry. On the other hand, the vibration-induced rheological effect in the slurry causes a sharp increase in viscosity and enhances the retention force on the abrasives. Stainless steel sheet with a diameter of 25 mm are used as the workpieces for easy observation of the machining results.\u003c/p\u003e \u003cp\u003e \u003c/p\u003e \u003cp\u003e \u003c/p\u003e \u003cp\u003eTable\u0026nbsp;\u003cspan refid=\"Tab1\" class=\"InternalRef\"\u003e1\u003c/span\u003e shows the experimental conditions for VFRP, and the positions of observation points are indicated in Fig.\u0026nbsp;\u003cspan refid=\"Fig14\" class=\"InternalRef\"\u003e14\u003c/span\u003e. The observation interval is 5 minutes. The mass of the workpiece before and after polishing is measured using a precision balance (MSA225S-CE) with an accuracy of 0.01 mg, and the mass difference Δ\u003cem\u003em\u003c/em\u003e was calculated. Three measurements are taken and the average value is calculated. The surface roughness at different positions is measured using a white light interferometer (Super View W1). The sampling area size is 0.5 mm \u0026times; 0.5 mm, and the measurement results are averaged. The calculation method for the material removal rate is given in Eq.\u0026nbsp;(\u003cspan refid=\"Equ1\" class=\"InternalRef\"\u003e1\u003c/span\u003e).\u003cdiv id=\"Equ1\" class=\"Equation\"\u003e\u003cdiv format=\"TEX\" class=\"mathdisplay\" id=\"FileID_Equ1\" name=\"EquationSource\"\u003e\n$$MRR={10^7}\\Delta m/(\\rho St)$$\u003c/div\u003e\u003cdiv class=\"EquationNumber\"\u003e1\u003c/div\u003e\u003c/div\u003e\u003c/p\u003e \u003cp\u003ewhere Δ\u003cem\u003em\u003c/em\u003e is the quality difference g before and after polishing, \u003cem\u003eρ\u003c/em\u003e is the quartz glass density g/cm\u003csup\u003e3\u003c/sup\u003e, \u003cem\u003eS\u003c/em\u003e is the processing area cm\u003csup\u003e2\u003c/sup\u003e, and it is the processing time (min).\u003c/p\u003e \u003cp\u003e \u003c/p\u003e \u003cp\u003e \u003cdiv class=\"gridtable\"\u003e\u003ctable float=\"Yes\" id=\"Tab1\" border=\"1\"\u003e \u003ccaption language=\"En\"\u003e \u003cdiv class=\"CaptionNumber\"\u003eTable 1\u003c/div\u003e \u003cdiv class=\"CaptionContent\"\u003e \u003cp\u003eVFRP polishing experiment conditions.\u003c/p\u003e \u003c/div\u003e \u003c/caption\u003e \u003ccolgroup cols=\"2\"\u003e \u003cdiv align=\"left\" class=\"colspec\" colname=\"c1\" colnum=\"1\"\u003e\u003c/div\u003e \u003cdiv align=\"left\" class=\"colspec\" colname=\"c2\" colnum=\"2\"\u003e\u003c/div\u003e \u003cthead\u003e \u003ctr\u003e \u003cth align=\"left\" colname=\"c1\"\u003e \u003cp\u003eParameters\u003c/p\u003e \u003c/th\u003e \u003cth align=\"left\" colname=\"c2\"\u003e \u003cp\u003eValue\u003c/p\u003e \u003c/th\u003e \u003c/tr\u003e \u003c/thead\u003e \u003ctbody\u003e \u003ctr\u003e \u003ctd align=\"left\" colname=\"c1\"\u003e \u003cp\u003eWorkpiece\u003c/p\u003e \u003c/td\u003e \u003ctd align=\"left\" colname=\"c2\"\u003e \u003cp\u003e316 stainless steel\u003c/p\u003e \u003cp\u003e\u003cem\u003eρ\u003c/em\u003e\u003csub\u003ew\u003c/sub\u003e\u0026thinsp;=\u0026thinsp;8.03 g/cm\u003csup\u003e3\u003c/sup\u003e\u003c/p\u003e \u003cp\u003e\u003cem\u003eD\u003c/em\u003e=\u0026Oslash;25 mm, Thickness\u0026thinsp;=\u0026thinsp;1 mm\u003c/p\u003e \u003c/td\u003e \u003c/tr\u003e \u003ctr\u003e \u003ctd align=\"left\" colname=\"c1\"\u003e \u003cp\u003eDiameter of polishing tank / mm\u003c/p\u003e \u003c/td\u003e \u003ctd align=\"left\" colname=\"c2\"\u003e \u003cp\u003e400\u003c/p\u003e \u003c/td\u003e \u003c/tr\u003e \u003ctr\u003e \u003ctd align=\"left\" colname=\"c1\"\u003e \u003cp\u003e\u003cem\u003ew\u003c/em\u003e(SiO\u003csub\u003e2\u003c/sub\u003e)/ %\u003c/p\u003e \u003c/td\u003e \u003ctd align=\"left\" colname=\"c2\"\u003e \u003cp\u003e12\u003c/p\u003e \u003c/td\u003e \u003c/tr\u003e \u003ctr\u003e \u003ctd align=\"left\" colname=\"c1\"\u003e \u003cp\u003ePolishing speed / (r\u0026middot;min\u003csup\u003e\u0026minus;\u0026thinsp;1\u003c/sup\u003e)\u003c/p\u003e \u003c/td\u003e \u003ctd align=\"left\" colname=\"c2\"\u003e \u003cp\u003e40\u003c/p\u003e \u003c/td\u003e \u003c/tr\u003e \u003ctr\u003e \u003ctd align=\"left\" colname=\"c1\"\u003e \u003cp\u003eFrequency / Hz\u003c/p\u003e \u003c/td\u003e \u003ctd align=\"left\" colname=\"c2\"\u003e \u003cp\u003e40, 60, 80, 100, 120\u003c/p\u003e \u003c/td\u003e \u003c/tr\u003e \u003ctr\u003e \u003ctd align=\"left\" colname=\"c1\"\u003e \u003cp\u003eAmplitude / mm\u003c/p\u003e \u003c/td\u003e \u003ctd align=\"left\" colname=\"c2\"\u003e \u003cp\u003e0.15,0.25, 0.35, 0.45, 0.55\u003c/p\u003e \u003c/td\u003e \u003c/tr\u003e \u003ctr\u003e \u003ctd align=\"left\" colname=\"c1\"\u003e \u003cp\u003eObservation interval / min\u003c/p\u003e \u003c/td\u003e \u003ctd align=\"left\" colname=\"c2\"\u003e \u003cp\u003e10\u003c/p\u003e \u003c/td\u003e \u003c/tr\u003e \u003c/tbody\u003e \u003c/colgroup\u003e \u003c/table\u003e\u003c/div\u003e \u003c/p\u003e \u003cdiv id=\"Sec10\" class=\"Section2\"\u003e \u003ch2\u003eInfluence of vibration frequency\u003c/h2\u003e \u003cp\u003eThe changes in the material removal rate and surface roughness at different vibration frequencies are shown in Fig.\u0026nbsp;\u003cspan refid=\"Fig15\" class=\"InternalRef\"\u003e15\u003c/span\u003e, when the rotation speed of the slurry was 40 rpm and the amplitude was 0.45 mm. With an increase in vibration frequency, the material removal rate and the decreasing rate of surface roughness first increases and then decreases. According to the relationship between the shear rate and vibration frequency, increasing the vibration frequency can improve the shear rate of the slurry in the processing area, thereby improving the viscosity of the slurry in the processing area, and the shear force and pressure of the slurry on the workpiece. Therefore, increasing the vibration frequency when the amplitude is constant can improve the MRR of the material and cause the surface roughness to decrease faster. However, the material removal rate exhibited a downward trend with a further increase in the vibration frequency. When the vibration frequency exceeded 100 Hz, the vibration affected the shear thinning interval of the slurry curve corresponding to the shear rate formed by the slurry, thus leading to a decrease in the material removal rate. The ability of the slurry to remove microconvex peaks on the workpiece surface decreased, increasing the surface roughness.\u003c/p\u003e \u003cp\u003e \u003c/p\u003e \u003c/div\u003e \u003cdiv id=\"Sec11\" class=\"Section2\"\u003e \u003ch2\u003eInfluence of vibration amplitude\u003c/h2\u003e \u003cp\u003eThe changes in the material removal rate and surface roughness at different vibration frequencies are shown in Fig.\u0026nbsp;\u003cspan refid=\"Fig16\" class=\"InternalRef\"\u003e16\u003c/span\u003e, when the rotational speed of the slurry was 40 rpm and vibration frequency was 60 Hz. With an increase in the amplitude, the material removal rate and decline rate of the surface roughness first increased and then decreased. Increasing the amplitude when the vibration frequency is constant can improve the shear rate formed by the slurry and then improve the viscosity of the slurry in the processing area and the shear force on the workpiece. Therefore, increasing the amplitude can improve the MRR material removal rate and obtain low surface roughness. However, with a further increase in the amplitude, the material removal rate of the workpiece exhibited a downward trend, and the surface roughness increased. This trend occurs because when the amplitude exceeds 0.5 mm, the vibration will affect the shear thinning interval of the slurry curve corresponding to the shear rate formed by the slurry, thus leading to a decrease in the material removal rate. The ability of the slurry to remove microconvex peaks on the workpiece surface decreased, increasing the surface roughness.\u003c/p\u003e \u003cp\u003e \u003c/p\u003e \u003c/div\u003e \u003cdiv id=\"Sec12\" class=\"Section2\"\u003e \u003ch2\u003eInfluence of VFRP on workpiece surface quality\u003c/h2\u003e \u003cp\u003eThe results obtained with and without vibration assistance at a polishing speed of 20 rpm as shown in Fig.\u0026nbsp;\u003cspan refid=\"Fig17\" class=\"InternalRef\"\u003e17\u003c/span\u003e. In experimental group A, the surface roughness \u003cem\u003eS\u003c/em\u003e\u003csub\u003ea\u003c/sub\u003e of the workpiece decreased from (80\u0026thinsp;\u0026plusmn;\u0026thinsp;10) nm to (37.3\u0026thinsp;\u0026plusmn;\u0026thinsp;5.6) nm after 30 min of polishing. The scratches on the workpiece surface were not removed, and the material removal rate was only 19.1 nm/min. Experimental group B had a vibration frequency of 40 Hz and an amplitude of 0.45 mm, while experimental group C had a vibration frequency of 100 Hz and an amplitude of 0.15 mm. At a low polishing speed, the shear thickening effect of the slurry caused by the shear was weak, and it could not form a sufficiently large shear force on the workpiece surface to achieve material removal. Therefore, the workpiece surface scratches were not removed after 30 min of polishing in experimental group A, and the roughness was high. After a certain amplitude and frequency were applied, the material removal rate of the workpiece increased, and the micro-convex peaks on the workpiece surface were removed after 30 min of polishing. The surface roughness of experimental group B and experimental group C reached 17.5 nm and 20.3 nm, respectively. The shear thickening effect occurs after the slurry is subjected to vibration, the apparent viscosity increases during the polishing process, and the shear force of the slurry on the workpiece surface increases. Therefore, the material removal in experimental group B reaches 28.6 nm/min, and that in experimental group C reaches 26.5 nm/min.\u003c/p\u003e \u003cp\u003e \u003c/p\u003e \u003cp\u003eBy analyzing the influence of the aforementioned processing parameters on the material removal rate and surface roughness, the polishing experiments were carried out under the selected conditions with a polishing speed of 40 rpm, amplitude of 0.35 mm and vibration frequency of 80 Hz.\u003c/p\u003e \u003cp\u003eThe polishing experiment was conducted on 316 stainless steel, and the variation of the surface roughness \u003cem\u003eS\u003c/em\u003e\u003csub\u003ea\u003c/sub\u003e and surface morphology with polishing time can be seen in Fig.\u0026nbsp;\u003cspan refid=\"Fig18\" class=\"InternalRef\"\u003e18\u003c/span\u003e. After polishing for 30 minutes under the optimized processing conditions, the surface roughness \u003cem\u003eS\u003c/em\u003e\u003csub\u003ea\u003c/sub\u003e of the workpiece rapidly decreased from (80\u0026thinsp;\u0026plusmn;\u0026thinsp;10) nm to (7.1\u0026thinsp;\u0026plusmn;\u0026thinsp;0.9) nm. The micro 3D morphology of the workpiece surface before and after polishing can be seen in Fig.\u0026nbsp;\u003cspan refid=\"Fig19\" class=\"InternalRef\"\u003e19\u003c/span\u003e, and the macro surface morphology is shown in Fig.\u0026nbsp;\u003cspan refid=\"Fig20\" class=\"InternalRef\"\u003e20\u003c/span\u003e. The scratches on the processed surface have been removed, and the rough surface has been polished into a smooth surface with a mirror-like effect. The highest material removal rate reached 68 nm min\u003csup\u003e\u0026minus;\u0026thinsp;1\u003c/sup\u003e.\u003c/p\u003e \u003cp\u003e \u003c/p\u003e \u003cp\u003e \u003c/p\u003e \u003cp\u003e \u003c/p\u003e \u003c/div\u003e"},{"header":"Conclusion","content":"\u003cp\u003eThe VFRP proposed in this study can further improve polishing efficiency and quality by controlling the shear rate applied to the polishing to control the viscosity of the slurry. From the above theoretical and experimental analyses, the following conclusions can be drawn:\u003c/p\u003e \u003cp\u003eThrough simulation and experimental analysis of the surface pressure on the workpiece under different vibration parameters, it was found that the positive pressure on the vibrational plate increases with the increase of amplitude and frequency. From the observation of the apparent morphology of the slurry under vibration, it can be concluded that the slurry undergoes a transition from liquid-like to solid-like state when subjected to vibration.\u003c/p\u003e \u003cp\u003eIncreasing the amplitude and frequency within a certain range can effectively increase the shear rate of the slurry, as well as enhance its viscosity and the forces acting on the workpiece surface, thereby improving the polishing efficiency. However, excessively high vibration parameters will cause the slurry to become shear thinning, reducing its gripping force on the abrasives and subsequently decreasing the polishing efficiency.\u003c/p\u003e \u003cp\u003eAfter polishing with the selected process parameters for 30 minutes, the surface roughness (\u003cem\u003eS\u003c/em\u003e\u003csub\u003ea\u003c/sub\u003e) of the 316 stainless steel decreased rapidly from (80\u0026thinsp;\u0026plusmn;\u0026thinsp;10) nm to (7.1\u0026thinsp;\u0026plusmn;\u0026thinsp;0.9) nm, and the material removal rate reached 68 nm min\u003csup\u003e\u0026minus;\u0026thinsp;1\u003c/sup\u003e. The scratches on the processed surface were removed, and the rough surface was polished to a smooth surface with a mirror-like effect.\u003c/p\u003e"},{"header":"Declarations","content":"\u003ch2\u003eCompeting interests\u003c/h2\u003e \u003cp\u003eThe authors declare no competing interests.\u003c/p\u003e\u003ch2\u003eAuthor Contribution\u003c/h2\u003e\u003cp\u003eQ.S. and B.L. wrote the main manuscript. Q.S. and G.L. set and analyzed the experiments. W.D. and J.W. did measurement and observation. J.Y. and P.Z. reviewed the main manuscript. All authors have read and agreed to the published version of the manuscript.\u003c/p\u003e\u003ch2\u003eAcknowledgments\u003c/h2\u003e \u003cp\u003eThis study was co-supported by the National Natural Science Foundation of China (52175441, U20A20293, 51775508), the Natural Science Foundation of Zhejiang Province (LD22E050010).\u003c/p\u003e\u003ch2\u003eData Availability\u003c/h2\u003e\u003cp\u003eData is provided within the manuscript or supplementary information files.\u003c/p\u003e"},{"header":"References","content":"\u003col\u003e\u003cli\u003e\u003cspan\u003eCheng, J. Huang, S. Lu, X. C. Preparation of surface modified ceria nanoparticles as abrasives for the application of chemical mechanical polishing (CMP). ECS. J. Solid State Sci. Technol. 9, 024015 (2020).\u003c/span\u003e\u003c/li\u003e \u003cli\u003e\u003cspan\u003eLiu, D. F. Yan, R. M. Chen, T. Material removal model of ultrasonic elliptical vibration-assisted chemical mechanical polishing for hard and brittle materials. 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Today. 62, 27\u0026ndash;32 (2009).\u003c/span\u003e\u003c/li\u003e\u003c/ol\u003e"}],"fulltextSource":"","fullText":"","funders":[],"hasAdminPriorityOnWorkflow":false,"hasManuscriptDocX":true,"hasOptedInToPreprint":true,"hasPassedJournalQc":"","hasAnyPriority":false,"hideJournal":true,"highlight":"","institution":"","isAcceptedByJournal":false,"isAuthorSuppliedPdf":false,"isDeskRejected":"","isHiddenFromSearch":false,"isInQc":false,"isInWorkflow":false,"isPdf":false,"isPdfUpToDate":true,"isWithdrawnOrRetracted":false,"journal":{"display":true,"email":"[email protected]","identity":"researchsquare","isNatureJournal":false,"hasQc":true,"allowDirectSubmit":true,"externalIdentity":"","sideBox":"","snPcode":"","submissionUrl":"/submission","title":"Research Square","twitterHandle":"researchsquare","acdcEnabled":true,"dfaEnabled":false,"editorialSystem":"","reportingPortfolio":"","inReviewEnabled":false,"inReviewRevisionsEnabled":true},"keywords":"Vibration-assisted, Force rheological polishing, Material removal rate, Surface roughness","lastPublishedDoi":"10.21203/rs.3.rs-4432275/v1","lastPublishedDoiUrl":"https://doi.org/10.21203/rs.3.rs-4432275/v1","license":{"name":"CC BY 4.0","url":"https://creativecommons.org/licenses/by/4.0/"},"manuscriptAbstract":"\u003cp\u003eTo explore the influence of vibration on the rheological properties and polishing effectiveness of slurry in vibration-assisted force rheological polishing process, the changes in forces on the vibrating plate under different vibration parameters are simulated using FLUENT software. The simulation results show a similar trend to the experimental results, indicating that the pressure on the workpiece surface under vibration is positively correlated with the amplitude and frequency. The apparent morphology of the slurry under vibration is observed, the slurry undergoes a transition from liquid-like to solid-like state under vibration. The effect of different amplitudes and frequencies on the polishing of stainless steel sheet is investigated. When the polishing speed of 40 rpm, the amplitude of 0.35 mm, and the frequency of 80 Hz, the surface roughness \u003cem\u003eS\u003c/em\u003e\u003csub\u003ea\u003c/sub\u003e of the workpiece decreases from (80\u0026thinsp;\u0026plusmn;\u0026thinsp;10) nm to (7.1\u0026thinsp;\u0026plusmn;\u0026thinsp;0.9) nm after 30 minutes of processing, with a material removal rate of 68 nm min\u003csup\u003e\u0026minus;\u0026thinsp;1\u003c/sup\u003e.\u003c/p\u003e","manuscriptTitle":"Mechanical properties and polishing performance of force rheological polishing slurry under vibration","msid":"","msnumber":"","nonDraftVersions":[{"code":1,"date":"2024-05-31 08:52:50","doi":"10.21203/rs.3.rs-4432275/v1","editorialEvents":[{"type":"communityComments","content":0}],"status":"published","journal":{"display":true,"email":"[email protected]","identity":"researchsquare","isNatureJournal":false,"hasQc":true,"allowDirectSubmit":true,"externalIdentity":"","sideBox":"","snPcode":"","submissionUrl":"/submission","title":"Research Square","twitterHandle":"researchsquare","acdcEnabled":true,"dfaEnabled":false,"editorialSystem":"","reportingPortfolio":"","inReviewEnabled":false,"inReviewRevisionsEnabled":true}}],"origin":"","ownerIdentity":"9e47bb3b-a488-472a-883b-ae58604ea151","owner":[],"postedDate":"May 31st, 2024","published":true,"recentEditorialEvents":[],"rejectedJournal":[],"revision":"","amendment":"","status":"posted","subjectAreas":[{"id":32523883,"name":"Physical sciences/Engineering/Mechanical engineering"},{"id":32523884,"name":"Physical sciences/Materials science/Techniques and instrumentation"}],"tags":[],"updatedAt":"2024-12-18T11:54:04+00:00","versionOfRecord":[],"versionCreatedAt":"2024-05-31 08:52:50","video":"","vorDoi":"","vorDoiUrl":"","workflowStages":[]},"version":"v1","identity":"rs-4432275","journalConfig":"researchsquare"},"__N_SSP":true},"page":"/article/[identity]/[[...version]]","query":{"redirect":"/article/rs-4432275","identity":"rs-4432275","version":["v1"]},"buildId":"qtupq5eGEP_6zYnWcrvyt","isFallback":false,"isExperimentalCompile":false,"dynamicIds":[84888],"gssp":true,"scriptLoader":[]}