Peter Basa

ORCID: 0000-0003-1317-1709 · 1 paper in corpus · active 2024
2024
Epitaxial silicon transition zone measurements by spreading resistance profiling (SRP) and Fourier transform infrared (FTIR) reflectometry
·doi:10.22541/au.171208087.73027201/v1

Silicon epitaxy is an essential building block in the manufacturing of complementary metal-oxide semiconductor (CMOS) devices. Accurate determination of epitaxial layer thickness is indispensable for a uniform and reproducible process. In t…